GB754101A - Improvements in or relating to cleaning of surfaces by subjecting the surfaces to electronic bombardment - Google Patents
Improvements in or relating to cleaning of surfaces by subjecting the surfaces to electronic bombardmentInfo
- Publication number
- GB754101A GB754101A GB746851A GB746851A GB754101A GB 754101 A GB754101 A GB 754101A GB 746851 A GB746851 A GB 746851A GB 746851 A GB746851 A GB 746851A GB 754101 A GB754101 A GB 754101A
- Authority
- GB
- United Kingdom
- Prior art keywords
- holder
- work
- potential
- anode
- objects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 title abstract 2
- 230000008021 deposition Effects 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000010409 thin film Substances 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 239000011888 foil Substances 0.000 abstract 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 abstract 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 abstract 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 abstract 1
- 229910052753 mercury Inorganic materials 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000012986 modification Methods 0.000 abstract 1
- 230000004048 modification Effects 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 239000003870 refractory metal Substances 0.000 abstract 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 239000010937 tungsten Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
- C03C17/09—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/004—Other surface treatment of glass not in the form of fibres or filaments by irradiation by electrons, protons or alpha-particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/063—Geometrical arrangement of electrodes for beam-forming
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/28—Other inorganic materials
- C03C2217/284—Halides
- C03C2217/285—Fluorides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/31—Pre-treatment
Abstract
754,101. Coating by vapour deposition. EDWARDS & CO. (LONDON), Ltd., W. March 31, 1952 [March 30, 1951], No. 7468/51. Class 82(2). [Also in Groups XX and XL(a)] Apparatus for subjecting surfaces, e.g. optical surfaces such as lenses prior to deposition of thin films, to electronic bombardment, e.g. for cleaning purposes, comprises a vacuum chamber 1, an electron gun 6 adapted to produce a stationary divergent beam of electrons, and a preferably dome-shaped work-holder 4 for removably supporting a plurality of objects 11 such as lenses in such manner that the surface to be bombarded of each of the objects can be positioned so as to be substantially normal to the beam at the same distance from the centre of divergence of the beam so that each of the surfaces is subjected to a substantially equal and uniform bombardment by the beam. Thin films are afterwards applied to the objects 11 by a metal vapour (magnesium fluoride is also referred to) crucible 10 which can be positioned on the axis of the chamber by attachment to an arm operated by a rotating member outside the vacuum chamber. In a modification using a rotatable work-holder the electron gun is off-set from the axis of rotation of a disc-like work-holder, the arrangement being such that the surfaces of the objects on the work-holder are moved successively through the beam substantially normal thereto and at an equal distance from the centre of divergence thereof. The crucible 10 can then be positioned on the axis of rotation of the work-holder. The temperature of the crucible can be raised by conventional resistance heating of refractory metal foils or by filament heating. Alternatively the evaporator may be connected to the positive side of the H.T. supply and heated by electron bombardment or the method described in Specification 754,102 can be used. The electron gun 6 is mounted on the platform 5 and comprises a spiral thoriated tungsten filament 7, a focussing electrode 8 and an accelerating anode 9. The focussing electrode 8 comprises a circular flat box, the central portion of the top of which is apertured and shaped like the frustum of a cone, and the anode 9 comprises a disc having a central apertured portion also resembling the frustum of a cone but of less vertical height than the central portion of the electrode 8. The accelerating anode 9 is so designed that the current passing to it is negligible, e.g. 10 per cent, in comparison with that bombarding the work-holder. In one method of operation the anode potential and the workholder potential are the same, as also are the potentials of the focussing electrode and the filament. The divergency of the beam is altered by altering the potential of the accelerating anode, e.g. by using a potential divider connected across the source of H.T. supply. The position of the electron gun with respect to the workholder and the potential of the accelerating anode of the gun also affect the divergency of the beam. Potentials, currents and dimensions are given. The gas pressure is preferably kept below 3 x 10À4 mms. of mercury by vacuum pump exhaustion through tube 3.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB746851A GB754101A (en) | 1951-03-30 | 1951-03-30 | Improvements in or relating to cleaning of surfaces by subjecting the surfaces to electronic bombardment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB746851A GB754101A (en) | 1951-03-30 | 1951-03-30 | Improvements in or relating to cleaning of surfaces by subjecting the surfaces to electronic bombardment |
Publications (1)
Publication Number | Publication Date |
---|---|
GB754101A true GB754101A (en) | 1956-08-01 |
Family
ID=9833677
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB746851A Expired GB754101A (en) | 1951-03-30 | 1951-03-30 | Improvements in or relating to cleaning of surfaces by subjecting the surfaces to electronic bombardment |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB754101A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3180751A (en) * | 1961-05-26 | 1965-04-27 | Bausch & Lomb | Method of forming a composite article |
US3354064A (en) * | 1964-03-30 | 1967-11-21 | Bausch & Lomb | Method for changing the physical characteristics of an article by electron bombardment |
-
1951
- 1951-03-30 GB GB746851A patent/GB754101A/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3180751A (en) * | 1961-05-26 | 1965-04-27 | Bausch & Lomb | Method of forming a composite article |
US3354064A (en) * | 1964-03-30 | 1967-11-21 | Bausch & Lomb | Method for changing the physical characteristics of an article by electron bombardment |
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