IT1139451B - Interferometro - Google Patents

Interferometro

Info

Publication number
IT1139451B
IT1139451B IT24043/81A IT2404381A IT1139451B IT 1139451 B IT1139451 B IT 1139451B IT 24043/81 A IT24043/81 A IT 24043/81A IT 2404381 A IT2404381 A IT 2404381A IT 1139451 B IT1139451 B IT 1139451B
Authority
IT
Italy
Prior art keywords
interferometer
detection system
grating
measuring
photodiodes
Prior art date
Application number
IT24043/81A
Other languages
English (en)
Other versions
IT8124043A0 (it
Inventor
Klaas Compaan
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of IT8124043A0 publication Critical patent/IT8124043A0/it
Application granted granted Critical
Publication of IT1139451B publication Critical patent/IT1139451B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P13/00—Indicating or recording presence, absence, or direction, of movement
    • G01P13/02—Indicating direction only, e.g. by weather vane
    • G01P13/04—Indicating positive or negative direction of a linear movement or clockwise or anti-clockwise direction of a rotational movement
    • G01P13/045—Indicating positive or negative direction of a linear movement or clockwise or anti-clockwise direction of a rotational movement with speed indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02063—Active error reduction, i.e. varying with time by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Optical Recording Or Reproduction (AREA)
  • Length Measuring Devices By Optical Means (AREA)
IT24043/81A 1980-09-22 1981-09-18 Interferometro IT1139451B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8005258A NL8005258A (nl) 1980-09-22 1980-09-22 Interferometer.

Publications (2)

Publication Number Publication Date
IT8124043A0 IT8124043A0 (it) 1981-09-18
IT1139451B true IT1139451B (it) 1986-09-24

Family

ID=19835908

Family Applications (1)

Application Number Title Priority Date Filing Date
IT24043/81A IT1139451B (it) 1980-09-22 1981-09-18 Interferometro

Country Status (9)

Country Link
JP (2) JPS5786007A (it)
AU (1) AU551571B2 (it)
CA (1) CA1163094A (it)
DE (1) DE3137211C2 (it)
FR (1) FR2490808B1 (it)
GB (1) GB2084315B (it)
IT (1) IT1139451B (it)
NL (1) NL8005258A (it)
SE (1) SE8105526L (it)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8201975A (nl) * 1982-05-13 1983-12-01 Philips Nv Laserinrichting en interferometer bevattende een dergelijke laserinrichting.
JPS59134005U (ja) * 1983-02-23 1984-09-07 横河電機株式会社 光学式機械量測定装置
JPS6070563A (ja) * 1983-09-27 1985-04-22 Toshiba Corp 高密度螺旋描画装置
GB8415670D0 (en) * 1984-06-20 1984-07-25 Penlon Ltd Gas analysis apparatus
JPS6173003A (ja) * 1984-09-18 1986-04-15 Yamazaki Mazak Corp レ−ザ測長器
GB2191855A (en) * 1986-05-07 1987-12-23 Univ London Method and apparatus for detecting reflection sites
FR2601128A1 (fr) * 1986-07-03 1988-01-08 Etu Rech Machine Outil Centre Rugosimetre a source laser pour l'analyse et le controle de qualite des surfaces mecaniques
DE3642055A1 (de) * 1986-12-09 1988-07-07 Wolfgang Dr Littmann Einrichtung zur direkten umwandlung von schall in digitale information - digitales mikrofon
JPS63151802A (ja) * 1986-12-17 1988-06-24 Rikagaku Kenkyusho 高精度偏光干渉計
DE3707331A1 (de) * 1987-03-07 1988-09-15 Zeiss Carl Fa Interferometer zur messung von optischen phasendifferenzen
CH676289A5 (it) * 1987-03-24 1990-12-28 Wild Leitz Ag
JPS63238504A (ja) * 1987-03-27 1988-10-04 Satoru Toyooka 変位測定用干渉計
JP2779497B2 (ja) * 1988-03-31 1998-07-23 株式会社東京精密 干渉計
DE4204857C2 (de) * 1991-02-18 1998-01-22 Asahi Optical Co Ltd Verfahren zur Untersuchung einer Oberflächenform mit einem Interferometer
GB9500110D0 (en) * 1995-01-05 1995-03-01 Renishaw Plc Laser interferometer
US5991249A (en) * 1997-07-29 1999-11-23 Hoetron, Inc. Optical track sensing device
US6723980B2 (en) 2001-07-16 2004-04-20 Wai-Hon Lee Position sensor with grating to detect moving object with periodic pattern
CN1322308C (zh) * 2005-04-21 2007-06-20 中国科学院上海光学精密机械研究所 微小转角干涉测量装置
JP5517665B2 (ja) 2010-02-17 2014-06-11 フタバ産業株式会社 排気装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3694088A (en) * 1971-01-25 1972-09-26 Bell Telephone Labor Inc Wavefront measurement
JPS4917264A (it) * 1972-06-03 1974-02-15
NL7403468A (nl) * 1974-03-15 1975-09-17 Philips Nv Inrichting voor het bepalen van de verplaat- sing van een onderdeel van een werktuig.
JPS6024401B2 (ja) * 1975-06-28 1985-06-12 キヤノン株式会社 被測定物の物理定数を測定する方法
DE2722887C2 (de) * 1977-05-20 1979-02-15 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V., 8000 Muenchen Vorrichtung zum Einmessen (Kalibrieren) von Laserinterferometern
US4157223A (en) * 1977-10-28 1979-06-05 The Perkin-Elmer Corporation Sliding reference interferometer
GB2008791B (en) * 1977-11-25 1982-04-28 Mckelvie J Method and apparatus for sensing inplane deformation of a surface
PL124778B1 (en) * 1978-11-03 1983-02-28 Inst Geodezji I Kartografii Apparatus for exact measurement of length and measuring system composed of such apparatuses
DD139760B1 (de) * 1978-11-27 1980-12-10 Werner Krieg Interferometrische einrichtung zum messen von abstaenden und abstandsaenderungen

Also Published As

Publication number Publication date
JPS63100626A (ja) 1988-05-02
CA1163094A (en) 1984-03-06
AU7546681A (en) 1982-04-01
JPS5786007A (en) 1982-05-28
NL8005258A (nl) 1982-04-16
AU551571B2 (en) 1986-05-08
DE3137211C2 (de) 1986-12-11
FR2490808A1 (fr) 1982-03-26
IT8124043A0 (it) 1981-09-18
SE8105526L (sv) 1982-03-23
DE3137211A1 (de) 1982-05-13
FR2490808B1 (fr) 1986-05-09
GB2084315B (en) 1984-10-24
GB2084315A (en) 1982-04-07

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