CN109790845B - 真空泵 - Google Patents

真空泵 Download PDF

Info

Publication number
CN109790845B
CN109790845B CN201780062265.6A CN201780062265A CN109790845B CN 109790845 B CN109790845 B CN 109790845B CN 201780062265 A CN201780062265 A CN 201780062265A CN 109790845 B CN109790845 B CN 109790845B
Authority
CN
China
Prior art keywords
stator
spacers
components
housing
spacer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201780062265.6A
Other languages
English (en)
Chinese (zh)
Other versions
CN109790845A (zh
Inventor
P.米尔纳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=59631794&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=CN109790845(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of CN109790845A publication Critical patent/CN109790845A/zh
Application granted granted Critical
Publication of CN109790845B publication Critical patent/CN109790845B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
CN201780062265.6A 2016-08-08 2017-08-02 真空泵 Active CN109790845B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1613576.6A GB2552793A (en) 2016-08-08 2016-08-08 Vacuum pump
GB1613576.6 2016-08-08
PCT/GB2017/052244 WO2018029446A1 (en) 2016-08-08 2017-08-02 Vacuum pump

Publications (2)

Publication Number Publication Date
CN109790845A CN109790845A (zh) 2019-05-21
CN109790845B true CN109790845B (zh) 2021-10-12

Family

ID=59631794

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780062265.6A Active CN109790845B (zh) 2016-08-08 2017-08-02 真空泵

Country Status (6)

Country Link
US (1) US10844864B2 (enExample)
EP (1) EP3497337B1 (enExample)
JP (1) JP7116723B2 (enExample)
CN (1) CN109790845B (enExample)
GB (1) GB2552793A (enExample)
WO (1) WO2018029446A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021173257A (ja) * 2020-04-28 2021-11-01 株式会社島津製作所 ターボ分子ポンプおよびターボ分子ポンプのステータ

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1037195A (zh) * 1988-04-29 1989-11-15 瓦拉里·波里斯维奇·肖鲁克夫 分子真空泵
CN1039088A (zh) * 1988-07-02 1990-01-24 尼古拉·米哈洛维奇·诺维考夫 涡轮分子真空泵
EP0887556A1 (en) * 1997-06-27 1998-12-30 Ebara Corporation Turbo-molecular pump
JP3399800B2 (ja) * 1997-09-24 2003-04-21 イビデン株式会社 モータ及びターボ分子ポンプ
CN101432525A (zh) * 2006-04-29 2009-05-13 欧瑞康莱宝真空公司 涡轮分子泵的转子或定子
CN101842597A (zh) * 2007-10-31 2010-09-22 厄利孔莱博尔德真空技术有限责任公司 涡轮分子泵
CN102918278A (zh) * 2010-09-28 2013-02-06 埃地沃兹日本有限公司 排气泵
CN103261698A (zh) * 2010-12-17 2013-08-21 株式会社岛津制作所 真空泵
CN104421171A (zh) * 2013-08-30 2015-03-18 株式会社岛津制作所 涡轮分子泵
CN105579711A (zh) * 2013-09-17 2016-05-11 埃地沃兹日本有限公司 真空泵的固定部件

