IT1058674B - Metodo di fabbricazione di un dispositivo semiconduttore - Google Patents

Metodo di fabbricazione di un dispositivo semiconduttore

Info

Publication number
IT1058674B
IT1058674B IT21490/76A IT2149076A IT1058674B IT 1058674 B IT1058674 B IT 1058674B IT 21490/76 A IT21490/76 A IT 21490/76A IT 2149076 A IT2149076 A IT 2149076A IT 1058674 B IT1058674 B IT 1058674B
Authority
IT
Italy
Prior art keywords
manufacture
semiconductive device
semiconductive
Prior art date
Application number
IT21490/76A
Other languages
English (en)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Application granted granted Critical
Publication of IT1058674B publication Critical patent/IT1058674B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
    • H01L21/2251—Diffusion into or out of group IV semiconductors
    • H01L21/2254—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/761—PN junctions
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/033—Diffusion of aluminum
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/914—Doping
    • Y10S438/92—Controlling diffusion profile by oxidation
IT21490/76A 1975-03-26 1976-03-23 Metodo di fabbricazione di un dispositivo semiconduttore IT1058674B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB12649/75A GB1536545A (en) 1975-03-26 1975-03-26 Semiconductor device manufacture

Publications (1)

Publication Number Publication Date
IT1058674B true IT1058674B (it) 1982-05-10

Family

ID=10008581

Family Applications (1)

Application Number Title Priority Date Filing Date
IT21490/76A IT1058674B (it) 1975-03-26 1976-03-23 Metodo di fabbricazione di un dispositivo semiconduttore

Country Status (12)

Country Link
US (1) US4040878A (it)
JP (1) JPS51120184A (it)
AU (1) AU497599B2 (it)
BE (1) BE839972A (it)
CA (1) CA1048161A (it)
CH (1) CH607327A5 (it)
DE (1) DE2611363C2 (it)
FR (1) FR2305852A1 (it)
GB (1) GB1536545A (it)
IT (1) IT1058674B (it)
NL (1) NL7602960A (it)
SE (1) SE404568B (it)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS522165A (en) * 1975-06-23 1977-01-08 Mitsubishi Electric Corp Method of thermally diffusing selectively aluminum of semiconductor su bstrate
US4063272A (en) * 1975-11-26 1977-12-13 General Electric Company Semiconductor device and method of manufacture thereof
US4099997A (en) * 1976-06-21 1978-07-11 Rca Corporation Method of fabricating a semiconductor device
JPS5816333B2 (ja) * 1976-12-10 1983-03-30 三菱電機株式会社 半導体装置およびその製造方法
JPS53118367A (en) * 1977-03-25 1978-10-16 Hitachi Ltd Manufacture of semiconductor
JPS5833693B2 (ja) * 1977-08-12 1983-07-21 株式会社日立製作所 半導体装置の製造方法
CH632356A5 (de) * 1977-12-15 1982-09-30 Bbc Brown Boveri & Cie Verfahren zur herstellung von metallmustern auf siliziumscheiben fuer die thermomigration.
JPS5494869A (en) * 1978-01-11 1979-07-26 Hitachi Ltd Production of semiconductor device
JPS553618A (en) * 1978-06-21 1980-01-11 Hitachi Ltd Manufacturing method for semiconductor device
JPS5536913A (en) * 1978-09-04 1980-03-14 Hitachi Ltd Semiconductor device
US4188245A (en) * 1978-09-18 1980-02-12 General Electric Company Selective open tube aluminum diffusion
US4199386A (en) * 1978-11-28 1980-04-22 Rca Corporation Method of diffusing aluminum into monocrystalline silicon
US4239560A (en) * 1979-05-21 1980-12-16 General Electric Company Open tube aluminum oxide disc diffusion
US4677456A (en) * 1979-05-25 1987-06-30 Raytheon Company Semiconductor structure and manufacturing method
JPS5824007B2 (ja) * 1979-07-16 1983-05-18 株式会社日立製作所 半導体装置の製造方法
JPS5824006B2 (ja) * 1980-01-30 1983-05-18 株式会社日立製作所 不純物拡散法
NL8006668A (nl) * 1980-12-09 1982-07-01 Philips Nv Werkwijze voor het vervaardigen van een halfgeleiderinrichting.
JPS58122724A (ja) * 1982-01-18 1983-07-21 Toshiba Corp 半導体素子の製造方法
JP2886183B2 (ja) * 1988-06-28 1999-04-26 三菱電機株式会社 フィールド分離絶縁膜の製造方法
US5036377A (en) * 1988-08-03 1991-07-30 Texas Instruments Incorporated Triac array
GB2237929A (en) * 1989-10-23 1991-05-15 Philips Electronic Associated A method of manufacturing a semiconductor device
US20040061170A1 (en) * 1995-07-31 2004-04-01 Ixys Corporation Reverse blocking IGBT
US5698454A (en) * 1995-07-31 1997-12-16 Ixys Corporation Method of making a reverse blocking IGBT
US6727527B1 (en) 1995-07-31 2004-04-27 Ixys Corporation Reverse blocking IGBT
EP0893821A1 (en) * 1997-07-21 1999-01-27 STMicroelectronics S.r.l. Process for the manufacturing of a DMOS-technology transistor providing for a single thermal process for the formation of source and body regions
GB9919764D0 (en) 1999-08-21 1999-10-27 Koninkl Philips Electronics Nv Thyristors and their manufacture
DE10159498A1 (de) * 2001-12-04 2003-06-12 Bosch Gmbh Robert Halbleiteranordnung mit einem pn-Übergang und Verfahren zur Herstellung einer Halbleiteranordnung
JP4222092B2 (ja) * 2003-05-07 2009-02-12 富士電機デバイステクノロジー株式会社 半導体ウェハ、半導体装置および半導体装置の製造方法
US7326596B2 (en) 2004-04-26 2008-02-05 Ixys Corporation High voltage power device with low diffusion pipe resistance
DE102006041424A1 (de) * 2006-09-04 2008-03-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur simultanen Dotierung und Oxidation von Halbleitersubstraten und dessen Verwendung
US9590033B1 (en) 2015-11-20 2017-03-07 Ixys Corporation Trench separation diffusion for high voltage device
US9704832B1 (en) 2016-02-29 2017-07-11 Ixys Corporation Die stack assembly using an edge separation structure for connectivity through a die of the stack

