GB854277A - Beam generating system for producing a high intensity beam of charged particles - Google Patents

Beam generating system for producing a high intensity beam of charged particles

Info

Publication number
GB854277A
GB854277A GB29387/59A GB2938759A GB854277A GB 854277 A GB854277 A GB 854277A GB 29387/59 A GB29387/59 A GB 29387/59A GB 2938759 A GB2938759 A GB 2938759A GB 854277 A GB854277 A GB 854277A
Authority
GB
United Kingdom
Prior art keywords
anode
magnets
high intensity
charged particles
generating system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB29387/59A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Publication of GB854277A publication Critical patent/GB854277A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Particle Accelerators (AREA)
GB29387/59A 1958-09-06 1959-08-27 Beam generating system for producing a high intensity beam of charged particles Expired GB854277A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEZ6840A DE1133838B (de) 1958-09-06 1958-09-06 Strahlquelle zur Erzeugung eines intensitaetsreichen Elektronenstrahles

Publications (1)

Publication Number Publication Date
GB854277A true GB854277A (en) 1960-11-16

Family

ID=7619912

Family Applications (1)

Application Number Title Priority Date Filing Date
GB29387/59A Expired GB854277A (en) 1958-09-06 1959-08-27 Beam generating system for producing a high intensity beam of charged particles

Country Status (6)

Country Link
US (1) US3071707A (enrdf_load_stackoverflow)
CH (1) CH373488A (enrdf_load_stackoverflow)
DE (1) DE1133838B (enrdf_load_stackoverflow)
FR (1) FR1233328A (enrdf_load_stackoverflow)
GB (1) GB854277A (enrdf_load_stackoverflow)
NL (1) NL242894A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1215820B (de) * 1962-08-31 1966-05-05 Telefunken Patent Kathodenstrahlroehre mit einem aus mehreren Elektroden bestehenden Strahlerzeugungssystem
DE1216455B (de) * 1964-03-25 1966-05-12 Siemens Ag Verfahren zum Ausrichten der Feldachse eines elektronenoptischen Linsen, insbesondere in einem Elektronenmikroskop zugeordneten Stigmators und Anordnung zur Durchfuehrung des Verfahrens
US3504211A (en) * 1965-05-12 1970-03-31 Hitachi Ltd Electron beam control device for use with a cathode ray tube for dynamic correction of electron beam astigmatism and defocusing
DE3123301C2 (de) * 1981-06-12 1985-08-08 Standard Elektrik Lorenz Ag, 7000 Stuttgart Vorrichtung zum Einstellen von Elektronenstrahlen einer Kathodenstrahlröhre
US11483919B2 (en) * 2019-03-27 2022-10-25 Huazhong University Of Science And Technology System of electron irradiation

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1981245A (en) * 1924-02-20 1934-11-20 Westinghouse Electric & Mfg Co Space-current device
US2111231A (en) * 1934-06-27 1938-03-15 Radio Patents Corp Recording device
US2157182A (en) * 1935-12-31 1939-05-09 Rca Corp Cathode ray deflecting device
US2165803A (en) * 1936-04-25 1939-07-11 Rca Corp Cathode ray deflecting device
DE891119C (de) * 1940-07-09 1953-09-24 Telefunken Gmbh Magnetische Elektronenlinse
DE895481C (de) * 1941-08-20 1953-11-02 Siemens Reiniger Werke Ag Elektromagnetische Zylinderlinse
GB564546A (en) * 1942-11-02 1944-10-03 Gerhard Liebmann Improvements in or relating to cathode ray tubes
US2369782A (en) * 1943-04-01 1945-02-20 Rca Corp Electron lens system
US2498354A (en) * 1946-12-03 1950-02-21 Philco Corp Magnetic lens system
DE857245C (de) * 1948-10-01 1952-11-27 Sueddeutsche Lab G M B H Strahlerzeugungssystem fuer Elektronenstrahlgeraete
DE855287C (de) * 1948-10-02 1952-11-10 Sueddeutsche Lab G M B H Linsen und Linsensysteme fuer elektronenoptische Abbildung
DE942518C (de) * 1948-10-02 1956-05-03 Zeiss Carl Fa Einrichtung zur Kompensation der Symmetriefehler von Elektronenlinsen
US2591159A (en) * 1950-05-29 1952-04-01 Gilfillan Bros Inc Magnetic means for producing compensations and other effects in a cathode-ray tube
US2714678A (en) * 1950-09-03 1955-08-02 Siemens Ag Electron microscopes
US2634381A (en) * 1951-03-26 1953-04-07 Zenith Radio Corp Cathode-ray tube beam-positioning device
NL194113A (enrdf_load_stackoverflow) * 1954-01-22
NL100357C (enrdf_load_stackoverflow) * 1955-10-04
US2883569A (en) * 1956-01-24 1959-04-21 Herman F Kaiser Magnetic quadrupole focusing system

Also Published As

Publication number Publication date
CH373488A (de) 1963-11-30
DE1133838B (de) 1962-07-26
US3071707A (en) 1963-01-01
NL242894A (enrdf_load_stackoverflow)
FR1233328A (fr) 1960-10-12

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