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3722164C2 (de) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolekularpumpe
DE3891263T1 (de) 1988-02-26 1990-03-15 Nikolaj Michailovic Novikov Turbomolekular-vakuumpumpe
DE9013672U1 (de) 1990-09-29 1992-01-30 Leybold AG, 6450 Hanau Stator für eine Turbomolekularvakuumpumpe
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
JP3299638B2 (ja) * 1994-09-20 2002-07-08 株式会社日立製作所 ターボ流体機械
JP3672630B2 (ja) 1995-07-21 2005-07-20 株式会社大阪真空機器製作所 分子ポンプ
JP3359866B2 (ja) * 1997-06-27 2002-12-24 株式会社荏原製作所 ターボ分子ポンプ
US6926493B1 (en) 1997-06-27 2005-08-09 Ebara Corporation Turbo-molecular pump
JP3092063B2 (ja) * 1998-06-17 2000-09-25 セイコー精機株式会社 ターボ分子ポンプ
DE19937393A1 (de) 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Statorring für eine Turbomolekularvakuumpumpe
DE10010371A1 (de) 2000-03-02 2001-09-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10022062A1 (de) 2000-05-06 2001-11-08 Leybold Vakuum Gmbh Maschine, vorzugsweise Vakuumpumpe, mit Magnetlagern
FR2850714B1 (fr) 2003-02-03 2005-04-29 Cit Alcatel Pompe turbomoleculaire a entretoises multietagees de stator
JP4676731B2 (ja) 2004-09-10 2011-04-27 エドワーズ株式会社 ターボ分子ポンプ固定翼及び真空ポンプ
JP2006152958A (ja) 2004-11-30 2006-06-15 Shimadzu Corp ターボ分子ポンプ
WO2007004542A1 (ja) 2005-07-01 2007-01-11 Boc Edwards Japan Limited ターボ分子ポンプ
JP4853266B2 (ja) 2006-12-12 2012-01-11 株式会社島津製作所 ターボ分子ポンプ
US20090068008A1 (en) 2007-09-07 2009-03-12 Shimadzu Corporation Fastening structure and rotary vacuum pump
CN102007298B (zh) * 2008-02-15 2014-04-30 株式会社岛津制作所 涡轮分子泵
DE202011109517U1 (de) 2011-12-23 2013-03-25 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102013220879A1 (de) 2013-10-15 2015-04-16 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1037195A (zh) * 1988-04-29 1989-11-15 瓦拉里·波里斯维奇·肖鲁克夫 分子真空泵
CN1039088A (zh) * 1988-07-02 1990-01-24 尼古拉·米哈洛维奇·诺维考夫 涡轮分子真空泵
EP0887556A1 (en) * 1997-06-27 1998-12-30 Ebara Corporation Turbo-molecular pump
JP3399800B2 (ja) * 1997-09-24 2003-04-21 イビデン株式会社 モータ及びターボ分子ポンプ
CN101432525A (zh) * 2006-04-29 2009-05-13 欧瑞康莱宝真空公司 涡轮分子泵的转子或定子
CN101842597A (zh) * 2007-10-31 2010-09-22 厄利孔莱博尔德真空技术有限责任公司 涡轮分子泵
CN102918278A (zh) * 2010-09-28 2013-02-06 埃地沃兹日本有限公司 排气泵
CN103261698A (zh) * 2010-12-17 2013-08-21 株式会社岛津制作所 真空泵
CN104421171A (zh) * 2013-08-30 2015-03-18 株式会社岛津制作所 涡轮分子泵
CN105579711A (zh) * 2013-09-17 2016-05-11 埃地沃兹日本有限公司 真空泵的固定部件

Also Published As

Publication number Publication date
US20190170146A1 (en) 2019-06-06
EP3497337A1 (en) 2019-06-19
CN109790845A (zh) 2019-05-21
EP3497337B1 (en) 2022-11-23
GB2552793A (en) 2018-02-14
WO2018029446A1 (en) 2018-02-15
US10844864B2 (en) 2020-11-24
JP7116723B2 (ja) 2022-08-10
JP2019525067A (ja) 2019-09-05

Similar Documents

Publication Publication Date Title
EP2064449B1 (en) Molecular drag pumping mechanism
EP2410184B1 (en) Vibration damper for vacuum pumps
US8109744B2 (en) Turbo vacuum pump
CN108699961B (zh) 增压器
CN110431310B (zh) 用于涡轮机的驱动轴的支承结构及包括这种支承结构的涡轮机
WO2018041949A1 (en) Axial bearing arrangement for a drive shaft of a centrifugal compressor
CN100453817C (zh) 多级摩擦真空泵
JP5560263B2 (ja) 多段真空ポンプ
WO2016193002A1 (en) A centrifugal refrigeration compressor
CN109790845B (zh) 真空泵
US8221052B2 (en) Turbo-molecular pump
CN110023626B (zh) 涡旋压缩机及其制造方法
KR20230014711A (ko) 압축기 구동 샤프트 어셈블리 및 이를 포함하는 압축기
JP5047026B2 (ja) ターボ型真空ポンプ
CN107044430B (zh) 真空泵及被用于其中的转子及定子
JP5344849B2 (ja) ターボ型真空ポンプ
US20220170471A1 (en) Vacuum Pump with Elastic Spacer
JP2025514477A (ja) ターボ分子真空ポンプ及びその組み立て方法
WO2020039006A1 (en) A turbo compressor having a flexible contact area between a bearing sleeve and a fixed compressor part
US20250233495A1 (en) Electric axial flux machine with pretensioned stator components, and electric machine assembly comprising such an electric axial flux machine
CN113518864B (zh) 真空泵及用于真空泵的密封部件
CN117062987A (zh) 带有堆叠式叶轮的涡轮机转子和涡轮机
JP2019525067A5 (enExample)
GB2623527A (en) Turbomolecular pump
JP2009257213A (ja) ターボ型真空ポンプ

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant