HUE028739T2 - Tartály folyamatok végrehajtásához - Google Patents
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- HUE028739T2 HUE028739T2 HUE11718985A HUE11718985A HUE028739T2 HU E028739 T2 HUE028739 T2 HU E028739T2 HU E11718985 A HUE11718985 A HU E11718985A HU E11718985 A HUE11718985 A HU E11718985A HU E028739 T2 HUE028739 T2 HU E028739T2
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
- B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/102—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/04—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by a combination of operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D1/00—Containers having bodies formed in one piece, e.g. by casting metallic material, by moulding plastics, by blowing vitreous material, by throwing ceramic material, by moulding pulped fibrous material, by deep-drawing operations performed on sheet material
- B65D1/12—Cans, casks, barrels, or drums
- B65D1/20—Cans, casks, barrels, or drums characterised by location or arrangement of filling or discharge apertures
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- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning In General (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
Claims (5)
1. Folyamaftsrtály folyamatok végrebapsábez fiszihbmOveiet §2:árlöműysig|: so^iä művelet, zéîégfeiordé művelet fsfeégy íéfogieválésziö mövéist vágmliapsáboz: egy munkadarabon (196):, a foíyamaitsriáiy flÖO) belső terében (11:2:), amely meêmm a belső foíotfl 12):Mámío faíazatot (13% abat a folyamaitarfály (10¾ legalább egy &#^»át»S2ét«§l fiit. 1:2#} tartalmaz, amelynek segisegével egy közeg a ^amattariily (18%folazatán (124) keres#! á#®fotö> ahol a kőzeg-átvezatések (119.128>iegaibb egyikén aim! a fblyamaiísfiéiy (100) tapy éísőrészi (fOg),. és egy a Miiy alsorészrs (182) levebeig módón Äojyezslt foiáiy felsöfeszt(104) foglal magába, és ahol e legalább egy közeg-átvezetés: (118,128) a isríáiy tórész (i 02) felazalán (124) kemsztúi kinyúlik, azzal ieifemezve, begy a folyamsífertálynak (100) a tartály felsőrész (194) felső peremén (289) ás a foiyamattariály ( 100) egy felső öidaián elrendezett nép tezMfePZzávezelö nyílása (114) van, amélyén ksreszfok a iblyamaiiaftálynak (töö) a tartály alsórész (1:92) és :á tartály felsőrész :(1:S4) által kôrfüzèrt belső fers a foiyapaftartály (100) külső tare (116) felöl átjárható, és amelyen keresztül1 egy kezei befendezisgrf (182) elhelyezett munkadarab :(188) egy kezelófeiyagfatboa a feiyamaflartâly (100) belső terébe (112) bevihető, #zárt kezelés étán: a folpmahsi&ybéí (196) kivehető.
2. Az1, igénypont sz&nnlfolysmaítariáfy, azzal jellemezve, hogy s közeg-átvezetések (111, 128) legalább egyike hoiléfmifítes adapts!# (126. 132,134) mndsikazikegy folyemafefom adaptáláséboz.
3. Az 1. vagy 2. igénypontok egyik® szerinti folyamattartály. azzal jellemezve,, hogy a fclyamsltartaiy (1) legalább kél Közeg' étvezetést (128) foglat magéba, amelyek egymással azonos adaptereket (132., 134) tartalmaznak.
