GB1373718A - Non-crucible zone melting - Google Patents
Non-crucible zone meltingInfo
- Publication number
- GB1373718A GB1373718A GB335972A GB335972A GB1373718A GB 1373718 A GB1373718 A GB 1373718A GB 335972 A GB335972 A GB 335972A GB 335972 A GB335972 A GB 335972A GB 1373718 A GB1373718 A GB 1373718A
- Authority
- GB
- United Kingdom
- Prior art keywords
- rod
- zone
- tangent
- angle
- melting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
- C30B13/30—Stabilisation or shape controlling of the molten zone, e.g. by concentrators, by electromagnetic fields; Controlling the section of the crystal
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
1373718 Retroactive control of zone melting SIEMENS AG 25 Jan 1972 [22 March 1971] 3359/72 Heading G3R A method of non-crucible zone melting a vertically arranged rod of semi-conductor material in which a molten zone 3, 3' is produced in the rod by a heating device I, I surrounding the rod and is caused to move through the length of the rod by relative movement between the device and the rod, includes a television camera (not shown) which produces successive pictures which are scanned by an electron beam to produce electrical pulses Fig.4 (not shown) carrying information about the crosssectional diameter of the part of the rod recrystallized from the molten zone, and also about the angles (α and # or α and γ) formed between at least two tangents to the profile of the molten zone and the vox axis X. Angle α is that of the tangent A at the starting point U of the recrystallization boundary, angle # being that of the tangent # at the melting front V and the angle γ is that of the tangent C at the point of inflection W of the melt zone profile. The information is fed to a digital computer which is used to control the power supply to said heater source and/or the axial internal between the solid parts 1, 2 of the rod and/or an electromagnetic field supporting said molten zone.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2113720A DE2113720C3 (en) | 1971-03-22 | 1971-03-22 | Process for diameter control in crucible-free zone melting of semiconductor rods |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1373718A true GB1373718A (en) | 1974-11-13 |
Family
ID=5802339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB335972A Expired GB1373718A (en) | 1971-03-22 | 1972-01-25 | Non-crucible zone melting |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US3757071A (en) |
| JP (1) | JPS5233042B1 (en) |
| BE (1) | BE781067A (en) |
| CA (1) | CA970255A (en) |
| CH (1) | CH538885A (en) |
| DE (1) | DE2113720C3 (en) |
| DK (1) | DK140822B (en) |
| FR (1) | FR2130453B1 (en) |
| GB (1) | GB1373718A (en) |
| IT (1) | IT962055B (en) |
| NL (1) | NL7115341A (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2332968C3 (en) * | 1973-06-28 | 1981-12-10 | Siemens AG, 1000 Berlin und 8000 München | Device for controlling the diameter of a semiconductor rod |
| DE2518853C3 (en) * | 1975-04-28 | 1979-03-22 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Device for separating elemental silicon from a reaction gas |
| US4185233A (en) * | 1978-03-30 | 1980-01-22 | General Electric Company | High efficiency ballast system for gaseous discharge lamps |
| US4866230A (en) * | 1987-04-27 | 1989-09-12 | Shin-Etu Handotai Company, Limited | Method of and apparatus for controlling floating zone of semiconductor rod |
| JPH0651599B2 (en) * | 1987-12-05 | 1994-07-06 | 信越半導体株式会社 | Floating band control method |
| IL163974A0 (en) * | 2003-09-10 | 2005-12-18 | Dana Corp | Method for monitoring the performance of a magnetic pulse forming or welding process |
| DE102012108009B4 (en) * | 2012-08-30 | 2016-09-01 | Topsil Semiconductor Materials A/S | Model predictive control of the zone melting process |
| JP2014240338A (en) * | 2013-06-12 | 2014-12-25 | 信越半導体株式会社 | Method of producing semiconductor single crystal rod |
| JP6642234B2 (en) * | 2016-04-20 | 2020-02-05 | 株式会社Sumco | Method and apparatus for producing single crystal |
-
1971
- 1971-03-22 DE DE2113720A patent/DE2113720C3/en not_active Expired
- 1971-11-02 CH CH1591771A patent/CH538885A/en not_active IP Right Cessation
- 1971-11-08 NL NL7115341A patent/NL7115341A/xx unknown
-
1972
- 1972-01-25 GB GB335972A patent/GB1373718A/en not_active Expired
- 1972-03-02 US US00231182A patent/US3757071A/en not_active Expired - Lifetime
- 1972-03-17 IT IT22005/72A patent/IT962055B/en active
- 1972-03-20 FR FR7209619A patent/FR2130453B1/fr not_active Expired
- 1972-03-21 CA CA137,620A patent/CA970255A/en not_active Expired
- 1972-03-21 DK DK132072AA patent/DK140822B/en not_active IP Right Cessation
- 1972-03-22 BE BE781067A patent/BE781067A/en unknown
- 1972-03-22 JP JP47028879A patent/JPS5233042B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| IT962055B (en) | 1973-12-20 |
| DE2113720A1 (en) | 1972-09-28 |
| NL7115341A (en) | 1972-09-26 |
| DE2113720B2 (en) | 1980-01-10 |
| DE2113720C3 (en) | 1980-09-11 |
| CH538885A (en) | 1973-07-15 |
| CA970255A (en) | 1975-07-01 |
| FR2130453A1 (en) | 1972-11-03 |
| BE781067A (en) | 1972-07-17 |
| DK140822B (en) | 1979-11-26 |
| DK140822C (en) | 1980-05-12 |
| FR2130453B1 (en) | 1975-04-11 |
| US3757071A (en) | 1973-09-04 |
| JPS5233042B1 (en) | 1977-08-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |