CH373488A - Beam source for generating a high-intensity charge carrier beam - Google Patents

Beam source for generating a high-intensity charge carrier beam

Info

Publication number
CH373488A
CH373488A CH7687259A CH7687259A CH373488A CH 373488 A CH373488 A CH 373488A CH 7687259 A CH7687259 A CH 7687259A CH 7687259 A CH7687259 A CH 7687259A CH 373488 A CH373488 A CH 373488A
Authority
CH
Switzerland
Prior art keywords
generating
charge carrier
intensity charge
beam source
intensity
Prior art date
Application number
CH7687259A
Other languages
German (de)
Inventor
Fritz Dipl Ing Schleich
Original Assignee
Zeiss Carl Fa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Carl Fa filed Critical Zeiss Carl Fa
Publication of CH373488A publication Critical patent/CH373488A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Particle Accelerators (AREA)
CH7687259A 1958-09-06 1959-08-12 Beam source for generating a high-intensity charge carrier beam CH373488A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEZ6840A DE1133838B (en) 1958-09-06 1958-09-06 Beam source for generating a high-intensity electron beam

Publications (1)

Publication Number Publication Date
CH373488A true CH373488A (en) 1963-11-30

Family

ID=7619912

Family Applications (1)

Application Number Title Priority Date Filing Date
CH7687259A CH373488A (en) 1958-09-06 1959-08-12 Beam source for generating a high-intensity charge carrier beam

Country Status (6)

Country Link
US (1) US3071707A (en)
CH (1) CH373488A (en)
DE (1) DE1133838B (en)
FR (1) FR1233328A (en)
GB (1) GB854277A (en)
NL (1) NL242894A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1215820B (en) * 1962-08-31 1966-05-05 Telefunken Patent Cathode ray tube with a multi-electrode beam generation system
DE1216455B (en) * 1964-03-25 1966-05-12 Siemens Ag Method for aligning the field axis of an electron-optical lens, in particular in a stigmator assigned to an electron microscope, and arrangement for carrying out the method
US3504211A (en) * 1965-05-12 1970-03-31 Hitachi Ltd Electron beam control device for use with a cathode ray tube for dynamic correction of electron beam astigmatism and defocusing
DE3123301C2 (en) * 1981-06-12 1985-08-08 Standard Elektrik Lorenz Ag, 7000 Stuttgart Device for adjusting electron beams from a cathode ray tube
US11483919B2 (en) * 2019-03-27 2022-10-25 Huazhong University Of Science And Technology System of electron irradiation

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1981245A (en) * 1924-02-20 1934-11-20 Westinghouse Electric & Mfg Co Space-current device
US2111231A (en) * 1934-06-27 1938-03-15 Radio Patents Corp Recording device
US2157182A (en) * 1935-12-31 1939-05-09 Rca Corp Cathode ray deflecting device
US2165803A (en) * 1936-04-25 1939-07-11 Rca Corp Cathode ray deflecting device
DE891119C (en) * 1940-07-09 1953-09-24 Telefunken Gmbh Magnetic electron lens
DE895481C (en) * 1941-08-20 1953-11-02 Siemens Reiniger Werke Ag Electromagnetic cylinder lens
GB564546A (en) * 1942-11-02 1944-10-03 Gerhard Liebmann Improvements in or relating to cathode ray tubes
US2369782A (en) * 1943-04-01 1945-02-20 Rca Corp Electron lens system
US2498354A (en) * 1946-12-03 1950-02-21 Philco Corp Magnetic lens system
DE857245C (en) * 1948-10-01 1952-11-27 Sueddeutsche Lab G M B H Beam generation system for electron beam devices
DE942518C (en) * 1948-10-02 1956-05-03 Zeiss Carl Fa Device for compensating the symmetry errors of electron lenses
DE855287C (en) * 1948-10-02 1952-11-10 Sueddeutsche Lab G M B H Lenses and lens systems for electron optical imaging
US2591159A (en) * 1950-05-29 1952-04-01 Gilfillan Bros Inc Magnetic means for producing compensations and other effects in a cathode-ray tube
US2714678A (en) * 1950-09-03 1955-08-02 Siemens Ag Electron microscopes
US2634381A (en) * 1951-03-26 1953-04-07 Zenith Radio Corp Cathode-ray tube beam-positioning device
NL194113A (en) * 1954-01-22
BE551462A (en) * 1955-10-04
US2883569A (en) * 1956-01-24 1959-04-21 Herman F Kaiser Magnetic quadrupole focusing system

Also Published As

Publication number Publication date
NL242894A (en)
GB854277A (en) 1960-11-16
DE1133838B (en) 1962-07-26
US3071707A (en) 1963-01-01
FR1233328A (en) 1960-10-12

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