4 Az 1.-3. Iganyponlös egyike szerinti (100) kettő, vagy több közeg- átvezetést (118,128) foglal magába.
5, A 4. igÉsyponl .szerinti MyamÉiáftály, azzal jellemezve. hogy :toplábö:kéí közog-átvezeis (128), a Iblysmaiíartáiy (100) vertikális küzéptsngeiyérs vonateiafosf, lényegében konstans szogfeyoiságbáh vér) elrendezve, δ Az 1.4, igénypontok agyike szerinti feiyamsitoffeiy, azzal jellemezve, hogy a közeg-étvezetések (1:18) egyike a folyamaíiartály (100) belső terének (112) legmélyebb helyzoteboo a folyamattartály (109) belső terébe {112) éenyúíiK. 71 Az: 1.4: jgénypontsk egyike szsrlhti folyamáhartály; -mM jellemezve, hogy a tartály felsőrész (104) egy boitfer pentes forhltő elrendezésen keres#! össze van kötve á feiyapagmtiy (100) tartály ásórészévei (102), :3- Az tó ígénypnfok agyié szerinti fsfpeíaftediy, azzal jaitesem hogy a fotvamáÉPáiy (190) falazata (124), legei® annak belső oldalán, legalább sz^aszonksntfeiieti éfdssségpiræhdéiezik, amf kisebb, mint körűibe!! 0,8,gp
0. Az 1.-8 ígénypodíok egyike szerinti foíyamatiarláiy. azzal jellemezve, begy a közeg-átvezefesek (128) legelőbb egyike a közeg-átvezetés (128) adpfeiié (!34)4#éíyezeít zárOfebéfe! (324) lezárható. i, μ m ^ rnmm, ma m m is$gfe.8$ aiealyen teâàüi s fötyasléktartály (10a) egy köisctsmaszon (TS4) arltsb'ss^batb, it % t-& mmm mm mm mmmm* **rfI***»* ho#» M** es$®* felyaoraîfartâly {100} belső terén :(112) ¾¾¾ eirer^etî adaptert (132; dilatez a betegedé oiem (182) adaptálásához a közeg-áteetésrgíftgg). it μ 1:-11. igénypóntok egyike szedni folyama«pot (1¾ és M $m két foÍys«sméböl<m kombiném amelyek yáitakozme ft&anrittlifr P® ugyanazon fi % 1M adepfaiikafék. 13. legaibb kék óz 1:-11. Igénypernek agyié sMßti folpinsisismM!, és tísptéte típus legalább két (Syáffiotatoíhéfeö! $lé kombináció, amely váltakozva adaptálásié égy éiso: (brysmatiédéty (100) agyi kozog-átveze récére rí r8. :2δ·. vagy %y n;ásoÍk1öipmatiartály (103) egyik kezag-álv«zétésére 14. A 12. vagy 13 igénypontok egyiké szarini kéo&inasli azzai jefeí^m 'Nögg *leÄifiiei továbbá palást) egy kez^o berendezést ( 132) tartalmaz,· egy tóWI aikatrészoek ftS6) a fotyamááárfépí (100) legalább sgyMoek betss Ä fi if történő beviisléhez 15. Á11-14. Igénypontok egyike szerintikomfelnáciá, apaijellemezve, hogy s éombmáviótoiy^áseteniérn ßszttto ffőaséié egységet. Injekciós sizmasb egységéi Líltrséartgos Ssztiióégységék n^iptW sogátraoite egységet: kefes sor ráfién-tó egységet, ISyé szárítóegységei gő^tts^títé egységet, tepM egységéi ssosttöststö egységet, #apszfelvevoí: alkatrész moégstéegységef, és/vagy tolyadék^gopy képző egységet íartaímaé
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102010028883A DE102010028883A1 (de) | 2010-05-11 | 2010-05-11 | Prozessbehälter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| HUE028739T2 true HUE028739T2 (hu) | 2017-01-30 |
Family
ID=44202072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| HUE11718985A HUE028739T2 (hu) | 2010-05-11 | 2011-05-05 | Tartály folyamatok végrehajtásához |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9691639B2 (hu) |
| EP (1) | EP2569100B1 (hu) |
| CN (1) | CN102892522B (hu) |
| DE (1) | DE102010028883A1 (hu) |
| HU (1) | HUE028739T2 (hu) |
| WO (1) | WO2011141351A1 (hu) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2935545A1 (en) * | 2013-12-30 | 2015-07-09 | New York Stem Cell Foundation, Inc. | Tissue grafts and methods of making and using the same |
| US10688536B2 (en) | 2014-02-24 | 2020-06-23 | The Boeing Company | System and method for surface cleaning |
