JP7116723B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP7116723B2
JP7116723B2 JP2019507281A JP2019507281A JP7116723B2 JP 7116723 B2 JP7116723 B2 JP 7116723B2 JP 2019507281 A JP2019507281 A JP 2019507281A JP 2019507281 A JP2019507281 A JP 2019507281A JP 7116723 B2 JP7116723 B2 JP 7116723B2
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JP
Japan
Prior art keywords
spacer
stator
vacuum pump
compressed
turbomolecular vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019507281A
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English (en)
Japanese (ja)
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JP2019525067A5 (enExample
JP2019525067A (ja
Inventor
ポール ミルナー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=59631794&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP7116723(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of JP2019525067A publication Critical patent/JP2019525067A/ja
Publication of JP2019525067A5 publication Critical patent/JP2019525067A5/ja
Application granted granted Critical
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2019507281A 2016-08-08 2017-08-02 真空ポンプ Active JP7116723B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1613576.6A GB2552793A (en) 2016-08-08 2016-08-08 Vacuum pump
GB1613576.6 2016-08-08
PCT/GB2017/052244 WO2018029446A1 (en) 2016-08-08 2017-08-02 Vacuum pump

Publications (3)

Publication Number Publication Date
JP2019525067A JP2019525067A (ja) 2019-09-05
JP2019525067A5 JP2019525067A5 (enExample) 2020-09-03
JP7116723B2 true JP7116723B2 (ja) 2022-08-10

Family

ID=59631794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019507281A Active JP7116723B2 (ja) 2016-08-08 2017-08-02 真空ポンプ

Country Status (6)

Country Link
US (1) US10844864B2 (enExample)
EP (1) EP3497337B1 (enExample)
JP (1) JP7116723B2 (enExample)
CN (1) CN109790845B (enExample)
GB (1) GB2552793A (enExample)
WO (1) WO2018029446A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021173257A (ja) * 2020-04-28 2021-11-01 株式会社島津製作所 ターボ分子ポンプおよびターボ分子ポンプのステータ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040156715A1 (en) 2003-02-03 2004-08-12 Alcatel Turbomolecular pump having multistage stator spacers

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3722164C2 (de) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolekularpumpe
DE3891263T1 (de) 1988-02-26 1990-03-15 Nikolaj Michailovic Novikov Turbomolekular-vakuumpumpe
CN1037195A (zh) 1988-04-29 1989-11-15 瓦拉里·波里斯维奇·肖鲁克夫 分子真空泵
CN1039088A (zh) 1988-07-02 1990-01-24 尼古拉·米哈洛维奇·诺维考夫 涡轮分子真空泵
DE9013672U1 (de) 1990-09-29 1992-01-30 Leybold AG, 6450 Hanau Stator für eine Turbomolekularvakuumpumpe
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
JP3299638B2 (ja) * 1994-09-20 2002-07-08 株式会社日立製作所 ターボ流体機械
JP3672630B2 (ja) 1995-07-21 2005-07-20 株式会社大阪真空機器製作所 分子ポンプ
JP3359866B2 (ja) * 1997-06-27 2002-12-24 株式会社荏原製作所 ターボ分子ポンプ
US6926493B1 (en) 1997-06-27 2005-08-09 Ebara Corporation Turbo-molecular pump
US6332752B2 (en) 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
JP3399800B2 (ja) 1997-09-24 2003-04-21 イビデン株式会社 モータ及びターボ分子ポンプ
JP3092063B2 (ja) * 1998-06-17 2000-09-25 セイコー精機株式会社 ターボ分子ポンプ
DE19937393A1 (de) 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Statorring für eine Turbomolekularvakuumpumpe
DE10010371A1 (de) 2000-03-02 2001-09-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10022062A1 (de) 2000-05-06 2001-11-08 Leybold Vakuum Gmbh Maschine, vorzugsweise Vakuumpumpe, mit Magnetlagern
JP4676731B2 (ja) 2004-09-10 2011-04-27 エドワーズ株式会社 ターボ分子ポンプ固定翼及び真空ポンプ
JP2006152958A (ja) 2004-11-30 2006-06-15 Shimadzu Corp ターボ分子ポンプ
WO2007004542A1 (ja) 2005-07-01 2007-01-11 Boc Edwards Japan Limited ターボ分子ポンプ
JP5274447B2 (ja) 2006-04-29 2013-08-28 エーリコン ライボルト ヴァキューム ゲゼルシャフト ミット ベシュレンクテル ハフツング ターボ分子ポンプのローター又はステーターの製造方法
JP4853266B2 (ja) 2006-12-12 2012-01-11 株式会社島津製作所 ターボ分子ポンプ
US20090068008A1 (en) 2007-09-07 2009-03-12 Shimadzu Corporation Fastening structure and rotary vacuum pump
DE102007051988A1 (de) 2007-10-31 2009-05-07 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
CN102007298B (zh) * 2008-02-15 2014-04-30 株式会社岛津制作所 涡轮分子泵
JP5767644B2 (ja) 2010-09-28 2015-08-19 エドワーズ株式会社 排気ポンプ
CN103261698B (zh) 2010-12-17 2016-02-10 株式会社岛津制作所 真空泵
DE202011109517U1 (de) 2011-12-23 2013-03-25 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
JP6206002B2 (ja) 2013-08-30 2017-10-04 株式会社島津製作所 ターボ分子ポンプ
JP2015059426A (ja) 2013-09-17 2015-03-30 エドワーズ株式会社 真空ポンプの固定部品
DE102013220879A1 (de) 2013-10-15 2015-04-16 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040156715A1 (en) 2003-02-03 2004-08-12 Alcatel Turbomolecular pump having multistage stator spacers

Also Published As

Publication number Publication date
US20190170146A1 (en) 2019-06-06
EP3497337A1 (en) 2019-06-19
CN109790845A (zh) 2019-05-21
EP3497337B1 (en) 2022-11-23
CN109790845B (zh) 2021-10-12
GB2552793A (en) 2018-02-14
WO2018029446A1 (en) 2018-02-15
US10844864B2 (en) 2020-11-24
JP2019525067A (ja) 2019-09-05

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