HK1003608A1 - Piezoelectric/electrostrictive element having ceramic substrate formed essentially of stabilized zirconia - Google Patents

Piezoelectric/electrostrictive element having ceramic substrate formed essentially of stabilized zirconia

Info

Publication number
HK1003608A1
HK1003608A1 HK98102649A HK98102649A HK1003608A1 HK 1003608 A1 HK1003608 A1 HK 1003608A1 HK 98102649 A HK98102649 A HK 98102649A HK 98102649 A HK98102649 A HK 98102649A HK 1003608 A1 HK1003608 A1 HK 1003608A1
Authority
HK
Hong Kong
Prior art keywords
piezoelectric
ceramic substrate
substrate formed
stabilized zirconia
electrostrictive element
Prior art date
Application number
HK98102649A
Other languages
English (en)
Inventor
Yukihisa Takeuchi
Koji Kimura
Original Assignee
Ngk Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3203831A external-priority patent/JP3009945B2/ja
Priority claimed from JP28349491A external-priority patent/JP3272004B2/ja
Priority claimed from JP04094742A external-priority patent/JP3126212B2/ja
Application filed by Ngk Insulators Ltd filed Critical Ngk Insulators Ltd
Publication of HK1003608A1 publication Critical patent/HK1003608A1/xx

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
HK98102649A 1991-07-18 1998-03-27 Piezoelectric/electrostrictive element having ceramic substrate formed essentially of stabilized zirconia HK1003608A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP3203831A JP3009945B2 (ja) 1991-07-18 1991-07-18 圧電／電歪膜型素子
JP28349491A JP3272004B2 (ja) 1991-10-03 1991-10-03 圧電／電歪膜型素子
JP04094742A JP3126212B2 (ja) 1992-03-21 1992-03-21 圧電／電歪膜型素子

Publications (1)

Publication Number Publication Date
HK1003608A1 true HK1003608A1 (en) 1998-10-30

Family

ID=27307629

Family Applications (1)

Application Number Title Priority Date Filing Date
HK98102649A HK1003608A1 (en) 1991-07-18 1998-03-27 Piezoelectric/electrostrictive element having ceramic substrate formed essentially of stabilized zirconia

Country Status (4)

Country Link
US (2) US5430344A (de)
EP (1) EP0526048B1 (de)
DE (1) DE69223096T2 (de)
HK (1) HK1003608A1 (de)

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US7164221B1 (en) * 1999-10-01 2007-01-16 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and method of manufacturing same
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Also Published As

Publication number Publication date
US5430344A (en) 1995-07-04
DE69223096D1 (de) 1997-12-18
EP0526048B1 (de) 1997-11-12
US5691594A (en) 1997-11-25
EP0526048A1 (de) 1993-02-03
DE69223096T2 (de) 1998-05-28

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PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20060716