JPS6435844A - Mass spectrograph - Google Patents
Mass spectrographInfo
- Publication number
- JPS6435844A JPS6435844A JP62192799A JP19279987A JPS6435844A JP S6435844 A JPS6435844 A JP S6435844A JP 62192799 A JP62192799 A JP 62192799A JP 19279987 A JP19279987 A JP 19279987A JP S6435844 A JPS6435844 A JP S6435844A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- mass spectrometry
- potential
- ions
- orifice
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical group 0.000 abstract 8
- 238000004949 mass spectrometry Methods 0.000 abstract 6
- 230000007935 neutral effect Effects 0.000 abstract 3
- 239000002245 particle Substances 0.000 abstract 3
- 230000005684 electric field Effects 0.000 abstract 2
- 238000004458 analytical method Methods 0.000 abstract 1
- 230000000903 blocking effect Effects 0.000 abstract 1
- 230000008595 infiltration Effects 0.000 abstract 1
- 238000001764 infiltration Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 abstract 1
- 230000035699 permeability Effects 0.000 abstract 1
Landscapes
- Electron Tubes For Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE:To satisfactorily perform the mass spectrometry by providing two types of cylindrical electrodes between an ionization chamber and a sample and using the electrode on the sample side as a secondary ion blocking electrode at the time of the mass spectrometry of neutral particles and using the electrode on the ionization chamber side as an energy filter at the time of the mass spectrometry of secondary ions. CONSTITUTION:At the time of the mass spectrometry of neutral particles, an orifice A is retreated, end the preset potential is applied to an ionization unit I. An electrode 1 is set to the positive potential to prevent the infiltration of positive secondary ions from a sample S for the positive ion measurement. When split electrodes 21, 25 of an electrode 2 are set to 0 potential together with the mesh 5 of an ionization chamber C to shield the electric field of the electrode 1, neutral particles are fed to an analysis unit M with the initial momentum. The orifice A is inserted and the 0-potential ionization unit I is set to 0 potential for the mass spectrometry of secondary ions, secondary ions are fed to the electrode 2, the potential with the opposite polarity to ions is applied to electrodes 21, 22 to act as energy filters. As a result, ions within the limited range reach the orifice A, the permeability is remarkably reduced, the resolution of the mass spectrometry is improved. The electrode 1 becomes an electric field shielding body in this case.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62192799A JPS6435844A (en) | 1987-07-31 | 1987-07-31 | Mass spectrograph |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62192799A JPS6435844A (en) | 1987-07-31 | 1987-07-31 | Mass spectrograph |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6435844A true JPS6435844A (en) | 1989-02-06 |
Family
ID=16297182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62192799A Pending JPS6435844A (en) | 1987-07-31 | 1987-07-31 | Mass spectrograph |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6435844A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03184251A (en) * | 1989-12-12 | 1991-08-12 | Shimadzu Corp | Specimen surface analyzing device |
| JPH0438440A (en) * | 1990-06-02 | 1992-02-07 | Hitachi Ltd | Quantity analysis sample and ion implantation and secondary ion mass spectrometer with ion implantation function |
| US5205447A (en) * | 1991-12-16 | 1993-04-27 | Hambrick Kathleen D | Car telephone cover apparatus |
| JP2015046305A (en) * | 2013-08-28 | 2015-03-12 | 株式会社トヤマ | Neutral particle mass spectrometer |
-
1987
- 1987-07-31 JP JP62192799A patent/JPS6435844A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03184251A (en) * | 1989-12-12 | 1991-08-12 | Shimadzu Corp | Specimen surface analyzing device |
| JPH0438440A (en) * | 1990-06-02 | 1992-02-07 | Hitachi Ltd | Quantity analysis sample and ion implantation and secondary ion mass spectrometer with ion implantation function |
| US5205447A (en) * | 1991-12-16 | 1993-04-27 | Hambrick Kathleen D | Car telephone cover apparatus |
| JP2015046305A (en) * | 2013-08-28 | 2015-03-12 | 株式会社トヤマ | Neutral particle mass spectrometer |
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