GB879256A - Improvements in or relating to vaporisation of metals - Google Patents
Improvements in or relating to vaporisation of metalsInfo
- Publication number
- GB879256A GB879256A GB31217/56A GB3121756A GB879256A GB 879256 A GB879256 A GB 879256A GB 31217/56 A GB31217/56 A GB 31217/56A GB 3121756 A GB3121756 A GB 3121756A GB 879256 A GB879256 A GB 879256A
- Authority
- GB
- United Kingdom
- Prior art keywords
- vapour
- wire
- filament
- metal
- droplet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 title abstract 5
- 239000002184 metal Substances 0.000 title abstract 5
- 150000002739 metals Chemical class 0.000 title 1
- 238000009834 vaporization Methods 0.000 title 1
- 229910000838 Al alloy Inorganic materials 0.000 abstract 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- 229910000881 Cu alloy Inorganic materials 0.000 abstract 1
- 229910001069 Ti alloy Inorganic materials 0.000 abstract 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000010891 electric arc Methods 0.000 abstract 1
- 238000001465 metallisation Methods 0.000 abstract 1
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 abstract 1
- 239000010936 titanium Substances 0.000 abstract 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 239000010937 tungsten Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Toxicology (AREA)
- Materials Engineering (AREA)
- Health & Medical Sciences (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Physical Vapour Deposition (AREA)
Abstract
879,256. Coating by vapour deposition. EDWARDS HIGH VACUUM Ltd. Oct. 2, 1957 [Oct. 12, 1956], No: 31217/56. Class 82(2) [Also in Groups XI, XXVIII and XL(a)] A source of metal vapour for use in vacuum metallization apparatus comprises means for feeding a metal wire downwardly on to or adjacent a cooled surface and means providing electrons whch bombard the end of the wire to produce a molten droplet emitting metal -vapour, said droplet adhering to the portion of the cooled surface in proximity to the end of the wire and becoming suspended on said portion. As shown, metal wire 1 is fed through the hollow core of positive water-cooled block 4 from which it emerges to be heated by electron bombardment from circular filament 5, vapour being emitted from droplet 7. Negative ring shield 8 surrounds the filament and prevents electron bombardment of nearby positive fittings. An arc discharge may be used instead of, or in addition to, the filament source of electrons: the arc may be formed between block 4 and a pointed tungsten rod acting as cathode. Wires which may be evaporated include those of titanium, aluminium, copper and nickel-chromium alloy. Objects to be coated may be mounted statically or on rotating jigs. Specification 754,102 is referred to.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB31217/56A GB879256A (en) | 1956-10-12 | 1956-10-12 | Improvements in or relating to vaporisation of metals |
| US689381A US3056740A (en) | 1956-10-12 | 1957-10-10 | Vapourisation of metals |
| DEE14787A DE1242429B (en) | 1956-10-12 | 1957-10-11 | Device for vacuum evaporation of metallic layers by means of electron bombardment |
| FR1184364D FR1184364A (en) | 1956-10-12 | 1957-10-12 | Source of metal vapor, especially for diffusion vacuum pumps and method of operation thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB31217/56A GB879256A (en) | 1956-10-12 | 1956-10-12 | Improvements in or relating to vaporisation of metals |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB879256A true GB879256A (en) | 1961-10-11 |
Family
ID=10319789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB31217/56A Expired GB879256A (en) | 1956-10-12 | 1956-10-12 | Improvements in or relating to vaporisation of metals |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3056740A (en) |
| DE (1) | DE1242429B (en) |
| FR (1) | FR1184364A (en) |
| GB (1) | GB879256A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1771629B1 (en) * | 1968-06-19 | 1971-07-29 | Heraeus Gmbh W C | EVAPORATION DEVICE FOR ALUMINUM |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL282934A (en) * | 1961-09-07 | |||
| US3156406A (en) * | 1962-03-26 | 1964-11-10 | Varian Associates | High vacuum pumping method and apparatus |
| US3358910A (en) * | 1964-11-16 | 1967-12-19 | Nippon Electric Co | Vacuum pump |
| DE4201584C1 (en) * | 1992-01-22 | 1993-04-15 | Leybold Ag, 6450 Hanau, De | |
| RU2596533C2 (en) * | 2014-10-28 | 2016-09-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" | Cathode of electric arc evaporator and preparation method thereof |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE661185C (en) * | 1936-02-01 | 1938-06-13 | Bernhard Berghaus | Method and device for the production of metallic coatings from metals vaporized by means of an electric arc in a chamber |
| GB505135A (en) * | 1937-03-25 | 1939-05-05 | Bernhard Berghaus | Improvements in and relating to the coating of articles by cathode disintegration |
| GB513257A (en) * | 1938-03-02 | 1939-10-09 | Paul Alexander | Process of and apparatus for deposition of metals by thermal evaporation in vacuum |
| US2717962A (en) * | 1944-03-31 | 1955-09-13 | Louis F Wouters | Electric discharge devices |
| US2527747A (en) * | 1946-01-03 | 1950-10-31 | Margaret N Lewis | Apparatus for coating articles by thermal evaporation |
| US2509053A (en) * | 1947-11-08 | 1950-05-23 | Bell Telephone Labor Inc | Space current device employing mutually bombarded electrodes |
| GB754102A (en) * | 1951-06-22 | 1956-08-01 | Edwards & Co London Ltd W | Improvements in or relating to a method and apparatus for vapourising materials, forexample, metal in vacuum |
| US2808980A (en) * | 1953-09-23 | 1957-10-08 | Westinghouse Electric Corp | Electrical vacuum pump |
| US2791371A (en) * | 1956-01-09 | 1957-05-07 | Jr John S Foster | Radio frequency ion pump |
| US2960457A (en) * | 1956-02-28 | 1960-11-15 | Servomechanisms Inc | Apparatus for vaporizing coating materials |
-
1956
- 1956-10-12 GB GB31217/56A patent/GB879256A/en not_active Expired
-
1957
- 1957-10-10 US US689381A patent/US3056740A/en not_active Expired - Lifetime
- 1957-10-11 DE DEE14787A patent/DE1242429B/en active Pending
- 1957-10-12 FR FR1184364D patent/FR1184364A/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1771629B1 (en) * | 1968-06-19 | 1971-07-29 | Heraeus Gmbh W C | EVAPORATION DEVICE FOR ALUMINUM |
Also Published As
| Publication number | Publication date |
|---|---|
| FR1184364A (en) | 1959-07-21 |
| DE1242429B (en) | 1967-06-15 |
| US3056740A (en) | 1962-10-02 |
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