GB1171175A - Glow Discharge Cathode for producing a Beam of Electrons - Google Patents

Glow Discharge Cathode for producing a Beam of Electrons

Info

Publication number
GB1171175A
GB1171175A GB5139866A GB5139866A GB1171175A GB 1171175 A GB1171175 A GB 1171175A GB 5139866 A GB5139866 A GB 5139866A GB 5139866 A GB5139866 A GB 5139866A GB 1171175 A GB1171175 A GB 1171175A
Authority
GB
United Kingdom
Prior art keywords
cathode
glow discharge
electrons
producing
nov
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5139866A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RTX Corp
Original Assignee
United Aircraft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Publication of GB1171175A publication Critical patent/GB1171175A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H01J17/06—Cathodes
    • H01J17/066—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
GB5139866A 1965-11-17 1966-11-16 Glow Discharge Cathode for producing a Beam of Electrons Expired GB1171175A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US50831465A 1965-11-17 1965-11-17

Publications (1)

Publication Number Publication Date
GB1171175A true GB1171175A (en) 1969-11-19

Family

ID=24022250

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5139866A Expired GB1171175A (en) 1965-11-17 1966-11-16 Glow Discharge Cathode for producing a Beam of Electrons

Country Status (4)

Country Link
DE (1) DE1589006B1 (enrdf_load_stackoverflow)
FR (1) FR1506614A (enrdf_load_stackoverflow)
GB (1) GB1171175A (enrdf_load_stackoverflow)
SE (1) SE309072B (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013223517A1 (de) * 2013-11-19 2015-06-03 Siemens Aktiengesellschaft Elektronenkanone und Strahlungserzeugungsanlage

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE896533C (de) * 1939-04-12 1953-11-12 Aeg Einrichtung zur Erzeugung eines Strahles von positiven Ionen oder von Elektronen

Also Published As

Publication number Publication date
FR1506614A (fr) 1967-12-22
SE309072B (enrdf_load_stackoverflow) 1969-03-10
DE1589006B1 (de) 1970-07-23

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees