GB2552793A - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
GB2552793A
GB2552793A GB1613576.6A GB201613576A GB2552793A GB 2552793 A GB2552793 A GB 2552793A GB 201613576 A GB201613576 A GB 201613576A GB 2552793 A GB2552793 A GB 2552793A
Authority
GB
United Kingdom
Prior art keywords
stator
turbo
components
housing
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB1613576.6A
Other languages
English (en)
Inventor
Milner Paul
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=59631794&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=GB2552793(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1613576.6A priority Critical patent/GB2552793A/en
Priority to EP17752422.0A priority patent/EP3497337B1/en
Priority to US16/323,905 priority patent/US10844864B2/en
Priority to JP2019507281A priority patent/JP7116723B2/ja
Priority to PCT/GB2017/052244 priority patent/WO2018029446A1/en
Priority to CN201780062265.6A priority patent/CN109790845B/zh
Publication of GB2552793A publication Critical patent/GB2552793A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GB1613576.6A 2016-08-08 2016-08-08 Vacuum pump Withdrawn GB2552793A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB1613576.6A GB2552793A (en) 2016-08-08 2016-08-08 Vacuum pump
EP17752422.0A EP3497337B1 (en) 2016-08-08 2017-08-02 Vacuum pump
US16/323,905 US10844864B2 (en) 2016-08-08 2017-08-02 Vacuum pump
JP2019507281A JP7116723B2 (ja) 2016-08-08 2017-08-02 真空ポンプ
PCT/GB2017/052244 WO2018029446A1 (en) 2016-08-08 2017-08-02 Vacuum pump
CN201780062265.6A CN109790845B (zh) 2016-08-08 2017-08-02 真空泵

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1613576.6A GB2552793A (en) 2016-08-08 2016-08-08 Vacuum pump

Publications (1)

Publication Number Publication Date
GB2552793A true GB2552793A (en) 2018-02-14

Family

ID=59631794

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1613576.6A Withdrawn GB2552793A (en) 2016-08-08 2016-08-08 Vacuum pump

Country Status (6)

Country Link
US (1) US10844864B2 (enExample)
EP (1) EP3497337B1 (enExample)
JP (1) JP7116723B2 (enExample)
CN (1) CN109790845B (enExample)
GB (1) GB2552793A (enExample)
WO (1) WO2018029446A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021173257A (ja) * 2020-04-28 2021-11-01 株式会社島津製作所 ターボ分子ポンプおよびターボ分子ポンプのステータ

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0568069A2 (en) * 1992-04-29 1993-11-03 Varian Associates, Inc. Turbomolecular vacuum pumps
EP0703368A2 (en) * 1994-09-20 1996-03-27 Hitachi, Ltd. Fluidal machine
EP0965761A2 (en) * 1998-06-17 1999-12-22 Seiko Seiki Kabushiki Kaisha Turbo molecular pump
DE19937393A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Statorring für eine Turbomolekularvakuumpumpe
US20110064562A1 (en) * 2008-02-15 2011-03-17 Shimadzu Corporation Turbomolecular Pump

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3722164C2 (de) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolekularpumpe
DE3891263T1 (de) 1988-02-26 1990-03-15 Nikolaj Michailovic Novikov Turbomolekular-vakuumpumpe
CN1037195A (zh) 1988-04-29 1989-11-15 瓦拉里·波里斯维奇·肖鲁克夫 分子真空泵
CN1039088A (zh) 1988-07-02 1990-01-24 尼古拉·米哈洛维奇·诺维考夫 涡轮分子真空泵
DE9013672U1 (de) 1990-09-29 1992-01-30 Leybold AG, 6450 Hanau Stator für eine Turbomolekularvakuumpumpe
JP3672630B2 (ja) 1995-07-21 2005-07-20 株式会社大阪真空機器製作所 分子ポンプ
JP3359866B2 (ja) * 1997-06-27 2002-12-24 株式会社荏原製作所 ターボ分子ポンプ
US6926493B1 (en) 1997-06-27 2005-08-09 Ebara Corporation Turbo-molecular pump
US6332752B2 (en) 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
JP3399800B2 (ja) 1997-09-24 2003-04-21 イビデン株式会社 モータ及びターボ分子ポンプ
DE10010371A1 (de) 2000-03-02 2001-09-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10022062A1 (de) 2000-05-06 2001-11-08 Leybold Vakuum Gmbh Maschine, vorzugsweise Vakuumpumpe, mit Magnetlagern
FR2850714B1 (fr) 2003-02-03 2005-04-29 Cit Alcatel Pompe turbomoleculaire a entretoises multietagees de stator
JP4676731B2 (ja) 2004-09-10 2011-04-27 エドワーズ株式会社 ターボ分子ポンプ固定翼及び真空ポンプ
JP2006152958A (ja) 2004-11-30 2006-06-15 Shimadzu Corp ターボ分子ポンプ
WO2007004542A1 (ja) 2005-07-01 2007-01-11 Boc Edwards Japan Limited ターボ分子ポンプ
JP5274447B2 (ja) 2006-04-29 2013-08-28 エーリコン ライボルト ヴァキューム ゲゼルシャフト ミット ベシュレンクテル ハフツング ターボ分子ポンプのローター又はステーターの製造方法
JP4853266B2 (ja) 2006-12-12 2012-01-11 株式会社島津製作所 ターボ分子ポンプ
US20090068008A1 (en) 2007-09-07 2009-03-12 Shimadzu Corporation Fastening structure and rotary vacuum pump
DE102007051988A1 (de) 2007-10-31 2009-05-07 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
JP5767644B2 (ja) 2010-09-28 2015-08-19 エドワーズ株式会社 排気ポンプ
CN103261698B (zh) 2010-12-17 2016-02-10 株式会社岛津制作所 真空泵
DE202011109517U1 (de) 2011-12-23 2013-03-25 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
JP6206002B2 (ja) 2013-08-30 2017-10-04 株式会社島津製作所 ターボ分子ポンプ
JP2015059426A (ja) 2013-09-17 2015-03-30 エドワーズ株式会社 真空ポンプの固定部品
DE102013220879A1 (de) 2013-10-15 2015-04-16 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0568069A2 (en) * 1992-04-29 1993-11-03 Varian Associates, Inc. Turbomolecular vacuum pumps
EP0703368A2 (en) * 1994-09-20 1996-03-27 Hitachi, Ltd. Fluidal machine
EP0965761A2 (en) * 1998-06-17 1999-12-22 Seiko Seiki Kabushiki Kaisha Turbo molecular pump
DE19937393A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Statorring für eine Turbomolekularvakuumpumpe
US20110064562A1 (en) * 2008-02-15 2011-03-17 Shimadzu Corporation Turbomolecular Pump

Also Published As

Publication number Publication date
US20190170146A1 (en) 2019-06-06
EP3497337A1 (en) 2019-06-19
CN109790845A (zh) 2019-05-21
EP3497337B1 (en) 2022-11-23
CN109790845B (zh) 2021-10-12
WO2018029446A1 (en) 2018-02-15
US10844864B2 (en) 2020-11-24
JP7116723B2 (ja) 2022-08-10
JP2019525067A (ja) 2019-09-05

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)