GB1474745A - Nonvolatile semiconductor memory - Google Patents

Nonvolatile semiconductor memory

Info

Publication number
GB1474745A
GB1474745A GB3924474A GB3924474A GB1474745A GB 1474745 A GB1474745 A GB 1474745A GB 3924474 A GB3924474 A GB 3924474A GB 3924474 A GB3924474 A GB 3924474A GB 1474745 A GB1474745 A GB 1474745A
Authority
GB
United Kingdom
Prior art keywords
source
drain
region
substrate
depletion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3924474A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Publication of GB1474745A publication Critical patent/GB1474745A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/792—Field effect transistors with field effect produced by an insulated gate with charge trapping gate insulator, e.g. MNOS-memory transistors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C16/00—Erasable programmable read-only memories
    • G11C16/02—Erasable programmable read-only memories electrically programmable
    • G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0466—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells with charge storage in an insulating layer, e.g. metal-nitride-oxide-silicon [MNOS], silicon-oxide-nitride-oxide-silicon [SONOS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)

Abstract

1474745 Semiconductor memory elements TOKYO SHIBAURA ELECTRIC CO Ltd 9 Sept 1974 [21 Sept 1973] 39244/74 Heading H1K A non-volatile memory IGFET, e.g. of the MNOS type, in which information, represented by charge trapped in the gate insulation, is written in by reverse biasing the source and drain regions relative to the gate and substrate to cause surface avalanching beneath the gate insulation thereby generating charge carriers which then tunnel to the trapping sites therein, is so designed that, during writing, the region in which avalanching occurs can be completely isolated from the material of the substrate by a depletion region. In one embodiment the drain region forms part of a rectangular frame region closely surrounding the source region so that below the surface the depletion regions of source and drain overlap to provide the isolation. In the other the source and drain regions 22a, 23a, (Fig. 8) are elongated and the central gated area 43 bounded on opposite sides by the interconnected pair of gates 44 which are so biased during writing as to create depletion regions blocking any surface path to the substrate, with the source and drain depletion regions overlapping as in the first embodiment.
GB3924474A 1973-09-21 1974-09-09 Nonvolatile semiconductor memory Expired GB1474745A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10679373A JPS5613029B2 (en) 1973-09-21 1973-09-21

Publications (1)

Publication Number Publication Date
GB1474745A true GB1474745A (en) 1977-05-25

Family

ID=14442758

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3924474A Expired GB1474745A (en) 1973-09-21 1974-09-09 Nonvolatile semiconductor memory

Country Status (4)

Country Link
JP (1) JPS5613029B2 (en)
CA (1) CA1060993A (en)
DE (1) DE2444906C3 (en)
GB (1) GB1474745A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5458376A (en) * 1977-10-19 1979-05-11 Agency Of Ind Science & Technol Semiconductor memory unit and its writing method
US4375087C1 (en) * 1980-04-09 2002-01-01 Hughes Aircraft Co Electrically erasable programmable read-only memory

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1175601A (en) * 1966-03-28 1969-12-23 Matsushita Electronics Corp Insulated-Gate Field-Effect Transistor
DE2201028C3 (en) * 1971-01-15 1981-07-09 Intel Corp., Mountain View, Calif. Method for operating a field effect transistor and field effect transistor for carrying out this method

Also Published As

Publication number Publication date
JPS5613029B2 (en) 1981-03-25
DE2444906A1 (en) 1975-04-24
DE2444906C3 (en) 1982-02-04
CA1060993A (en) 1979-08-21
DE2444906B2 (en) 1981-05-27
JPS5057779A (en) 1975-05-20

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Legal Events

Date Code Title Description
PS Patent sealed
746 Register noted 'licences of right' (sect. 46/1977)
PCNP Patent ceased through non-payment of renewal fee