HK1205085A1 - 上浮用空氣板 - Google Patents
上浮用空氣板Info
- Publication number
- HK1205085A1 HK1205085A1 HK15105443.5A HK15105443A HK1205085A1 HK 1205085 A1 HK1205085 A1 HK 1205085A1 HK 15105443 A HK15105443 A HK 15105443A HK 1205085 A1 HK1205085 A1 HK 1205085A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- air plate
- levitation air
- levitation
- plate
- air
- Prior art date
Links
- 238000005339 levitation Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012084409 | 2012-04-03 | ||
JP2013055853A JP5998086B2 (ja) | 2012-04-03 | 2013-03-19 | 浮上用エアプレート |
PCT/JP2013/057967 WO2013150894A1 (ja) | 2012-04-03 | 2013-03-21 | 浮上用エアプレート |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1205085A1 true HK1205085A1 (zh) | 2015-12-11 |
Family
ID=49300387
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK15105443.5A HK1205085A1 (zh) | 2012-04-03 | 2015-06-08 | 上浮用空氣板 |
Country Status (7)
Country | Link |
---|---|
US (2) | US9422120B2 (zh) |
JP (1) | JP5998086B2 (zh) |
KR (1) | KR20150000482A (zh) |
CN (1) | CN104203780B (zh) |
HK (1) | HK1205085A1 (zh) |
TW (1) | TWI565643B (zh) |
WO (1) | WO2013150894A1 (zh) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6287089B2 (ja) * | 2013-11-13 | 2018-03-07 | 村田機械株式会社 | 基板浮上装置、基板移載装置、および基板搬送装置 |
TWI582896B (zh) * | 2015-08-18 | 2017-05-11 | 由田新技股份有限公司 | 氣浮載台 |
US10807811B2 (en) * | 2016-03-07 | 2020-10-20 | Purple Innovation, Llc | Mattress toppers, air tables for making mattress toppers, and related methods |
TWI577626B (zh) * | 2016-06-04 | 2017-04-11 | 由田新技股份有限公司 | 氣浮載台 |
CN109311606B (zh) | 2016-06-21 | 2021-03-26 | 科福罗有限公司 | 非接触支撑平台和用于生产其流体垫层的工作台 |
JP6910518B2 (ja) * | 2016-08-29 | 2021-07-28 | 株式会社日本製鋼所 | レーザ照射装置 |
JP7002824B2 (ja) * | 2016-09-13 | 2022-01-20 | コーニング インコーポレイテッド | ガラス基板を加工する装置および方法 |
US9889995B1 (en) | 2017-03-15 | 2018-02-13 | Core Flow Ltd. | Noncontact support platform with blockage detection |
JP7106627B2 (ja) * | 2017-07-11 | 2022-07-26 | コーニング インコーポレイテッド | ガラスを処理する装置及び方法 |
US10513011B2 (en) * | 2017-11-08 | 2019-12-24 | Core Flow Ltd. | Layered noncontact support platform |
JP7161185B2 (ja) * | 2018-10-23 | 2022-10-26 | 株式会社平安コーポレーション | 木材加工機の吸着テーブル |
US10745215B2 (en) * | 2018-12-27 | 2020-08-18 | Core Flow Ltd. | Port arrangement for noncontact support platform |
CN110124908B (zh) * | 2019-06-21 | 2021-09-07 | 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) | 晶片真空吸附装置 |
CN110980280A (zh) * | 2019-11-28 | 2020-04-10 | 东莞理工学院 | 一种非接触多点式气浮抓取装置 |
JP7437186B2 (ja) * | 2020-02-26 | 2024-02-22 | Jswアクティナシステム株式会社 | 浮上搬送装置、及びレーザ処理装置 |
JP7437187B2 (ja) * | 2020-02-26 | 2024-02-22 | Jswアクティナシステム株式会社 | 浮上搬送装置、及びレーザ処理装置 |
KR102396254B1 (ko) * | 2021-11-17 | 2022-05-09 | 황희진 | 디스플레이 패널 부상 스테이지 |
KR102396243B1 (ko) * | 2021-11-17 | 2022-05-09 | 황희진 | 세척수단을 갖는 디스플레이 패널 부상 스테이지 및 이의 세척방법 |
CN114229471A (zh) * | 2021-12-22 | 2022-03-25 | 中导光电设备股份有限公司 | 一种基于伯努利原理的气浮平台装置和气浮方法 |
KR102451485B1 (ko) * | 2022-03-10 | 2022-10-06 | 황희진 | 흡기라인에 이물질 수용공간을 갖는 디스플레이 패널 부상 스테이지장치 |
KR102451501B1 (ko) * | 2022-03-10 | 2022-10-06 | 황희진 | 진공 동기라인을 갖는 디스플레이 패널 부상 스테이지장치 |
KR102451491B1 (ko) * | 2022-03-10 | 2022-10-06 | 황희진 | 이물질 수용공간을 갖는 디스플레이 패널 부상 스테이지장치 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4299518A (en) * | 1980-03-03 | 1981-11-10 | Texas Instruments Incorporated | Manufacturing work station |
