CH538885A - Process for crucible zone melting - Google Patents

Process for crucible zone melting

Info

Publication number
CH538885A
CH538885A CH1591771A CH1591771A CH538885A CH 538885 A CH538885 A CH 538885A CH 1591771 A CH1591771 A CH 1591771A CH 1591771 A CH1591771 A CH 1591771A CH 538885 A CH538885 A CH 538885A
Authority
CH
Switzerland
Prior art keywords
zone melting
crucible zone
crucible
melting
zone
Prior art date
Application number
CH1591771A
Other languages
German (de)
Inventor
Stut Hans
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH538885A publication Critical patent/CH538885A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • C30B13/30—Stabilisation or shape controlling of the molten zone, e.g. by concentrators, by electromagnetic fields; Controlling the section of the crystal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
CH1591771A 1971-03-22 1971-11-02 Process for crucible zone melting CH538885A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2113720A DE2113720C3 (en) 1971-03-22 1971-03-22 Process for diameter control in crucible-free zone melting of semiconductor rods

Publications (1)

Publication Number Publication Date
CH538885A true CH538885A (en) 1973-07-15

Family

ID=5802339

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1591771A CH538885A (en) 1971-03-22 1971-11-02 Process for crucible zone melting

Country Status (11)

Country Link
US (1) US3757071A (en)
JP (1) JPS5233042B1 (en)
BE (1) BE781067A (en)
CA (1) CA970255A (en)
CH (1) CH538885A (en)
DE (1) DE2113720C3 (en)
DK (1) DK140822B (en)
FR (1) FR2130453B1 (en)
GB (1) GB1373718A (en)
IT (1) IT962055B (en)
NL (1) NL7115341A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2332968C3 (en) * 1973-06-28 1981-12-10 Siemens AG, 1000 Berlin und 8000 München Device for controlling the diameter of a semiconductor rod
DE2518853C3 (en) * 1975-04-28 1979-03-22 Siemens Ag, 1000 Berlin Und 8000 Muenchen Device for separating elemental silicon from a reaction gas
US4185233A (en) * 1978-03-30 1980-01-22 General Electric Company High efficiency ballast system for gaseous discharge lamps
US4866230A (en) * 1987-04-27 1989-09-12 Shin-Etu Handotai Company, Limited Method of and apparatus for controlling floating zone of semiconductor rod
JPH0651599B2 (en) * 1987-12-05 1994-07-06 信越半導体株式会社 Floating band control method
IL163974A0 (en) * 2003-09-10 2005-12-18 Dana Corp Method for monitoring the performance of a magnetic pulse forming or welding process
DE102012108009B4 (en) * 2012-08-30 2016-09-01 Topsil Semiconductor Materials A/S Model predictive control of the zone melting process
JP2014240338A (en) * 2013-06-12 2014-12-25 信越半導体株式会社 Method of producing semiconductor single crystal rod
JP6642234B2 (en) * 2016-04-20 2020-02-05 株式会社Sumco Method and apparatus for producing single crystal

Also Published As

Publication number Publication date
DE2113720C3 (en) 1980-09-11
US3757071A (en) 1973-09-04
BE781067A (en) 1972-07-17
DK140822B (en) 1979-11-26
DE2113720B2 (en) 1980-01-10
FR2130453B1 (en) 1975-04-11
NL7115341A (en) 1972-09-26
JPS5233042B1 (en) 1977-08-25
DE2113720A1 (en) 1972-09-28
DK140822C (en) 1980-05-12
IT962055B (en) 1973-12-20
FR2130453A1 (en) 1972-11-03
GB1373718A (en) 1974-11-13
CA970255A (en) 1975-07-01

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Legal Events

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PL Patent ceased