GB1445963A - Ion beam apparatus - Google Patents

Ion beam apparatus

Info

Publication number
GB1445963A
GB1445963A GB1137075A GB1137075A GB1445963A GB 1445963 A GB1445963 A GB 1445963A GB 1137075 A GB1137075 A GB 1137075A GB 1137075 A GB1137075 A GB 1137075A GB 1445963 A GB1445963 A GB 1445963A
Authority
GB
United Kingdom
Prior art keywords
ion
ions
mass
energy
ion beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1137075A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Max Planck Gesellschaft zur Foerderung der Wissenschaften
Original Assignee
Max Planck Gesellschaft zur Foerderung der Wissenschaften
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft zur Foerderung der Wissenschaften filed Critical Max Planck Gesellschaft zur Foerderung der Wissenschaften
Publication of GB1445963A publication Critical patent/GB1445963A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/004—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
GB1137075A 1974-03-25 1975-03-19 Ion beam apparatus Expired GB1445963A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742414221 DE2414221C3 (de) 1974-03-25 1974-03-25 Ionenoptisches Gerät zur Untersuchung der Oberfläche einer Probe durch IonenbeschuB und Analyse der vom beschossenen Oberflächenbereich ausgehenden Ionen

Publications (1)

Publication Number Publication Date
GB1445963A true GB1445963A (en) 1976-08-11

Family

ID=5911045

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1137075A Expired GB1445963A (en) 1974-03-25 1975-03-19 Ion beam apparatus

Country Status (8)

Country Link
JP (1) JPS5199094A (enrdf_load_stackoverflow)
BE (1) BE826966A (enrdf_load_stackoverflow)
DE (1) DE2414221C3 (enrdf_load_stackoverflow)
DK (1) DK144898C (enrdf_load_stackoverflow)
FR (1) FR2266166B3 (enrdf_load_stackoverflow)
GB (1) GB1445963A (enrdf_load_stackoverflow)
IT (1) IT1034386B (enrdf_load_stackoverflow)
NL (1) NL7503567A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1981003395A1 (en) * 1980-05-12 1981-11-26 Univ Trobe Angular resolved spectrometer

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4058724A (en) * 1975-06-27 1977-11-15 Minnesota Mining And Manufacturing Company Ion Scattering spectrometer with two analyzers preferably in tandem
DE2556291C3 (de) * 1975-12-13 1980-11-27 Gesellschaft Fuer Strahlen- Und Umweltforschung Mbh, 8000 Muenchen Raster-Ionenmikroskop
JPH083988B2 (ja) * 1986-10-08 1996-01-17 株式会社日立製作所 二次イオン質量分析方法
JPH0589817A (ja) * 1991-03-16 1993-04-09 Eiko Eng:Kk 複合分析装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1981003395A1 (en) * 1980-05-12 1981-11-26 Univ Trobe Angular resolved spectrometer

Also Published As

Publication number Publication date
IT1034386B (it) 1979-09-10
DE2414221B2 (de) 1978-04-20
FR2266166B3 (enrdf_load_stackoverflow) 1977-12-02
DK144898C (da) 1982-11-22
FR2266166A1 (enrdf_load_stackoverflow) 1975-10-24
DK122675A (enrdf_load_stackoverflow) 1975-09-26
BE826966A (fr) 1975-07-16
NL7503567A (nl) 1975-09-29
DK144898B (da) 1982-06-28
DE2414221A1 (de) 1975-10-09
DE2414221C3 (de) 1979-01-18
JPS5199094A (enrdf_load_stackoverflow) 1976-09-01

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee