GB1062569A - High-frequency discharge generator - Google Patents

High-frequency discharge generator

Info

Publication number
GB1062569A
GB1062569A GB1496164A GB1496164A GB1062569A GB 1062569 A GB1062569 A GB 1062569A GB 1496164 A GB1496164 A GB 1496164A GB 1496164 A GB1496164 A GB 1496164A GB 1062569 A GB1062569 A GB 1062569A
Authority
GB
United Kingdom
Prior art keywords
frequency discharge
discharge generator
substance
plasma
generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1496164A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of GB1062569A publication Critical patent/GB1062569A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

<PICT:1062569/C6-C7/1> A substance for evaporation and deposition is placed in a recess (10) Fig. 2 (not shown) in the upper surface of an electrode 5 of a high-frequency discharge generator (see Division H1X). A discharge gas such as nitrogen introduced through a passage 9 forms a plasma into which the substance is introduced by sputtering. A layer of the substance is formed on a quartz plate placed in the vicinity of the plasma.
GB1496164A 1963-04-18 1964-04-10 High-frequency discharge generator Expired GB1062569A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981963 1963-04-18

Publications (1)

Publication Number Publication Date
GB1062569A true GB1062569A (en) 1967-03-22

Family

ID=12009911

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1496164A Expired GB1062569A (en) 1963-04-18 1964-04-10 High-frequency discharge generator

Country Status (1)

Country Link
GB (1) GB1062569A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2113013A (en) * 1981-12-02 1983-07-27 Kloeckner Werke Ag Spark emission-spectrometric analysis of metallic test samples

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2113013A (en) * 1981-12-02 1983-07-27 Kloeckner Werke Ag Spark emission-spectrometric analysis of metallic test samples

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