GB854277A - Beam generating system for producing a high intensity beam of charged particles - Google Patents

Beam generating system for producing a high intensity beam of charged particles

Info

Publication number
GB854277A
GB854277A GB29387/59A GB2938759A GB854277A GB 854277 A GB854277 A GB 854277A GB 29387/59 A GB29387/59 A GB 29387/59A GB 2938759 A GB2938759 A GB 2938759A GB 854277 A GB854277 A GB 854277A
Authority
GB
United Kingdom
Prior art keywords
anode
magnets
high intensity
charged particles
generating system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB29387/59A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Publication of GB854277A publication Critical patent/GB854277A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Abstract

854,277. Electron beam apparatus. ZEISSSTIFTUNG, C., [trading as ZEISS, C. [Firm of]]. Aug. 27, 1959 [Sept. 6, 1958], No. 29387/59. Class 39(1). In a beam generating system for producing a high intensity beam of charged particles comprising a hairpin cathode 1, Fig. 1, a control electrode 2, and an anode 3, a cylindrical magnetic lens 5, 6, adjustable both with respect to field strength and to azimuthal positioning of its major axis is attached to the anode 3 for correcting the astigmatism of the beam generating system. The cylindrical lens consists of two permanent magnets 5, 6 radially arranged on a rotatable disc 4 in threaded engagement with the anode. The magnets are positioned on mounting members 10, 11 which slide in radial slots in the disc 4 and are biased outwardly by springs 7, 8. A ring 9 forces the magnets towards each other when moved upwardly. In another embodiment two pairs of magnets are mounted on separate discs which can be rotated separately or together. In a further embodiment suitable in an apparatus for working e.g. drilling, milling or welding material with a high intensity beam of charged particles, the lens comprises 8 radial electromagnets 22, Fig. 5, which may be separately adjusted electrically and which are carried by a rotatable disc 21 in threaded engagement with the anode 20. The coils and pole pieces are potted in resin. A second cylindrical lens may be provided to correct astigmatism in a second direction, or the cathode may be of wire having a semi-cylindrical profile so that an approximately spherical point may be formed at the end of the hairpin. A mounting guide may be provided for fixing the azimuth of the cathode. The control. electrode bias may be pulsed to produce a pulsed beam.
GB29387/59A 1958-09-06 1959-08-27 Beam generating system for producing a high intensity beam of charged particles Expired GB854277A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEZ6840A DE1133838B (en) 1958-09-06 1958-09-06 Beam source for generating a high-intensity electron beam

Publications (1)

Publication Number Publication Date
GB854277A true GB854277A (en) 1960-11-16

Family

ID=7619912

Family Applications (1)

Application Number Title Priority Date Filing Date
GB29387/59A Expired GB854277A (en) 1958-09-06 1959-08-27 Beam generating system for producing a high intensity beam of charged particles

Country Status (6)

Country Link
US (1) US3071707A (en)
CH (1) CH373488A (en)
DE (1) DE1133838B (en)
FR (1) FR1233328A (en)
GB (1) GB854277A (en)
NL (1) NL242894A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1215820B (en) * 1962-08-31 1966-05-05 Telefunken Patent Cathode ray tube with a multi-electrode beam generation system
DE1216455B (en) * 1964-03-25 1966-05-12 Siemens Ag Method for aligning the field axis of an electron-optical lens, in particular in a stigmator assigned to an electron microscope, and arrangement for carrying out the method
US3504211A (en) * 1965-05-12 1970-03-31 Hitachi Ltd Electron beam control device for use with a cathode ray tube for dynamic correction of electron beam astigmatism and defocusing
DE3123301C2 (en) * 1981-06-12 1985-08-08 Standard Elektrik Lorenz Ag, 7000 Stuttgart Device for adjusting electron beams from a cathode ray tube
US11483919B2 (en) * 2019-03-27 2022-10-25 Huazhong University Of Science And Technology System of electron irradiation

