HK1202093A1 - Method and apparatus for non-ablative, photoacoustic compression machining in transparent materials using filamentation by burst ultrafast laser pulses - Google Patents
Method and apparatus for non-ablative, photoacoustic compression machining in transparent materials using filamentation by burst ultrafast laser pulsesInfo
- Publication number
- HK1202093A1 HK1202093A1 HK15102224.7A HK15102224A HK1202093A1 HK 1202093 A1 HK1202093 A1 HK 1202093A1 HK 15102224 A HK15102224 A HK 15102224A HK 1202093 A1 HK1202093 A1 HK 1202093A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- filamentation
- ablative
- laser pulses
- transparent materials
- ultrafast laser
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
- B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/18—Working by laser beam, e.g. welding, cutting or boring using absorbing layers on the workpiece, e.g. for marking or protecting purposes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
- B23K26/356—Working by laser beam, e.g. welding, cutting or boring for surface treatment by shock processing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/958,346 US9102011B2 (en) | 2013-08-02 | 2013-08-02 | Method and apparatus for non-ablative, photoacoustic compression machining in transparent materials using filamentation by burst ultrafast laser pulses |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1202093A1 true HK1202093A1 (en) | 2015-09-18 |
Family
ID=51260696
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK15102224.7A HK1202093A1 (en) | 2013-08-02 | 2015-03-05 | Method and apparatus for non-ablative, photoacoustic compression machining in transparent materials using filamentation by burst ultrafast laser pulses |
Country Status (10)
Country | Link |
---|---|
US (2) | US9102011B2 (fr) |
EP (2) | EP3292941B1 (fr) |
JP (3) | JP6239461B2 (fr) |
KR (3) | KR101766803B1 (fr) |
CN (2) | CN108453371B (fr) |
HK (1) | HK1202093A1 (fr) |
MY (1) | MY168398A (fr) |
PL (1) | PL2837462T3 (fr) |
SG (1) | SG10201404456WA (fr) |
TW (2) | TWI584906B (fr) |
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- 2014-07-31 EP EP17184442.6A patent/EP3292941B1/fr active Active
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- 2014-08-01 KR KR1020140099202A patent/KR101766803B1/ko active IP Right Grant
- 2014-08-04 CN CN201810208805.3A patent/CN108453371B/zh active Active
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- 2014-10-22 US US14/520,824 patent/US10376986B2/en active Active
-
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Also Published As
Publication number | Publication date |
---|---|
US9102011B2 (en) | 2015-08-11 |
EP2837462A2 (fr) | 2015-02-18 |
US10376986B2 (en) | 2019-08-13 |
TW201519984A (zh) | 2015-06-01 |
EP3292941A1 (fr) | 2018-03-14 |
US20150034612A1 (en) | 2015-02-05 |
CN108453371A (zh) | 2018-08-28 |
US20150044416A1 (en) | 2015-02-12 |
TWI584906B (zh) | 2017-06-01 |
KR20180116202A (ko) | 2018-10-24 |
JP2018187683A (ja) | 2018-11-29 |
KR102042767B1 (ko) | 2019-11-08 |
PL2837462T3 (pl) | 2019-02-28 |
JP2015030039A (ja) | 2015-02-16 |
EP2837462A3 (fr) | 2015-04-15 |
TW201729935A (zh) | 2017-09-01 |
JP6381753B2 (ja) | 2018-08-29 |
KR20150016168A (ko) | 2015-02-11 |
CN104339083B (zh) | 2018-04-13 |
CN104339083A (zh) | 2015-02-11 |
MY168398A (en) | 2018-10-31 |
CN108453371B (zh) | 2021-03-23 |
EP2837462B1 (fr) | 2018-03-14 |
JP2018008314A (ja) | 2018-01-18 |
KR20170080563A (ko) | 2017-07-10 |
TWI674164B (zh) | 2019-10-11 |
EP3292941B1 (fr) | 2020-10-21 |
SG10201404456WA (en) | 2015-03-30 |
JP6239461B2 (ja) | 2017-11-29 |
KR101766803B1 (ko) | 2017-08-23 |
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