GB793635A - Improvements in methods of manufacturing thin films - Google Patents

Improvements in methods of manufacturing thin films

Info

Publication number
GB793635A
GB793635A GB1958055A GB1958055A GB793635A GB 793635 A GB793635 A GB 793635A GB 1958055 A GB1958055 A GB 1958055A GB 1958055 A GB1958055 A GB 1958055A GB 793635 A GB793635 A GB 793635A
Authority
GB
United Kingdom
Prior art keywords
pole
piece
gun
evaporate
follow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1958055A
Inventor
Kurt Josef Frank
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teledyne UK Ltd
Original Assignee
English Electric Valve Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to NL208669D priority Critical patent/NL208669A/xx
Priority to DENDAT1072451D priority patent/DE1072451B/en
Priority to NL99895D priority patent/NL99895C/xx
Application filed by English Electric Valve Co Ltd filed Critical English Electric Valve Co Ltd
Priority to GB1958055A priority patent/GB793635A/en
Priority to ES0229528A priority patent/ES229528A1/en
Priority to FR1154386D priority patent/FR1154386A/en
Publication of GB793635A publication Critical patent/GB793635A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Abstract

793,635. Coating by vapour deposition. ENGLISH ELECTRIC VALVE CO., Ltd. May 2, 1956 [July 6, 1955], No. 19580/55. Class 82(2) [Also in Group XL(a)] A thin film is made by subjecting a specimen of the material of the film supported by one pole-piece of a magnet to an electron beam which is emitted by a gun in the other pole-piece and which is constrained to follow the magnetic flux path, the electronic bombardment causing evaporation of the material, the resulting evaporate being condensed on a substrate which is clear of the flux and beam path. The material may be a refractory insulator, e.g. alumina, magnesia, silica, or zirconia, and the procedure is carried out in vacuo. As shown, pole-piece 2 of permanent magnet 1 supports the material 3 to be evaporated, the other pole-piece 4 comprising a hollow section 5 within which is contained an electron gun consisting of cathode 7 surrounded by control grid 8. Electrons from the gun emerge through orifice 9 and follow the trajectory 6a, being bent through 90 degrees, to strike material 3, evaporate from which condenses on surface 14. The material 3 may be moved so as continuously to bring fresh areas thereof under bombardment. The evaporation of glass is also referred to; free supporting glass films may be made by the process described in Specification 709,503 [Group XXIII].
GB1958055A 1955-07-06 1955-07-06 Improvements in methods of manufacturing thin films Expired GB793635A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
NL208669D NL208669A (en) 1955-07-06
DENDAT1072451D DE1072451B (en) 1955-07-06 Device for the production of coatings by vacuum vapor deposition
NL99895D NL99895C (en) 1955-07-06
GB1958055A GB793635A (en) 1955-07-06 1955-07-06 Improvements in methods of manufacturing thin films
ES0229528A ES229528A1 (en) 1955-07-06 1956-06-28 Improvements in methods of manufacturing thin films
FR1154386D FR1154386A (en) 1955-07-06 1956-07-05 Method for manufacturing thin films of dielectric refractory materials and apparatus for carrying out this method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1958055A GB793635A (en) 1955-07-06 1955-07-06 Improvements in methods of manufacturing thin films

Publications (1)

Publication Number Publication Date
GB793635A true GB793635A (en) 1958-04-23

Family

ID=10131749

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1958055A Expired GB793635A (en) 1955-07-06 1955-07-06 Improvements in methods of manufacturing thin films

Country Status (5)

Country Link
DE (1) DE1072451B (en)
ES (1) ES229528A1 (en)
FR (1) FR1154386A (en)
GB (1) GB793635A (en)
NL (2) NL208669A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2504116A1 (en) * 1981-04-15 1982-10-22 Commissariat Energie Atomique PROCESS FOR OBTAINING LUMINESCENT GLASS LAYERS, APPLICATION TO THE PRODUCTION OF DEVICES HAVING THESE LAYERS AND THE PRODUCTION OF PHOTOSCINTILLATORS
US6576294B1 (en) * 1989-10-24 2003-06-10 Flex Products, Inc. Method for forming barrier film

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1204048B (en) * 1961-03-11 1965-10-28 Heraeus Gmbh W C Process for applying scratch-resistant, transparent, oxidic protective layers to optical objects, e.g. B. glasses made of thermoplastics, especially acrylic resins, by vacuum evaporation
DE1266608B (en) * 1962-03-23 1968-04-18 Siemens Ag Process for vacuum deposition of insulating material layers by means of bundled electron beams
NL291466A (en) * 1962-04-13
DE1199097B (en) * 1962-09-25 1965-08-19 Heraeus Gmbh W C Device for vacuum evaporation of wide strips, especially with metals, by heating the material to be evaporated by means of electron beams

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2504116A1 (en) * 1981-04-15 1982-10-22 Commissariat Energie Atomique PROCESS FOR OBTAINING LUMINESCENT GLASS LAYERS, APPLICATION TO THE PRODUCTION OF DEVICES HAVING THESE LAYERS AND THE PRODUCTION OF PHOTOSCINTILLATORS
US4447305A (en) * 1981-04-15 1984-05-08 Commissariat A L'energie Atomique Process for obtaining luminescent glass layers
US6576294B1 (en) * 1989-10-24 2003-06-10 Flex Products, Inc. Method for forming barrier film

Also Published As

Publication number Publication date
ES229528A1 (en) 1956-11-01
DE1072451B (en) 1960-06-02
NL208669A (en)
FR1154386A (en) 1958-04-08
NL99895C (en)

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