GB793635A - Improvements in methods of manufacturing thin films - Google Patents
Improvements in methods of manufacturing thin filmsInfo
- Publication number
- GB793635A GB793635A GB1958055A GB1958055A GB793635A GB 793635 A GB793635 A GB 793635A GB 1958055 A GB1958055 A GB 1958055A GB 1958055 A GB1958055 A GB 1958055A GB 793635 A GB793635 A GB 793635A
- Authority
- GB
- United Kingdom
- Prior art keywords
- pole
- piece
- gun
- evaporate
- follow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Physical Vapour Deposition (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
793,635. Coating by vapour deposition. ENGLISH ELECTRIC VALVE CO., Ltd. May 2, 1956 [July 6, 1955], No. 19580/55. Class 82(2) [Also in Group XL(a)] A thin film is made by subjecting a specimen of the material of the film supported by one pole-piece of a magnet to an electron beam which is emitted by a gun in the other pole-piece and which is constrained to follow the magnetic flux path, the electronic bombardment causing evaporation of the material, the resulting evaporate being condensed on a substrate which is clear of the flux and beam path. The material may be a refractory insulator, e.g. alumina, magnesia, silica, or zirconia, and the procedure is carried out in vacuo. As shown, pole-piece 2 of permanent magnet 1 supports the material 3 to be evaporated, the other pole-piece 4 comprising a hollow section 5 within which is contained an electron gun consisting of cathode 7 surrounded by control grid 8. Electrons from the gun emerge through orifice 9 and follow the trajectory 6a, being bent through 90 degrees, to strike material 3, evaporate from which condenses on surface 14. The material 3 may be moved so as continuously to bring fresh areas thereof under bombardment. The evaporation of glass is also referred to; free supporting glass films may be made by the process described in Specification 709,503 [Group XXIII].
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL99895D NL99895C (en) | 1955-07-06 | ||
DENDAT1072451D DE1072451B (en) | 1955-07-06 | Device for the production of coatings by vacuum vapor deposition | |
NL208669D NL208669A (en) | 1955-07-06 | ||
GB1958055A GB793635A (en) | 1955-07-06 | 1955-07-06 | Improvements in methods of manufacturing thin films |
ES0229528A ES229528A1 (en) | 1955-07-06 | 1956-06-28 | Improvements in methods of manufacturing thin films |
FR1154386D FR1154386A (en) | 1955-07-06 | 1956-07-05 | Method for manufacturing thin films of dielectric refractory materials and apparatus for carrying out this method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1958055A GB793635A (en) | 1955-07-06 | 1955-07-06 | Improvements in methods of manufacturing thin films |
Publications (1)
Publication Number | Publication Date |
---|---|
GB793635A true GB793635A (en) | 1958-04-23 |
Family
ID=10131749
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1958055A Expired GB793635A (en) | 1955-07-06 | 1955-07-06 | Improvements in methods of manufacturing thin films |
Country Status (5)
Country | Link |
---|---|
DE (1) | DE1072451B (en) |
ES (1) | ES229528A1 (en) |
FR (1) | FR1154386A (en) |
GB (1) | GB793635A (en) |
NL (2) | NL208669A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2504116A1 (en) * | 1981-04-15 | 1982-10-22 | Commissariat Energie Atomique | PROCESS FOR OBTAINING LUMINESCENT GLASS LAYERS, APPLICATION TO THE PRODUCTION OF DEVICES HAVING THESE LAYERS AND THE PRODUCTION OF PHOTOSCINTILLATORS |
US6576294B1 (en) * | 1989-10-24 | 2003-06-10 | Flex Products, Inc. | Method for forming barrier film |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1204048B (en) * | 1961-03-11 | 1965-10-28 | Heraeus Gmbh W C | Process for applying scratch-resistant, transparent, oxidic protective layers to optical objects, e.g. B. glasses made of thermoplastics, especially acrylic resins, by vacuum evaporation |
DE1266608B (en) * | 1962-03-23 | 1968-04-18 | Siemens Ag | Process for vacuum deposition of insulating material layers by means of bundled electron beams |
NL291466A (en) * | 1962-04-13 | |||
DE1199097B (en) * | 1962-09-25 | 1965-08-19 | Heraeus Gmbh W C | Device for vacuum evaporation of wide strips, especially with metals, by heating the material to be evaporated by means of electron beams |
-
0
- NL NL99895D patent/NL99895C/xx active
- NL NL208669D patent/NL208669A/xx unknown
- DE DENDAT1072451D patent/DE1072451B/en active Pending
-
1955
- 1955-07-06 GB GB1958055A patent/GB793635A/en not_active Expired
-
1956
- 1956-06-28 ES ES0229528A patent/ES229528A1/en not_active Expired
- 1956-07-05 FR FR1154386D patent/FR1154386A/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2504116A1 (en) * | 1981-04-15 | 1982-10-22 | Commissariat Energie Atomique | PROCESS FOR OBTAINING LUMINESCENT GLASS LAYERS, APPLICATION TO THE PRODUCTION OF DEVICES HAVING THESE LAYERS AND THE PRODUCTION OF PHOTOSCINTILLATORS |
US4447305A (en) * | 1981-04-15 | 1984-05-08 | Commissariat A L'energie Atomique | Process for obtaining luminescent glass layers |
US6576294B1 (en) * | 1989-10-24 | 2003-06-10 | Flex Products, Inc. | Method for forming barrier film |
Also Published As
Publication number | Publication date |
---|---|
DE1072451B (en) | 1960-06-02 |
FR1154386A (en) | 1958-04-08 |
NL99895C (en) | |
NL208669A (en) | |
ES229528A1 (en) | 1956-11-01 |
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