IL227145A - An element that produces an upward flow of air and a non-contact transfer device that uses such an element - Google Patents
An element that produces an upward flow of air and a non-contact transfer device that uses such an elementInfo
- Publication number
- IL227145A IL227145A IL227145A IL22714513A IL227145A IL 227145 A IL227145 A IL 227145A IL 227145 A IL227145 A IL 227145A IL 22714513 A IL22714513 A IL 22714513A IL 227145 A IL227145 A IL 227145A
- Authority
- IL
- Israel
- Prior art keywords
- upward flow
- flow forming
- accommodating hole
- face
- forming element
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Fluid Mechanics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
- Chain Conveyers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010286959 | 2010-12-24 | ||
PCT/JP2011/071590 WO2012086279A1 (ja) | 2010-12-24 | 2011-09-22 | 上昇流形成体及びこの上昇流形成体を用いた非接触搬送装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
IL227145A true IL227145A (en) | 2016-05-31 |
Family
ID=46313563
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL227145A IL227145A (en) | 2010-12-24 | 2013-06-23 | An element that produces an upward flow of air and a non-contact transfer device that uses such an element |
Country Status (7)
Country | Link |
---|---|
JP (1) | JP5913131B2 (zh) |
KR (1) | KR20140004113A (zh) |
CN (1) | CN103261063B (zh) |
HK (1) | HK1184126A1 (zh) |
IL (1) | IL227145A (zh) |
TW (1) | TWI519461B (zh) |
WO (1) | WO2012086279A1 (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103303537B (zh) * | 2013-07-02 | 2015-07-08 | 淄博瑞邦自动化设备有限公司 | 手套整形入盒机构 |
DE102022102162A1 (de) * | 2022-01-31 | 2023-08-03 | Eitzenberger Luftlagertechnik Gmbh | Floating Unit |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4310540B2 (ja) * | 2003-12-17 | 2009-08-12 | Smc株式会社 | 合成樹脂製多孔流路板及びその製造方法 |
JP2006347719A (ja) * | 2005-06-17 | 2006-12-28 | Shinko Electric Co Ltd | 気体浮上ユニット及び気体浮上搬送装置 |
JP4553376B2 (ja) * | 2005-07-19 | 2010-09-29 | 東京エレクトロン株式会社 | 浮上式基板搬送処理装置及び浮上式基板搬送処理方法 |
JP2007176638A (ja) * | 2005-12-27 | 2007-07-12 | Harmotec Corp | 非接触搬送装置 |
PL213652B1 (pl) * | 2006-08-13 | 2013-04-30 | Karazniewicz Krzysztof | Inzektorowe urzadzenie zraszajace oraz gniazdo inzektorowego urzadzenia zraszajacego |
JP5237357B2 (ja) * | 2008-03-24 | 2013-07-17 | オイレス工業株式会社 | 非接触搬送装置 |
JP2010254463A (ja) * | 2009-04-28 | 2010-11-11 | Nitta Moore Co | 非接触ワーク支持装置 |
-
2011
- 2011-09-22 CN CN201180061003.0A patent/CN103261063B/zh not_active Expired - Fee Related
- 2011-09-22 JP JP2012549667A patent/JP5913131B2/ja active Active
- 2011-09-22 WO PCT/JP2011/071590 patent/WO2012086279A1/ja active Application Filing
- 2011-09-22 KR KR1020137016902A patent/KR20140004113A/ko active IP Right Grant
- 2011-10-21 TW TW100138325A patent/TWI519461B/zh not_active IP Right Cessation
-
2013
- 2013-06-23 IL IL227145A patent/IL227145A/en active IP Right Grant
- 2013-10-15 HK HK13111576.4A patent/HK1184126A1/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI519461B (zh) | 2016-02-01 |
JPWO2012086279A1 (ja) | 2014-05-22 |
CN103261063A (zh) | 2013-08-21 |
KR20140004113A (ko) | 2014-01-10 |
WO2012086279A1 (ja) | 2012-06-28 |
CN103261063B (zh) | 2015-05-27 |
JP5913131B2 (ja) | 2016-04-27 |
TW201242879A (en) | 2012-11-01 |
HK1184126A1 (zh) | 2014-01-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FF | Patent granted | ||
KB | Patent renewed | ||
KB | Patent renewed |