US5611648A (en) * | 1996-01-26 | 1997-03-18 | Simplimatic Engineering Company | Air conveying support structure for conveying articles along an air conveyor |
US7269475B1 (en) * | 1998-03-02 | 2007-09-11 | Xerox Corporation | Distributed control system with global contraints for controlling object motion with smart matter |
JP2001199528A (ja) * | 2000-01-14 | 2001-07-24 | Matsushita Electric Ind Co Ltd | 気体浮揚手段を有するリフター、熱処理装置および熱処理方法 |
JP4766824B2 (ja) | 2000-12-05 | 2011-09-07 | 日本空圧システム株式会社 | 保持具 |
TWI222423B (en) * | 2001-12-27 | 2004-10-21 | Orbotech Ltd | System and methods for conveying and transporting levitated articles |
KR100956348B1 (ko) * | 2003-09-05 | 2010-05-06 | 삼성전자주식회사 | 인라인 반송 시스템 |
US6969224B2 (en) * | 2003-12-01 | 2005-11-29 | Smc Kabushiki Kaisha | Workpiece levitating device |
JP4310540B2 (ja) * | 2003-12-17 | 2009-08-12 | Smc株式会社 | 合成樹脂製多孔流路板及びその製造方法 |
JP4767251B2 (ja) * | 2004-04-14 | 2011-09-07 | コアフロー サイエンティフィック ソリューションズ リミテッド | 光学検査装置を平坦な対象物の接面に対して焦点合わせする方法 |
JP2006156692A (ja) * | 2004-11-29 | 2006-06-15 | Smc Corp | 非接触搬送装置 |
JP4413789B2 (ja) * | 2005-01-24 | 2010-02-10 | 東京エレクトロン株式会社 | ステージ装置および塗布処理装置 |
JP4554397B2 (ja) * | 2005-02-23 | 2010-09-29 | 東京エレクトロン株式会社 | ステージ装置および塗布処理装置 |
CN101133488A (zh) * | 2005-03-03 | 2008-02-27 | 住友重机械工业株式会社 | 搬运物浮起组件、搬运物浮起装置及载物台装置 |
KR101234475B1 (ko) * | 2005-06-20 | 2013-02-18 | 엘지디스플레이 주식회사 | 비접촉 반송 장치에서의 지지플랫폼 |
JP4570545B2 (ja) * | 2005-09-22 | 2010-10-27 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
JP2007324442A (ja) * | 2006-06-02 | 2007-12-13 | Smc Corp | 非接触搬送装置 |
US7722256B2 (en) * | 2006-11-17 | 2010-05-25 | Corning Incorporated | Flat surface air bearing assembly |
KR20100130991A (ko) * | 2008-03-11 | 2010-12-14 | 코아 플로우 리미티드 | 편평한 물체를 국부적으로 제어하여 지지하기 위한 방법 및 시스템 |
JP5012651B2 (ja) * | 2008-05-14 | 2012-08-29 | 東京エレクトロン株式会社 | 塗布装置、塗布方法、塗布、現像装置及び記憶媒体 |
JP5465595B2 (ja) * | 2010-05-10 | 2014-04-09 | オイレス工業株式会社 | 非接触搬送装置 |
US20130130510A1 (en) * | 2010-05-18 | 2013-05-23 | Edward Bok | Semiconductor Substrate Transfer/Processing-tunnel -arrangement, with Successive Semiconductor Substrate - Sections |
JP5822437B2 (ja) * | 2010-06-16 | 2015-11-24 | 日本空圧システム株式会社 | 保持具 |
JP5819859B2 (ja) * | 2011-01-14 | 2015-11-24 | オイレス工業株式会社 | 非接触搬送装置 |
CN108974943B (zh) * | 2013-02-26 | 2021-06-29 | 株式会社Ihi | 搬运装置 |
-
2013
- 2013-03-19 JP JP2013055853A patent/JP5998086B2/ja active Active
- 2013-03-21 KR KR1020147028474A patent/KR20150000482A/ko not_active Application Discontinuation
- 2013-03-21 WO PCT/JP2013/057967 patent/WO2013150894A1/ja active Application Filing
- 2013-03-21 US US14/389,963 patent/US9422120B2/en not_active Expired - Fee Related
- 2013-03-21 CN CN201380017508.6A patent/CN104203780B/zh not_active Expired - Fee Related
- 2013-03-29 TW TW102111551A patent/TWI565643B/zh not_active IP Right Cessation
-
2015
- 2015-06-08 HK HK15105443.5A patent/HK1205085A1/zh unknown
-
2016
- 2016-07-14 US US15/210,642 patent/US9550633B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
WO2013150894A1 (ja) | 2013-10-10 |
US20160318719A1 (en) | 2016-11-03 |
CN104203780A (zh) | 2014-12-10 |
JP5998086B2 (ja) | 2016-09-28 |
TW201410572A (zh) | 2014-03-16 |
JP2013232631A (ja) | 2013-11-14 |
KR20150000482A (ko) | 2015-01-02 |
US9422120B2 (en) | 2016-08-23 |
US20150336751A1 (en) | 2015-11-26 |
TWI565643B (zh) | 2017-01-11 |
US9550633B2 (en) | 2017-01-24 |
CN104203780B (zh) | 2016-01-13 |
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