IL227145A - An element that produces an upward flow of air and a non-contact transfer device that uses such an element - Google Patents

An element that produces an upward flow of air and a non-contact transfer device that uses such an element

Info

Publication number
IL227145A
IL227145A IL227145A IL22714513A IL227145A IL 227145 A IL227145 A IL 227145A IL 227145 A IL227145 A IL 227145A IL 22714513 A IL22714513 A IL 22714513A IL 227145 A IL227145 A IL 227145A
Authority
IL
Israel
Prior art keywords
upward flow
flow forming
accommodating hole
face
forming element
Prior art date
Application number
IL227145A
Other languages
English (en)
Hebrew (he)
Original Assignee
Oiles Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oiles Industry Co Ltd filed Critical Oiles Industry Co Ltd
Publication of IL227145A publication Critical patent/IL227145A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Fluid Mechanics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Chain Conveyers (AREA)
IL227145A 2010-12-24 2013-06-23 An element that produces an upward flow of air and a non-contact transfer device that uses such an element IL227145A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010286959 2010-12-24
PCT/JP2011/071590 WO2012086279A1 (ja) 2010-12-24 2011-09-22 上昇流形成体及びこの上昇流形成体を用いた非接触搬送装置

Publications (1)

Publication Number Publication Date
IL227145A true IL227145A (en) 2016-05-31

Family

ID=46313563

Family Applications (1)

Application Number Title Priority Date Filing Date
IL227145A IL227145A (en) 2010-12-24 2013-06-23 An element that produces an upward flow of air and a non-contact transfer device that uses such an element

Country Status (7)

Country Link
JP (1) JP5913131B2 (zh)
KR (1) KR20140004113A (zh)
CN (1) CN103261063B (zh)
HK (1) HK1184126A1 (zh)
IL (1) IL227145A (zh)
TW (1) TWI519461B (zh)
WO (1) WO2012086279A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103303537B (zh) * 2013-07-02 2015-07-08 淄博瑞邦自动化设备有限公司 手套整形入盒机构
DE102022102162A1 (de) * 2022-01-31 2023-08-03 Eitzenberger Luftlagertechnik Gmbh Floating Unit

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4310540B2 (ja) * 2003-12-17 2009-08-12 Ｓｍｃ株式会社 合成樹脂製多孔流路板及びその製造方法
JP2006347719A (ja) * 2005-06-17 2006-12-28 Shinko Electric Co Ltd 気体浮上ユニット及び気体浮上搬送装置
JP4553376B2 (ja) * 2005-07-19 2010-09-29 東京エレクトロン株式会社 浮上式基板搬送処理装置及び浮上式基板搬送処理方法
JP2007176638A (ja) * 2005-12-27 2007-07-12 Harmotec Corp 非接触搬送装置
PL213652B1 (pl) * 2006-08-13 2013-04-30 Karazniewicz Krzysztof Inzektorowe urzadzenie zraszajace oraz gniazdo inzektorowego urzadzenia zraszajacego
JP5237357B2 (ja) * 2008-03-24 2013-07-17 オイレス工業株式会社 非接触搬送装置
JP2010254463A (ja) * 2009-04-28 2010-11-11 Nitta Moore Co 非接触ワーク支持装置

Also Published As

Publication number Publication date
TWI519461B (zh) 2016-02-01
JPWO2012086279A1 (ja) 2014-05-22
CN103261063A (zh) 2013-08-21
KR20140004113A (ko) 2014-01-10
WO2012086279A1 (ja) 2012-06-28
CN103261063B (zh) 2015-05-27
JP5913131B2 (ja) 2016-04-27
TW201242879A (en) 2012-11-01
HK1184126A1 (zh) 2014-01-17

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Legal Events

Date Code Title Description
FF Patent granted
KB Patent renewed
KB Patent renewed