GB1527022A - Fieldemission cathode - Google Patents
Fieldemission cathodeInfo
- Publication number
- GB1527022A GB1527022A GB5965/76A GB596576A GB1527022A GB 1527022 A GB1527022 A GB 1527022A GB 5965/76 A GB5965/76 A GB 5965/76A GB 596576 A GB596576 A GB 596576A GB 1527022 A GB1527022 A GB 1527022A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cathode
- tungsten
- torr
- emissive layer
- wire
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 4
- 229910052721 tungsten Inorganic materials 0.000 abstract 4
- 239000010937 tungsten Substances 0.000 abstract 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 3
- 229910052799 carbon Inorganic materials 0.000 abstract 3
- 238000000151 deposition Methods 0.000 abstract 2
- 238000010894 electron beam technology Methods 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000009760 electrical discharge machining Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000003754 machining Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000000197 pyrolysis Methods 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30453—Carbon types
- H01J2201/30457—Diamond
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Cold Cathode And The Manufacture (AREA)
- Electron Sources, Ion Sources (AREA)
- Prevention Of Electric Corrosion (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
Abstract
1527022 Field emission cathodes PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd 16 Feb 1976 [19 Feb 1975] 05965/76 Heading H1D A field emission cathode 2, e.g. for an electron microscope or an X-ray source, comprises, on a support 21, a wire-shaped cathode tip 23 composed of a wire core 24 on which an emissive layer 26 of carbon is deposited. The wire core 24 may be of tungsten which is mounted in a bore in the supporting wire 21 and fixed thereto by depositing tungsten thereover, and the emissive layer of carbon formed by vapour deposition, sputtering or pyrolysis. Unlike a conventional cathode tip of tungsten only which requires to be operated in a vacuum 10<SP>-10</SP> torr, the cathode with the emissive carbon coating will operate under a vacuum of 10<SP>-8</SP> torr or even of 10<SP>-7</SP> torr if it is heated during operation to 800‹ C. A multiple cathode comprising a plurality of cathode tips on one carrier may be formed by the spark erosion of a tungsten block or the etching of a block of silicon, the tips then being provided with the emissive layer. Such a multiple cathode may be utilized in an X-ray tube in which the electron beam from each cathode tip is incident on a part of the anode made of different material, thus generating X-ray beams of different wavelength distribution. The cathodes may also be used in electron beam machining apparatus and for display tubes.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7501932A NL7501932A (en) | 1975-02-19 | 1975-02-19 | FIELD EMISSION SOURCE. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1527022A true GB1527022A (en) | 1978-10-04 |
Family
ID=19823210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB5965/76A Expired GB1527022A (en) | 1975-02-19 | 1976-02-16 | Fieldemission cathode |
Country Status (8)
| Country | Link |
|---|---|
| JP (1) | JPS5616942B2 (en) |
| AU (1) | AU1115576A (en) |
| DE (1) | DE2604603A1 (en) |
| ES (1) | ES445244A1 (en) |
| FR (1) | FR2301918A1 (en) |
| GB (1) | GB1527022A (en) |
| NL (1) | NL7501932A (en) |
| SE (1) | SE7601660L (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7605820A (en) * | 1976-05-31 | 1977-12-02 | Philips Nv | ELECTRON BEAM TUBE WITH FIELD EMISSION ELECTRONIC SOURCE, FIELD EMISSION ELECTRONIC SOURCE FOR SUCH ELECTRONIC BEAM TUBE AND METHOD FOR MANUFACTURE OF SUCH FIELD EMISSION ELECTRONIC SOURCE. |
| JP3131339B2 (en) * | 1993-12-22 | 2001-01-31 | 三菱電機株式会社 | Cathode, cathode ray tube and method of operating cathode ray tube |
| CN105140088B (en) * | 2015-07-24 | 2017-10-17 | 北京航空航天大学 | The focusing arrangement and its application method of big beam deflection target practice X-ray source with microbeam |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL285235A (en) * | 1961-11-08 | |||
| US3374386A (en) * | 1964-11-02 | 1968-03-19 | Field Emission Corp | Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder |
| FR1478071A (en) * | 1965-04-30 | 1967-04-21 | Matsushita Electric Ind Co Ltd | Apparatus for forming an electron beam |
| US3665241A (en) * | 1970-07-13 | 1972-05-23 | Stanford Research Inst | Field ionizer and field emission cathode structures and methods of production |
-
1975
- 1975-02-19 NL NL7501932A patent/NL7501932A/en not_active Application Discontinuation
-
1976
- 1976-02-06 DE DE19762604603 patent/DE2604603A1/en active Pending
- 1976-02-16 JP JP1499276A patent/JPS5616942B2/ja not_active Expired
- 1976-02-16 SE SE7601660A patent/SE7601660L/en unknown
- 1976-02-16 GB GB5965/76A patent/GB1527022A/en not_active Expired
- 1976-02-17 ES ES445244A patent/ES445244A1/en not_active Expired
- 1976-02-17 AU AU11155/76A patent/AU1115576A/en not_active Expired
- 1976-02-19 FR FR7604539A patent/FR2301918A1/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| FR2301918B1 (en) | 1979-08-31 |
| NL7501932A (en) | 1976-08-23 |
| AU1115576A (en) | 1977-09-01 |
| JPS51107756A (en) | 1976-09-24 |
| FR2301918A1 (en) | 1976-09-17 |
| SE7601660L (en) | 1976-08-20 |
| JPS5616942B2 (en) | 1981-04-20 |
| ES445244A1 (en) | 1977-06-01 |
| DE2604603A1 (en) | 1976-09-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PCNP | Patent ceased through non-payment of renewal fee |