KR970050329U - 반도체 웨이퍼박스 포장구조 - Google Patents

반도체 웨이퍼박스 포장구조

Info

Publication number
KR970050329U
KR970050329U KR2019960000991U KR19960000991U KR970050329U KR 970050329 U KR970050329 U KR 970050329U KR 2019960000991 U KR2019960000991 U KR 2019960000991U KR 19960000991 U KR19960000991 U KR 19960000991U KR 970050329 U KR970050329 U KR 970050329U
Authority
KR
South Korea
Prior art keywords
semiconductor wafer
packaging structure
box packaging
wafer box
semiconductor
Prior art date
Application number
KR2019960000991U
Other languages
English (en)
Other versions
KR0136331Y1 (ko
Inventor
손민영
이규영
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR2019960000991U priority Critical patent/KR0136331Y1/ko
Publication of KR970050329U publication Critical patent/KR970050329U/ko
Application granted granted Critical
Publication of KR0136331Y1 publication Critical patent/KR0136331Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67376—Closed carriers characterised by sealing arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
KR2019960000991U 1996-01-24 1996-01-24 반도체 웨이퍼박스 포장구조 KR0136331Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960000991U KR0136331Y1 (ko) 1996-01-24 1996-01-24 반도체 웨이퍼박스 포장구조

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960000991U KR0136331Y1 (ko) 1996-01-24 1996-01-24 반도체 웨이퍼박스 포장구조

Publications (2)

Publication Number Publication Date
KR970050329U true KR970050329U (ko) 1997-08-12
KR0136331Y1 KR0136331Y1 (ko) 1999-03-20

Family

ID=19449675

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960000991U KR0136331Y1 (ko) 1996-01-24 1996-01-24 반도체 웨이퍼박스 포장구조

Country Status (1)

Country Link
KR (1) KR0136331Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015025410A1 (ja) * 2013-08-22 2015-02-26 ミライアル株式会社 基板収納容器

Also Published As

Publication number Publication date
KR0136331Y1 (ko) 1999-03-20

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