DD113660A5 - - Google Patents
Info
- Publication number
- DD113660A5 DD113660A5 DD178043A DD17804374A DD113660A5 DD 113660 A5 DD113660 A5 DD 113660A5 DD 178043 A DD178043 A DD 178043A DD 17804374 A DD17804374 A DD 17804374A DD 113660 A5 DD113660 A5 DD 113660A5
- Authority
- DD
- German Democratic Republic
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/202—Measuring radiation intensity with scintillation detectors the detector being a crystal
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2443—Scintillation detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2448—Secondary particle detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US00354039A US3842271A (en) | 1973-04-24 | 1973-04-24 | Scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DD113660A5 true DD113660A5 (en) | 1975-06-12 |
Family
ID=23391641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DD178043A DD113660A5 (en) | 1973-04-24 | 1974-04-22 |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US3842271A (en) |
| JP (1) | JPS5014273A (en) |
| AU (1) | AU474023B2 (en) |
| CA (1) | CA1006990A (en) |
| DD (1) | DD113660A5 (en) |
| DE (1) | DE2417319A1 (en) |
| FR (1) | FR2227632B1 (en) |
| GB (1) | GB1436278A (en) |
| IT (1) | IT1004276B (en) |
| NL (1) | NL7405307A (en) |
| SE (1) | SE388721B (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7902963A (en) * | 1979-04-13 | 1980-10-15 | Philips Nv | DETECTOR FOR ELECTRON MICROSCOPE. |
| EP0275306B1 (en) * | 1986-08-01 | 1990-10-24 | Electro-Scan Corporation | Multipurpose gaseous detector device for electron microscopes |
| JPH0766766B2 (en) * | 1989-03-30 | 1995-07-19 | 株式会社日立製作所 | electronic microscope |
| EP0443410B1 (en) * | 1990-02-23 | 1994-09-21 | International Business Machines Corporation | Multiple detector system for specimen inspection using high energy backscatter electrons |
| DE60033767T2 (en) * | 1999-06-22 | 2007-11-15 | Fei Co., Hillsboro | CORPUSCULAR OPTICAL DEVICE WITH A PARTICLE SOURCE SWITCHABLE BETWEEN HIGH BRIGHTNESS AND LARGE RADIATION CURRENT |
| US6861650B2 (en) * | 2001-01-31 | 2005-03-01 | Hamamatsu Photonics K.K. | Electron beam detector, scanning type electron microscope, mass spectrometer, and ion detector |
| DE602008003970D1 (en) * | 2008-02-08 | 2011-01-27 | Integrated Circuit Testing | Strahlstromkalibriersystem |
| US9190241B2 (en) | 2013-03-25 | 2015-11-17 | Hermes-Microvision, Inc. | Charged particle beam apparatus |
| US10236156B2 (en) | 2015-03-25 | 2019-03-19 | Hermes Microvision Inc. | Apparatus of plural charged-particle beams |
| US10393887B2 (en) * | 2015-07-19 | 2019-08-27 | Afo Research, Inc. | Fluorine resistant, radiation resistant, and radiation detection glass systems |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3052637A (en) * | 1961-06-05 | 1962-09-04 | Adli M Bishay | Glass composition and process of making |
| US3472997A (en) * | 1966-08-26 | 1969-10-14 | Us Navy | Secondary electron collection system |
-
1973
- 1973-04-24 US US00354039A patent/US3842271A/en not_active Expired - Lifetime
-
1974
- 1974-04-05 DE DE2417319A patent/DE2417319A1/en not_active Withdrawn
- 1974-04-08 AU AU67633/74A patent/AU474023B2/en not_active Expired
- 1974-04-19 NL NL7405307A patent/NL7405307A/xx not_active Application Discontinuation
- 1974-04-22 FR FR7415642A patent/FR2227632B1/fr not_active Expired
- 1974-04-22 DD DD178043A patent/DD113660A5/xx unknown
- 1974-04-23 JP JP49045152A patent/JPS5014273A/ja active Pending
- 1974-04-23 IT IT50584/74A patent/IT1004276B/en active
- 1974-04-23 CA CA197,992A patent/CA1006990A/en not_active Expired
- 1974-04-23 SE SE7405430A patent/SE388721B/en unknown
- 1974-04-24 GB GB1797674A patent/GB1436278A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5014273A (en) | 1975-02-14 |
| IT1004276B (en) | 1976-07-10 |
| NL7405307A (en) | 1974-10-28 |
| FR2227632B1 (en) | 1978-03-31 |
| CA1006990A (en) | 1977-03-15 |
| AU6763374A (en) | 1975-10-09 |
| US3842271A (en) | 1974-10-15 |
| SE388721B (en) | 1976-10-11 |
| FR2227632A1 (en) | 1974-11-22 |
| GB1436278A (en) | 1976-05-19 |
| DE2417319A1 (en) | 1974-11-07 |
| AU474023B2 (en) | 1976-07-08 |