CH460963A - Method for generating ion beams - Google Patents

Method for generating ion beams

Info

Publication number
CH460963A
CH460963A CH778267A CH778267A CH460963A CH 460963 A CH460963 A CH 460963A CH 778267 A CH778267 A CH 778267A CH 778267 A CH778267 A CH 778267A CH 460963 A CH460963 A CH 460963A
Authority
CH
Switzerland
Prior art keywords
ion beams
generating ion
generating
beams
ion
Prior art date
Application number
CH778267A
Other languages
German (de)
Inventor
Eberhard Dr Krimmel
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Priority to CH778267A priority Critical patent/CH460963A/en
Priority to GB2899667A priority patent/GB1141447A/en
Priority to DE19671589531 priority patent/DE1589531A1/en
Priority to FR114178A priority patent/FR1531102A/en
Publication of CH460963A publication Critical patent/CH460963A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Plasma Technology (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
CH778267A 1967-06-01 1967-06-01 Method for generating ion beams CH460963A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CH778267A CH460963A (en) 1967-06-01 1967-06-01 Method for generating ion beams
GB2899667A GB1141447A (en) 1967-06-01 1967-06-23 Improvements in and relating to the generation of ion beams
DE19671589531 DE1589531A1 (en) 1967-06-01 1967-06-27 Method for generating ion beams
FR114178A FR1531102A (en) 1967-06-01 1967-07-13 Ion beam production process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH778267A CH460963A (en) 1967-06-01 1967-06-01 Method for generating ion beams

Publications (1)

Publication Number Publication Date
CH460963A true CH460963A (en) 1968-08-15

Family

ID=4330380

Family Applications (1)

Application Number Title Priority Date Filing Date
CH778267A CH460963A (en) 1967-06-01 1967-06-01 Method for generating ion beams

Country Status (3)

Country Link
CH (1) CH460963A (en)
DE (1) DE1589531A1 (en)
GB (1) GB1141447A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58225537A (en) * 1982-06-25 1983-12-27 Hitachi Ltd Ion source unit

Also Published As

Publication number Publication date
GB1141447A (en) 1969-01-29
DE1589531A1 (en) 1970-03-26

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