GB1436278A - Scanning electron microscopes - Google Patents

Scanning electron microscopes

Info

Publication number
GB1436278A
GB1436278A GB1797674A GB1797674A GB1436278A GB 1436278 A GB1436278 A GB 1436278A GB 1797674 A GB1797674 A GB 1797674A GB 1797674 A GB1797674 A GB 1797674A GB 1436278 A GB1436278 A GB 1436278A
Authority
GB
United Kingdom
Prior art keywords
scanning electron
scintillator
april
parts per
per million
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1797674A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
American Optical Corp
Original Assignee
American Optical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Optical Corp filed Critical American Optical Corp
Publication of GB1436278A publication Critical patent/GB1436278A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/202—Measuring radiation intensity with scintillation detectors the detector being a crystal
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)

Abstract

1436278 Luminescent materials and uses thereof AMERICAN OPTICAL CORP 24 April 1974 [24 April 1973] 17976/74 Heading C4S [Also in Division H1] A scintillator for use as a detector of secondary and reflected electrons in a scanning electron microscope (see Division H1) consists of a high purity silicate glass doped with at least 10 parts per million, and preferably 50 parts per million, of a cerium oxide providing Ce<SP>3+</SP> ions. The scintillator is ground and polished to a hemisphere and secured by a transparent adhesive to the end of a light pipe.
GB1797674A 1973-04-24 1974-04-24 Scanning electron microscopes Expired GB1436278A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00354039A US3842271A (en) 1973-04-24 1973-04-24 Scanning electron microscope

Publications (1)

Publication Number Publication Date
GB1436278A true GB1436278A (en) 1976-05-19

Family

ID=23391641

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1797674A Expired GB1436278A (en) 1973-04-24 1974-04-24 Scanning electron microscopes

Country Status (11)

Country Link
US (1) US3842271A (en)
JP (1) JPS5014273A (en)
AU (1) AU474023B2 (en)
CA (1) CA1006990A (en)
DD (1) DD113660A5 (en)
DE (1) DE2417319A1 (en)
FR (1) FR2227632B1 (en)
GB (1) GB1436278A (en)
IT (1) IT1004276B (en)
NL (1) NL7405307A (en)
SE (1) SE388721B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7902963A (en) * 1979-04-13 1980-10-15 Philips Nv DETECTOR FOR ELECTRON MICROSCOPE.
EP0275306B1 (en) * 1986-08-01 1990-10-24 Electro-Scan Corporation Multipurpose gaseous detector device for electron microscopes
JPH0766766B2 (en) * 1989-03-30 1995-07-19 株式会社日立製作所 electronic microscope
DE69104082T2 (en) * 1990-02-23 1995-03-30 Ibm Multi-detector system for sample analysis using high-energy backscattered electrons.
WO2000079565A1 (en) * 1999-06-22 2000-12-28 Philips Electron Optics B.V. Particle-optical apparatus including a particle source that can be switched between high brightness and large beam current
WO2002061458A1 (en) * 2001-01-31 2002-08-08 Hamamatsu Photonics K. K. Electron beam detector, scanning type electron microscope, mass spectrometer, and ion detector
EP2088614B1 (en) * 2008-02-08 2010-12-15 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Beam current calibration system
US9190241B2 (en) * 2013-03-25 2015-11-17 Hermes-Microvision, Inc. Charged particle beam apparatus
US10236156B2 (en) 2015-03-25 2019-03-19 Hermes Microvision Inc. Apparatus of plural charged-particle beams
US10393887B2 (en) * 2015-07-19 2019-08-27 Afo Research, Inc. Fluorine resistant, radiation resistant, and radiation detection glass systems

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3052637A (en) * 1961-06-05 1962-09-04 Adli M Bishay Glass composition and process of making
US3472997A (en) * 1966-08-26 1969-10-14 Us Navy Secondary electron collection system

Also Published As

Publication number Publication date
FR2227632B1 (en) 1978-03-31
DE2417319A1 (en) 1974-11-07
AU6763374A (en) 1975-10-09
US3842271A (en) 1974-10-15
JPS5014273A (en) 1975-02-14
SE388721B (en) 1976-10-11
DD113660A5 (en) 1975-06-12
CA1006990A (en) 1977-03-15
AU474023B2 (en) 1976-07-08
IT1004276B (en) 1976-07-10
FR2227632A1 (en) 1974-11-22
NL7405307A (en) 1974-10-28

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee