FR1531102A - Ion beam production process - Google Patents

Ion beam production process

Info

Publication number
FR1531102A
FR1531102A FR114178A FR114178A FR1531102A FR 1531102 A FR1531102 A FR 1531102A FR 114178 A FR114178 A FR 114178A FR 114178 A FR114178 A FR 114178A FR 1531102 A FR1531102 A FR 1531102A
Authority
FR
France
Prior art keywords
production process
ion beam
beam production
ion
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR114178A
Other languages
French (fr)
Inventor
Eberhard Krimmez
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH778267A external-priority patent/CH460963A/en
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Priority to FR114178A priority Critical patent/FR1531102A/en
Application granted granted Critical
Publication of FR1531102A publication Critical patent/FR1531102A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
FR114178A 1967-06-01 1967-07-13 Ion beam production process Expired FR1531102A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR114178A FR1531102A (en) 1967-06-01 1967-07-13 Ion beam production process

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH778267A CH460963A (en) 1967-06-01 1967-06-01 Method for generating ion beams
FR114178A FR1531102A (en) 1967-06-01 1967-07-13 Ion beam production process

Publications (1)

Publication Number Publication Date
FR1531102A true FR1531102A (en) 1968-06-28

Family

ID=25702222

Family Applications (1)

Application Number Title Priority Date Filing Date
FR114178A Expired FR1531102A (en) 1967-06-01 1967-07-13 Ion beam production process

Country Status (1)

Country Link
FR (1) FR1531102A (en)

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