HK1064324A1 - Cmp conditioner, method for arranging hard abrasive grains for use in cmp conditioner, and process for producing cmp conditioner - Google Patents

Cmp conditioner, method for arranging hard abrasive grains for use in cmp conditioner, and process for producing cmp conditioner

Info

Publication number
HK1064324A1
HK1064324A1 HK04107147A HK04107147A HK1064324A1 HK 1064324 A1 HK1064324 A1 HK 1064324A1 HK 04107147 A HK04107147 A HK 04107147A HK 04107147 A HK04107147 A HK 04107147A HK 1064324 A1 HK1064324 A1 HK 1064324A1
Authority
HK
Hong Kong
Prior art keywords
cmp conditioner
abrasive grains
support member
hard abrasive
cmp
Prior art date
Application number
HK04107147A
Other languages
English (en)
Inventor
Toshiya Kinoshita
Eiji Hashino
Setsuo Sato
Ryuichi Araki
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000388994A external-priority patent/JP3598062B2/ja
Priority claimed from JP2001262167A external-priority patent/JP2003071718A/ja
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Publication of HK1064324A1 publication Critical patent/HK1064324A1/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304Mechanical treatment, e.g. grinding, polishing, cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12Dressing tools; Holders therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/06Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/14Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/14Zonally-graded wheels; Composite wheels comprising different abrasives

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
HK04107147A 2000-12-21 2004-09-17 Cmp conditioner, method for arranging hard abrasive grains for use in cmp conditioner, and process for producing cmp conditioner HK1064324A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000388994A JP3598062B2 (ja) 2000-12-21 2000-12-21 Cmpドレッサー、cmpドレッサーに使用する硬質砥粒の配列方法、及びcmpドレッサーの製造方法
JP2001262167A JP2003071718A (ja) 2001-08-30 2001-08-30 Cmpコンディショナー、cmpコンディショナーに使用する硬質砥粒の配列方法、及びcmpコンディショナー製造方法
PCT/JP2001/011209 WO2002049807A1 (fr) 2000-12-21 2001-12-20 Conditionneur pour polissage chimico-mecanique, procede pour agencer des grains rigides utilises dans un conditionneur pour polissage chimico-mecanique, et procede pour produire un conditionneur pour polissage chimico-mecanique

Publications (1)

Publication Number Publication Date
HK1064324A1 true HK1064324A1 (en) 2005-01-28

Family

ID=26606289

Family Applications (1)

Application Number Title Priority Date Filing Date
HK04107147A HK1064324A1 (en) 2000-12-21 2004-09-17 Cmp conditioner, method for arranging hard abrasive grains for use in cmp conditioner, and process for producing cmp conditioner

Country Status (8)

Country Link
US (2) US20040072510A1 (fr)
EP (1) EP1346797B1 (fr)
KR (1) KR100552391B1 (fr)
CN (1) CN100361786C (fr)
DE (1) DE60124424T2 (fr)
HK (1) HK1064324A1 (fr)
TW (1) TW575477B (fr)
WO (1) WO2002049807A1 (fr)

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US9199357B2 (en) 1997-04-04 2015-12-01 Chien-Min Sung Brazed diamond tools and methods for making the same
US9868100B2 (en) 1997-04-04 2018-01-16 Chien-Min Sung Brazed diamond tools and methods for making the same
US9238207B2 (en) 1997-04-04 2016-01-19 Chien-Min Sung Brazed diamond tools and methods for making the same
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US7658666B2 (en) * 2004-08-24 2010-02-09 Chien-Min Sung Superhard cutters and associated methods
US7762872B2 (en) * 2004-08-24 2010-07-27 Chien-Min Sung Superhard cutters and associated methods
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US9204693B2 (en) 2012-08-20 2015-12-08 Forever Mount, LLC Brazed joint for attachment of gemstones to each other and/or a metallic mount
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Also Published As

Publication number Publication date
EP1346797B1 (fr) 2006-11-08
WO2002049807A1 (fr) 2002-06-27
CN100361786C (zh) 2008-01-16
US20040072510A1 (en) 2004-04-15
KR100552391B1 (ko) 2006-02-20
US20060160477A1 (en) 2006-07-20
DE60124424D1 (de) 2006-12-21
DE60124424T2 (de) 2007-10-04
EP1346797A1 (fr) 2003-09-24
TW575477B (en) 2004-02-11
US7465217B2 (en) 2008-12-16
KR20030063408A (ko) 2003-07-28
CN1482959A (zh) 2004-03-17
EP1346797A4 (fr) 2004-08-11

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20131220