JPS5743986A - Film forming apparatus - Google Patents

Film forming apparatus

Info

Publication number
JPS5743986A
JPS5743986A JP11994880A JP11994880A JPS5743986A JP S5743986 A JPS5743986 A JP S5743986A JP 11994880 A JP11994880 A JP 11994880A JP 11994880 A JP11994880 A JP 11994880A JP S5743986 A JPS5743986 A JP S5743986A
Authority
JP
Japan
Prior art keywords
main body
upper lid
container main
vacuum container
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11994880A
Other languages
Japanese (ja)
Inventor
Takao Hanasaka
Eisuke Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP11994880A priority Critical patent/JPS5743986A/en
Publication of JPS5743986A publication Critical patent/JPS5743986A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields

Abstract

PURPOSE:To improve the magnetic efficiency of the apparatus, to make it easy to generate a magnetic field and to reduce restrictions on design in scaling up the apparatus, by composing the vacuum container main body and the upper lid in the high speed sputtering apparatus of a material having large permeability. CONSTITUTION:Targets 21, 21 opposing to each other are retained by magnets 22, 22 and fixed via a insulating material 27 to each inner surface of the upper lid 28 and container main body 29 of the vacuum container, the inside of the container 29 is evacuated to become a vacuum, and a high voltage is applied between the target 21, vacuum container main body 29 and apper lid 28 by a high voltage electric source 26 to sputter a target metal on a substrate 24 on the substrate holder 25 by a glow discharge. In this case, the preparation of the container main body 29 upper lid 28 using iron material having high permeability results in the formation of magnetic circuit of the magnet 22 in a small magnetic gap through the vacuum container 29 and upper lid 28 and also results in improvement in magnetic efficiency. Restrictions on design in scaling up the apparatus are also reduced.
JP11994880A 1980-08-30 1980-08-30 Film forming apparatus Pending JPS5743986A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11994880A JPS5743986A (en) 1980-08-30 1980-08-30 Film forming apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11994880A JPS5743986A (en) 1980-08-30 1980-08-30 Film forming apparatus

Publications (1)

Publication Number Publication Date
JPS5743986A true JPS5743986A (en) 1982-03-12

Family

ID=14774137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11994880A Pending JPS5743986A (en) 1980-08-30 1980-08-30 Film forming apparatus

Country Status (1)

Country Link
JP (1) JPS5743986A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57158380A (en) * 1981-03-26 1982-09-30 Teijin Ltd Counter target type sputtering device
JPS58189371A (en) * 1982-04-28 1983-11-05 Teijin Ltd Sputtering device
JPS5953680A (en) * 1982-09-21 1984-03-28 Teijin Ltd Sputtering device
JPS60106966A (en) * 1983-11-12 1985-06-12 Konishiroku Photo Ind Co Ltd Confronting target type sputtering apparatus
JPH01315968A (en) * 1988-03-07 1989-12-20 Hirose Electric Co Ltd Electric connector and connection thereof
JPH0626152B2 (en) * 1984-10-15 1994-04-06 アンプ インコ−ポレ−テツド Shielded electrical plug assembly

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57158380A (en) * 1981-03-26 1982-09-30 Teijin Ltd Counter target type sputtering device
JPS6320304B2 (en) * 1981-03-26 1988-04-27 Teijin Ltd
JPS58189371A (en) * 1982-04-28 1983-11-05 Teijin Ltd Sputtering device
JPH034621B2 (en) * 1982-04-28 1991-01-23 Teijin Ltd
JPS5953680A (en) * 1982-09-21 1984-03-28 Teijin Ltd Sputtering device
JPS6335710B2 (en) * 1982-09-21 1988-07-15 Teijin Ltd
JPS60106966A (en) * 1983-11-12 1985-06-12 Konishiroku Photo Ind Co Ltd Confronting target type sputtering apparatus
JPH0626152B2 (en) * 1984-10-15 1994-04-06 アンプ インコ−ポレ−テツド Shielded electrical plug assembly
JPH01315968A (en) * 1988-03-07 1989-12-20 Hirose Electric Co Ltd Electric connector and connection thereof
JPH05824B2 (en) * 1988-03-07 1993-01-06 Hirose Electric Co Ltd

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