GB1321172A - Method and device for obtaining parallel and focused ionic microbeams and application of said method to the collective formation of electric circuits by ion implantation - Google Patents

Method and device for obtaining parallel and focused ionic microbeams and application of said method to the collective formation of electric circuits by ion implantation

Info

Publication number
GB1321172A
GB1321172A GB251971A GB251971A GB1321172A GB 1321172 A GB1321172 A GB 1321172A GB 251971 A GB251971 A GB 251971A GB 251971 A GB251971 A GB 251971A GB 1321172 A GB1321172 A GB 1321172A
Authority
GB
United Kingdom
Prior art keywords
microbeams
focused
stage
ion implantation
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB251971A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of GB1321172A publication Critical patent/GB1321172A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
GB251971A 1970-01-20 1971-01-19 Method and device for obtaining parallel and focused ionic microbeams and application of said method to the collective formation of electric circuits by ion implantation Expired GB1321172A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7001863A FR2080511A1 (https=) 1970-01-20 1970-01-20

Publications (1)

Publication Number Publication Date
GB1321172A true GB1321172A (en) 1973-06-20

Family

ID=9049291

Family Applications (1)

Application Number Title Priority Date Filing Date
GB251971A Expired GB1321172A (en) 1970-01-20 1971-01-19 Method and device for obtaining parallel and focused ionic microbeams and application of said method to the collective formation of electric circuits by ion implantation

Country Status (4)

Country Link
DE (1) DE2102592A1 (https=)
FR (1) FR2080511A1 (https=)
GB (1) GB1321172A (https=)
NL (1) NL7100749A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3845312A (en) * 1972-07-13 1974-10-29 Texas Instruments Inc Particle accelerator producing a uniformly expanded particle beam of uniform cross-sectioned density
CA1100237A (en) * 1977-03-23 1981-04-28 Roger F.W. Pease Multiple electron beam exposure system
DE3138744A1 (de) * 1981-09-29 1983-04-07 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von halbleitervorrichtungen

Also Published As

Publication number Publication date
FR2080511A1 (https=) 1971-11-19
DE2102592A1 (de) 1971-07-29
NL7100749A (https=) 1971-07-22

Similar Documents

Publication Publication Date Title
GB1311591A (en) Method and device for obtaining controlled nuclear fusion by means of artificial plasma
GB1488398A (en) Method and apparatus for extracting ions from a partially ionized plasma using a magnetic field gradient
GB862900A (en) Continuous plasma generator
GB1321172A (en) Method and device for obtaining parallel and focused ionic microbeams and application of said method to the collective formation of electric circuits by ion implantation
US2606291A (en) Method and apparatus for material separation
GB1303136A (https=)
Almén et al. Electromagnetic isotope separator in Gothenburg
GB1458908A (en) Apparatus for ion implantation
JPS56156662A (en) Device for ion implantation
GB1259505A (https=)
JPS5249774A (en) Ion implanting device
JPS57132373A (en) Manufacture of solar battery
GB1518282A (en) Ion beam separators
GB927938A (en) Improvements in ion accelerators
GB1063199A (en) A source of positively-charged particles
GB1028290A (https=)
GB972083A (en) Improvements in or relating to linear electrostatic accelerators and to methods of producing high-energy ion beams
US3435208A (en) Arrangement for electrically charging a beam of microparticles with an ion beam
GB1440139A (en) Method and apparatus for the separation of isotopes
JPS6438700A (en) Ion source
JPS5633820A (en) Device for ion implantation
GB1038220A (en) Improvements in ion beam microanalysers
GB957117A (en) Improvements relating to mass spectrometers
GB1064797A (en) Charged particle separator tubes
GB1141447A (en) Improvements in and relating to the generation of ion beams

Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees