GB1141447A - Improvements in and relating to the generation of ion beams - Google Patents

Improvements in and relating to the generation of ion beams

Info

Publication number
GB1141447A
GB1141447A GB2899667A GB2899667A GB1141447A GB 1141447 A GB1141447 A GB 1141447A GB 2899667 A GB2899667 A GB 2899667A GB 2899667 A GB2899667 A GB 2899667A GB 1141447 A GB1141447 A GB 1141447A
Authority
GB
United Kingdom
Prior art keywords
ions
june
extracted
plasma
incident beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2899667A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Publication of GB1141447A publication Critical patent/GB1141447A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Plasma Technology (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1,141,447. Ion sources. BALZERS PATENTUND BETEILIGUNGS. A.G. 23 June, 1967 [1 June, 1967], No. 28996/67. Heading H1D. A method of generating ions by bombarding a solid body with a beam of charged particles, preferably electrons, is characterized in that the incident beam is of such intensity as to penetrate into the body and form therein a channel filled with plasma from which the ions are extracted by an electric field. The ions may be extracted from the side of the body impinged on by the incident beam, or from the opposite side if the body is thin enough for the plasma channel to extend through it. The method may result in a high yield ratio of output ions to input electrons and may provide the ion source for particle accelerators, isotope separators or for coating materials with extremely pure thin layers.
GB2899667A 1967-06-01 1967-06-23 Improvements in and relating to the generation of ion beams Expired GB1141447A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH778267A CH460963A (en) 1967-06-01 1967-06-01 Method for generating ion beams

Publications (1)

Publication Number Publication Date
GB1141447A true GB1141447A (en) 1969-01-29

Family

ID=4330380

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2899667A Expired GB1141447A (en) 1967-06-01 1967-06-23 Improvements in and relating to the generation of ion beams

Country Status (3)

Country Link
CH (1) CH460963A (en)
DE (1) DE1589531A1 (en)
GB (1) GB1141447A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3322839A1 (en) * 1982-06-25 1984-01-05 Hitachi, Ltd., Tokyo ION SOURCE

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3322839A1 (en) * 1982-06-25 1984-01-05 Hitachi, Ltd., Tokyo ION SOURCE

Also Published As

Publication number Publication date
CH460963A (en) 1968-08-15
DE1589531A1 (en) 1970-03-26

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