JPS5233042B1 - - Google Patents

Info

Publication number
JPS5233042B1
JPS5233042B1 JP47028879A JP2887972A JPS5233042B1 JP S5233042 B1 JPS5233042 B1 JP S5233042B1 JP 47028879 A JP47028879 A JP 47028879A JP 2887972 A JP2887972 A JP 2887972A JP S5233042 B1 JPS5233042 B1 JP S5233042B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47028879A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5233042B1 publication Critical patent/JPS5233042B1/ja
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28Controlling or regulating
    • C30B13/30Stabilisation or shape controlling of the molten zone, e.g. by concentrators, by electromagnetic fields; Controlling the section of the crystal
JP47028879A 1971-03-22 1972-03-22 Pending JPS5233042B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2113720A DE2113720C3 (en) 1971-03-22 1971-03-22 Process for diameter control in crucible-free zone melting of semiconductor rods

Publications (1)

Publication Number Publication Date
JPS5233042B1 true JPS5233042B1 (en) 1977-08-25

Family

ID=5802339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47028879A Pending JPS5233042B1 (en) 1971-03-22 1972-03-22

Country Status (11)

Country Link
US (1) US3757071A (en)
JP (1) JPS5233042B1 (en)
BE (1) BE781067A (en)
CA (1) CA970255A (en)
CH (1) CH538885A (en)
DE (1) DE2113720C3 (en)
DK (1) DK140822B (en)
FR (1) FR2130453B1 (en)
GB (1) GB1373718A (en)
IT (1) IT962055B (en)
NL (1) NL7115341A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58174897U (en) * 1978-03-30 1983-11-22 ヴァーモント インダストリーズ インコーポレーテッド High efficiency stabilization device for gas discharge lamps
JP2014240338A (en) * 2013-06-12 2014-12-25 信越半導体株式会社 Method of producing semiconductor single crystal rod
JP2017193461A (en) * 2016-04-20 2017-10-26 株式会社Sumco Production method and device of single crystal

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2332968C3 (en) * 1973-06-28 1981-12-10 Siemens AG, 1000 Berlin und 8000 München Device for controlling the diameter of a semiconductor rod
DE2518853C3 (en) * 1975-04-28 1979-03-22 Siemens Ag, 1000 Berlin Und 8000 Muenchen Device for separating elemental silicon from a reaction gas
US4866230A (en) * 1987-04-27 1989-09-12 Shin-Etu Handotai Company, Limited Method of and apparatus for controlling floating zone of semiconductor rod
JPH0651599B2 (en) * 1987-12-05 1994-07-06 信越半導体株式会社 Floating band control method
IL163974A0 (en) * 2003-09-10 2005-12-18 Dana Corp Method for monitoring the performance of a magnetic pulse forming or welding process
DE102012108009B4 (en) * 2012-08-30 2016-09-01 Topsil Semiconductor Materials A/S Model predictive control of the zone melting process

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58174897U (en) * 1978-03-30 1983-11-22 ヴァーモント インダストリーズ インコーポレーテッド High efficiency stabilization device for gas discharge lamps
JP2014240338A (en) * 2013-06-12 2014-12-25 信越半導体株式会社 Method of producing semiconductor single crystal rod
JP2017193461A (en) * 2016-04-20 2017-10-26 株式会社Sumco Production method and device of single crystal

Also Published As

Publication number Publication date
DE2113720C3 (en) 1980-09-11
CA970255A (en) 1975-07-01
DE2113720B2 (en) 1980-01-10
BE781067A (en) 1972-07-17
IT962055B (en) 1973-12-20
DK140822C (en) 1980-05-12
FR2130453B1 (en) 1975-04-11
GB1373718A (en) 1974-11-13
FR2130453A1 (en) 1972-11-03
DE2113720A1 (en) 1972-09-28
DK140822B (en) 1979-11-26
US3757071A (en) 1973-09-04
CH538885A (en) 1973-07-15
NL7115341A (en) 1972-09-26

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