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1414898A1 (de) * 1960-11-09 1969-01-09 Lucas Industries Ltd Verfahren zur Herstellung von Halbleitern
GB1031451A (en) * 1961-08-03 1966-06-02 Lucas Industries Ltd Controlled rectifiers
US3574009A (en) * 1968-03-06 1971-04-06 Unitrode Corp Controlled doping of semiconductors
US3628106A (en) * 1969-05-05 1971-12-14 Gen Electric Passivated semiconductor device with protective peripheral junction portion
US3628107A (en) * 1969-05-05 1971-12-14 Gen Electric Passivated semiconductor device with peripheral protective junction
US3664894A (en) * 1970-02-24 1972-05-23 Rca Corp Method of manufacturing semiconductor devices having high planar junction breakdown voltage
US3979230A (en) * 1973-10-30 1976-09-07 General Electric Company Method of making isolation grids in bodies of semiconductor material
US3904442A (en) * 1973-10-30 1975-09-09 Gen Electric Method of making isolation grids in bodies of semiconductor material
US3933541A (en) * 1974-01-22 1976-01-20 Mitsubishi Denki Kabushiki Kaisha Process of producing semiconductor planar device
US3914138A (en) * 1974-08-16 1975-10-21 Westinghouse Electric Corp Method of making semiconductor devices by single step diffusion
DE2506436C3 (de) * 1975-02-15 1980-05-14 Deutsche Itt Industries Gmbh, 7800 Freiburg Diffusionsverfahren zum Herstellen aluminiumdotierter Isolationszonen für Halbleiterbauelemente

Also Published As

Publication number Publication date
GB1536545A (en) 1978-12-20
US4040878A (en) 1977-08-09
FR2305852B1 (it) 1982-10-01
FR2305852A1 (fr) 1976-10-22
JPS51120184A (en) 1976-10-21
SE404568B (sv) 1978-10-09
BE839972A (fr) 1976-09-24
AU1228276A (en) 1977-09-29
JPS54371B2 (it) 1979-01-10
AU497599B2 (en) 1978-12-21
CA1048161A (en) 1979-02-06
DE2611363C2 (de) 1983-03-31
SE7603557L (sv) 1976-09-27
CH607327A5 (it) 1978-12-15
DE2611363A1 (de) 1976-10-07
NL7602960A (nl) 1976-09-28

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19940331