| AT516269B1 (de) * | 2014-11-13 | 2016-04-15 | Ka Group Man Gmbh | Einrichtung zur reinigung von werkstücken |
| WO2018111548A1 (en) * | 2016-12-14 | 2018-06-21 | Carbon, Inc. | Methods and apparatus for washing objects produced by stereolithography |
| DE102018118067A1 (de) * | 2018-07-26 | 2020-01-30 | Ecoclean Gmbh | Reinigungsvorrichtung |
| CN109092771B (zh) * | 2018-09-06 | 2023-04-21 | 中食净化科技（北京）股份有限公司 | 一种带有自清洁功能的净化机及其使用方法 |
| DE102018126437B4 (de) * | 2018-10-24 | 2024-04-11 | Optik-Elektro Huber GmbH | Reinigungsstation; Anlage zur Herstellung eines Bauteils; Verfahren zum Reinigen eines Bauteils; Verfahren zur Herstellung eines Bauteils |
| JP7381370B2 (ja) * | 2020-03-05 | 2023-11-15 | キオクシア株式会社 | 半導体製造装置および半導体装置の製造方法 |
| CN113751409A (zh) * | 2020-07-27 | 2021-12-07 | 英迪那米(徐州)半导体科技有限公司 | 一种清洗半导体零部件的装置及方法 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US424102A (en) * | 1890-03-25 | William t | ||
| US1970783A (en) * | 1931-02-02 | 1934-08-21 | Guy O Marchant | Fluid and liquid separation |
| US2841136A (en) * | 1954-12-13 | 1958-07-01 | Metalwash Machinery Co | Liquid heating device |
| DE2049599A1 (de) * | 1970-10-09 | 1972-04-13 | Schulz J | Metallreinigungsmaschine für industrielle Zwecke |
| US3784455A (en) * | 1971-12-28 | 1974-01-08 | Western Electric Co | Methods of electrolytic regenerative etching and metal recovery |
| US4027686A (en) * | 1973-01-02 | 1977-06-07 | Texas Instruments Incorporated | Method and apparatus for cleaning the surface of a semiconductor slice with a liquid spray of de-ionized water |
| US4197139A (en) * | 1978-08-23 | 1980-04-08 | Hjersted Norman B | Process for the reclamation of acid from spent pickle liquor |
| FR2506627B1 (fr) * | 1981-05-26 | 1986-09-19 | Bertin & Cie | Separateur compact gaz-liquide |
| DE3604694A1 (de) | 1986-02-14 | 1987-08-20 | Bayer Ag | Salbenkessel zur herstellung pharmazeutischer oder kosmetischer suspensionen |
| US4785836A (en) * | 1987-07-17 | 1988-11-22 | Soichiro Yamamoto | Spray washer |
| JP2733771B2 (ja) * | 1988-07-29 | 1998-03-30 | 日本テキサス・インスツルメンツ株式会社 | 液体による処理装置 |
| DE9115546U1 (hu) * | 1991-12-14 | 1992-02-27 | Guggenberger, Johannes, 7959 Wain, De | |
| DE4220827A1 (de) | 1992-06-25 | 1994-01-13 | Pokorny Gmbh | Anlage zur Behandlung von Objekten unter Reinluftraum-Bedingungen |
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| DE102008049378B4 (de) * | 2008-09-27 | 2021-09-09 | Werner Meissner | Reinigungsanlage mit einer Einrichtung zum Reinigen von Hohlkörpern |
| KR101421752B1 (ko) * | 2008-10-21 | 2014-07-22 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치 및 기판 처리 방법 |
-
2010
- 2010-05-11 DE DE102010028883A patent/DE102010028883A1/de not_active Withdrawn
-
2011
- 2011-05-05 EP EP11718985.2A patent/EP2569100B1/de not_active Not-in-force
- 2011-05-05 HU HUE11718985A patent/HUE028739T2/hu unknown
- 2011-05-05 CN CN201180023591.9A patent/CN102892522B/zh not_active Expired - Fee Related
- 2011-05-05 WO PCT/EP2011/057226 patent/WO2011141351A1/de active Application Filing
-
2012
- 2012-10-11 US US13/649,845 patent/US9691639B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US9691639B2 (en) | 2017-06-27 |
| EP2569100B1 (de) | 2016-01-20 |
| DE102010028883A1 (de) | 2011-11-17 |
| CN102892522A (zh) | 2013-01-23 |
| EP2569100A1 (de) | 2013-03-20 |
| US20130034411A1 (en) | 2013-02-07 |
| CN102892522B (zh) | 2015-10-14 |
| WO2011141351A1 (de) | 2011-11-17 |
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