DE1589006B1 - Elektrodensystem zur Erzeugung eines Elektronenstrahles - Google Patents

Elektrodensystem zur Erzeugung eines Elektronenstrahles

Info

Publication number
DE1589006B1
DE1589006B1 DE1966U0013268 DEU0013268A DE1589006B1 DE 1589006 B1 DE1589006 B1 DE 1589006B1 DE 1966U0013268 DE1966U0013268 DE 1966U0013268 DE U0013268 A DEU0013268 A DE U0013268A DE 1589006 B1 DE1589006 B1 DE 1589006B1
Authority
DE
Germany
Prior art keywords
cathode
face
electrode system
electron beam
shield
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE1966U0013268
Other languages
German (de)
English (en)
Inventor
Davis Jack William
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RTX Corp
Original Assignee
United Aircraft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Publication of DE1589006B1 publication Critical patent/DE1589006B1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H01J17/06—Cathodes
    • H01J17/066—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
DE1966U0013268 1965-11-17 1966-11-17 Elektrodensystem zur Erzeugung eines Elektronenstrahles Pending DE1589006B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US50831465A 1965-11-17 1965-11-17

Publications (1)

Publication Number Publication Date
DE1589006B1 true DE1589006B1 (de) 1970-07-23

Family

ID=24022250

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1966U0013268 Pending DE1589006B1 (de) 1965-11-17 1966-11-17 Elektrodensystem zur Erzeugung eines Elektronenstrahles

Country Status (4)

Country Link
DE (1) DE1589006B1 (enrdf_load_stackoverflow)
FR (1) FR1506614A (enrdf_load_stackoverflow)
GB (1) GB1171175A (enrdf_load_stackoverflow)
SE (1) SE309072B (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3053182B1 (de) * 2013-11-19 2017-08-16 Siemens Aktiengesellschaft Strahlungserzeugungsanlage

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE896533C (de) * 1939-04-12 1953-11-12 Aeg Einrichtung zur Erzeugung eines Strahles von positiven Ionen oder von Elektronen

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE896533C (de) * 1939-04-12 1953-11-12 Aeg Einrichtung zur Erzeugung eines Strahles von positiven Ionen oder von Elektronen

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3053182B1 (de) * 2013-11-19 2017-08-16 Siemens Aktiengesellschaft Strahlungserzeugungsanlage
US10074503B2 (en) 2013-11-19 2018-09-11 Siemens Aktiengesellschaft Electron gun and radiation generating apparatus

Also Published As

Publication number Publication date
FR1506614A (fr) 1967-12-22
SE309072B (enrdf_load_stackoverflow) 1969-03-10
GB1171175A (en) 1969-11-19

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