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1981245A (en) * 1924-02-20 1934-11-20 Westinghouse Electric & Mfg Co Space-current device
US2111231A (en) * 1934-06-27 1938-03-15 Radio Patents Corp Recording device
US2157182A (en) * 1935-12-31 1939-05-09 Rca Corp Cathode ray deflecting device
US2165803A (en) * 1936-04-25 1939-07-11 Rca Corp Cathode ray deflecting device
DE891119C (en) * 1940-07-09 1953-09-24 Telefunken Gmbh Magnetic electron lens
DE895481C (en) * 1941-08-20 1953-11-02 Siemens Reiniger Werke Ag Electromagnetic cylinder lens
GB564546A (en) * 1942-11-02 1944-10-03 Gerhard Liebmann Improvements in or relating to cathode ray tubes
US2369782A (en) * 1943-04-01 1945-02-20 Rca Corp Electron lens system
US2498354A (en) * 1946-12-03 1950-02-21 Philco Corp Magnetic lens system
DE857245C (en) * 1948-10-01 1952-11-27 Sueddeutsche Lab G M B H Beam generation system for electron beam devices
DE855287C (en) * 1948-10-02 1952-11-10 Sueddeutsche Lab G M B H Lenses and lens systems for electron optical imaging
DE942518C (en) * 1948-10-02 1956-05-03 Zeiss Carl Fa Device for compensating the symmetry errors of electron lenses
US2591159A (en) * 1950-05-29 1952-04-01 Gilfillan Bros Inc Magnetic means for producing compensations and other effects in a cathode-ray tube
US2714678A (en) * 1950-09-03 1955-08-02 Siemens Ag Electron microscopes
US2634381A (en) * 1951-03-26 1953-04-07 Zenith Radio Corp Cathode-ray tube beam-positioning device
NL194113A (en) * 1954-01-22
NL100357C (en) * 1955-10-04
US2883569A (en) * 1956-01-24 1959-04-21 Herman F Kaiser Magnetic quadrupole focusing system

Also Published As

Publication number Publication date
NL242894A (en)
DE1133838B (en) 1962-07-26
CH373488A (en) 1963-11-30
US3071707A (en) 1963-01-01
FR1233328A (en) 1960-10-12

Similar Documents

Publication Publication Date Title
US2416687A (en) Magnetic focussing device
US2433682A (en) Electron focusing apparatus
GB698005A (en) Improvements in or relating to electron discharge devices
GB854277A (en) Beam generating system for producing a high intensity beam of charged particles
US3028491A (en) Apparatus for producing and shaping a beam of charged particles
GB1058388A (en) Adjustable magnets
ES438667A1 (en) Method and system for automatically correcting aberrations of a beam of charged particles
US3201631A (en) Short focus lens at focal point of long focus lens
GB1012040A (en) Apparatus for producing a narrow high-intensity beam of charged particles
US3021445A (en) Electron lens
GB1355252A (en) Electron lenses of the magnetic field type
GB720776A (en) Improvements relating to magnetic focusing devices for electron beams
JPS55143761A (en) Focus magnet
GB691156A (en) Improvements in or relating to corpuscular ray apparatus
GB908590A (en) Charged particle gun
GB834540A (en) Improvements relating to the irradiation of substances by electronic bombardment
US2330628A (en) Magnetic lenses for electronoptical apparatus
GB872579A (en) Improvements relating to electron gun assemblies
GB699739A (en) Improvements relating to cathode ray tubes
GB885251A (en) Improvements in permanent magnet systems
GB792020A (en) Improvements in or relating to the magnetic focusing of electron beams
GB1006389A (en) Improvements in or relating to electron optical systems
GB943485A (en) Apparatus and method for generating brillouin electron flow
GB1135249A (en) Improvements relating to multiple magnetic lenses
SU1109031A1 (en) Multipole lens