GB754102A - Improvements in or relating to a method and apparatus for vapourising materials, forexample, metal in vacuum - Google Patents

Improvements in or relating to a method and apparatus for vapourising materials, forexample, metal in vacuum

Info

Publication number
GB754102A
GB754102A GB1491051A GB1491051A GB754102A GB 754102 A GB754102 A GB 754102A GB 1491051 A GB1491051 A GB 1491051A GB 1491051 A GB1491051 A GB 1491051A GB 754102 A GB754102 A GB 754102A
Authority
GB
United Kingdom
Prior art keywords
metal
vapourising
crucible
vacuum chamber
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1491051A
Inventor
Leslie Arthur Holland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards High Vacuum Ltd
Original Assignee
W Edwards and Company London Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by W Edwards and Company London Ltd filed Critical W Edwards and Company London Ltd
Priority to GB1491051A priority Critical patent/GB754102A/en
Publication of GB754102A publication Critical patent/GB754102A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors

Abstract

754,102. Coating by vapour deposition. EDWARDS & CO. (LONDON), Ltd., W. Dec. 12, 1952 [June 22, 1951], No. 14910/51. Class 82(2). [Also in Group XI] In a method of vapourising a substance in a vacuum chamber by electronic bombardment (see Group XI), a metallic substance, in one embodiment, is contained within a crucible 26 mounted within a vacuum chamber 21, and the base of the crucible is water cooled by a coiled pipe. An electron gun 18 directs its beam 19 onto the surface of the metal, and a magnet assembly comprising two semi-circular soft iron plates spanned by a permanent magnet 39 bends the beam through 180 degrees. The vapourised metal is deposited on plastic sheet material 22 which passes continuously between drums 23, 24. Specifications 654,228 and 754,101 are referred to.
GB1491051A 1951-06-22 1951-06-22 Improvements in or relating to a method and apparatus for vapourising materials, forexample, metal in vacuum Expired GB754102A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1491051A GB754102A (en) 1951-06-22 1951-06-22 Improvements in or relating to a method and apparatus for vapourising materials, forexample, metal in vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1491051A GB754102A (en) 1951-06-22 1951-06-22 Improvements in or relating to a method and apparatus for vapourising materials, forexample, metal in vacuum

Publications (1)

Publication Number Publication Date
GB754102A true GB754102A (en) 1956-08-01

Family

ID=10049703

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1491051A Expired GB754102A (en) 1951-06-22 1951-06-22 Improvements in or relating to a method and apparatus for vapourising materials, forexample, metal in vacuum

Country Status (1)

Country Link
GB (1) GB754102A (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2932588A (en) * 1955-07-06 1960-04-12 English Electric Valve Co Ltd Methods of manufacturing thin films of refractory dielectric materials
US2998376A (en) * 1956-10-29 1961-08-29 Temescal Metallurgical Corp High-vacuum evaporator
US3024965A (en) * 1957-10-08 1962-03-13 Milleron Norman Apparatus for vacuum deposition of metals
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
US3056740A (en) * 1956-10-12 1962-10-02 Edwards High Vacuum Ltd Vapourisation of metals
US3181209A (en) * 1961-08-18 1965-05-04 Temescal Metallurgical Corp Foil production
US3227133A (en) * 1962-04-13 1966-01-04 Temescal Metallurgical Corp Multiple layer coating and cleaning
US3307936A (en) * 1963-06-12 1967-03-07 Temerscal Metallurg Corp Purification of metals
DE1262101C2 (en) * 1962-12-15 1973-10-25 CRUCIBLE FOR EVAPORATION OF SUBSTANCES IN A VACUUM USING ELECTRON BEAMS, IN PARTICULAR FOR TAPE EVAPORATION
US4080926A (en) * 1975-03-30 1978-03-28 Massachusetts Institute Of Technology Apparatus for growing films by flash vaporization
DE102004051290B4 (en) * 2004-10-13 2007-07-12 Creavac-Creative Vakuumbeschichtung Gmbh Device for coating substrates by vapor deposition in an evacuable processing chamber

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2932588A (en) * 1955-07-06 1960-04-12 English Electric Valve Co Ltd Methods of manufacturing thin films of refractory dielectric materials
DE1242429B (en) * 1956-10-12 1967-06-15 Edwards High Vacuum Ltd Device for vacuum evaporation of metallic layers by means of electron bombardment
US3056740A (en) * 1956-10-12 1962-10-02 Edwards High Vacuum Ltd Vapourisation of metals
US2998376A (en) * 1956-10-29 1961-08-29 Temescal Metallurgical Corp High-vacuum evaporator
US3024965A (en) * 1957-10-08 1962-03-13 Milleron Norman Apparatus for vacuum deposition of metals
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
US3181209A (en) * 1961-08-18 1965-05-04 Temescal Metallurgical Corp Foil production
US3227133A (en) * 1962-04-13 1966-01-04 Temescal Metallurgical Corp Multiple layer coating and cleaning
DE1262101C2 (en) * 1962-12-15 1973-10-25 CRUCIBLE FOR EVAPORATION OF SUBSTANCES IN A VACUUM USING ELECTRON BEAMS, IN PARTICULAR FOR TAPE EVAPORATION
DE1262101B (en) * 1962-12-15 1973-10-25
US3307936A (en) * 1963-06-12 1967-03-07 Temerscal Metallurg Corp Purification of metals
US4080926A (en) * 1975-03-30 1978-03-28 Massachusetts Institute Of Technology Apparatus for growing films by flash vaporization
DE102004051290B4 (en) * 2004-10-13 2007-07-12 Creavac-Creative Vakuumbeschichtung Gmbh Device for coating substrates by vapor deposition in an evacuable processing chamber

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