GB1104487A - Improvements in and relating to thin films - Google Patents
Improvements in and relating to thin filmsInfo
- Publication number
- GB1104487A GB1104487A GB2157965A GB2157965A GB1104487A GB 1104487 A GB1104487 A GB 1104487A GB 2157965 A GB2157965 A GB 2157965A GB 2157965 A GB2157965 A GB 2157965A GB 1104487 A GB1104487 A GB 1104487A
- Authority
- GB
- United Kingdom
- Prior art keywords
- base
- chamber
- holder
- cathode
- relating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Photovoltaic Devices (AREA)
Abstract
<PICT:1104487/C6-C7/1> Sputtering apparatus comprises a chamber 11 including a base 14, means 12, 13 for evacuating and admitting sputtering gas to the chamber, a cathode 16, a substrate holder 15 disposed between the base and the cathode and means for applying a direct or alternating potential to the holder with respect to the base. Nb, Ta, Ti, Zr or Al is sputtered on to a glass substrate 7 using a cathode composed of or covered with foil of the material to be deposited and a holder 15 of Ta or stainless steel, the base 14 being connected to earth or positive or negative potential. The substrate is first washed in detergent and H2O2 and before sputtering the chamber 11 is flushed with He, Ar or Ne.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US37253764A | 1964-06-04 | 1964-06-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1104487A true GB1104487A (en) | 1968-02-28 |
Family
ID=23468560
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2157965A Expired GB1104487A (en) | 1964-06-04 | 1965-05-21 | Improvements in and relating to thin films |
Country Status (9)
Country | Link |
---|---|
AT (1) | AT255226B (en) |
BE (1) | BE664061A (en) |
DE (1) | DE1515322C3 (en) |
ES (1) | ES313735A1 (en) |
FR (1) | FR1434758A (en) |
GB (1) | GB1104487A (en) |
IL (1) | IL23185A (en) |
NL (2) | NL6506292A (en) |
SE (1) | SE314269B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3617459A (en) * | 1967-09-15 | 1971-11-02 | Ibm | Rf sputtering method and apparatus for producing insulating films of varied physical properties |
MX145314A (en) * | 1975-12-17 | 1982-01-27 | Coulter Systems Corp | IMPROVEMENTS TO A SPARKLING DEVICE TO PRODUCE ELECTROPHOTOGRAPHIC FILM |
-
0
- NL NL136984D patent/NL136984C/xx active
-
1965
- 1965-03-19 IL IL2318565A patent/IL23185A/en unknown
- 1965-04-05 AT AT307465A patent/AT255226B/en active
- 1965-05-17 BE BE664061D patent/BE664061A/xx unknown
- 1965-05-18 NL NL6506292A patent/NL6506292A/xx unknown
- 1965-05-18 DE DE1965W0039172 patent/DE1515322C3/en not_active Expired
- 1965-05-21 GB GB2157965A patent/GB1104487A/en not_active Expired
- 1965-05-24 FR FR18205A patent/FR1434758A/en not_active Expired
- 1965-05-26 ES ES0313735A patent/ES313735A1/en not_active Expired
- 1965-06-03 SE SE728665A patent/SE314269B/xx unknown
Also Published As
Publication number | Publication date |
---|---|
BE664061A (en) | 1965-09-16 |
IL23185A (en) | 1968-08-22 |
FR1434758A (en) | 1966-04-08 |
DE1515322B2 (en) | 1973-10-04 |
NL6506292A (en) | 1965-12-06 |
AT255226B (en) | 1967-06-26 |
DE1515322A1 (en) | 1972-03-02 |
NL136984C (en) | |
SE314269B (en) | 1969-09-01 |
DE1515322C3 (en) | 1974-05-02 |
ES313735A1 (en) | 1965-07-16 |
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