GB1399571A - Workpiece support for glow discharge apparatus - Google Patents

Workpiece support for glow discharge apparatus

Info

Publication number
GB1399571A
GB1399571A GB2139573A GB2139573A GB1399571A GB 1399571 A GB1399571 A GB 1399571A GB 2139573 A GB2139573 A GB 2139573A GB 2139573 A GB2139573 A GB 2139573A GB 1399571 A GB1399571 A GB 1399571A
Authority
GB
United Kingdom
Prior art keywords
base
tube
electrode
workpiece
discharge apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2139573A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of GB1399571A publication Critical patent/GB1399571A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Computer Hardware Design (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Discharge Heating (AREA)
  • Physical Vapour Deposition (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Furnace Charging Or Discharging (AREA)

Abstract

1399571 Discharge apparatus GENERAL ELECTRIC CO 4 May 1973 [8 May 1972] 21395/73 Heading H1D A workpiece support for glow discharge apparatus comprises a conductive base 2, a ceramic tube 20 disposed on said base, a workpiece table 10 supported on said tube and having a portion 21 forming a protecting grip 22 around the top exterior surface of the tube, said gap 22 being dimensioned to restrict entry of the glow, a conductive layer 23 coating the exterior of the tube with the exception of the area protected by said gap, and an insulated electrode 11 entering said base, extending through the tube and electrically connected to said workpiece table. A thermocouple 15 extends through the electrode 11 and a hole 16 in the workpiece table. The electrode 11 is insulated from the base 2 by a glass tube 14. The surface of the base 2 between the tubes 14 and 20 is covered with a layer 24 of sand or alumina, zirconia or beryllia in granulated form or a ceramic washer. The coating 23 is built up by sputtering from the workpiece 4 and provides a surface with a continuous potential gradient which reduces any tendency to arcing. The base 2 is covered by a metal dome (Fig. 1, not shown) which acts as an electrode and forms a chamber which is evacuated and then filled with a gas appropriate to the treatment to be effected, e.g. nitrogen to effect nitriding.
GB2139573A 1972-05-08 1973-05-04 Workpiece support for glow discharge apparatus Expired GB1399571A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US25127472A 1972-05-08 1972-05-08

Publications (1)

Publication Number Publication Date
GB1399571A true GB1399571A (en) 1975-07-02

Family

ID=22951228

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2139573A Expired GB1399571A (en) 1972-05-08 1973-05-04 Workpiece support for glow discharge apparatus

Country Status (4)

Country Link
US (1) US3739220A (en)
JP (1) JPS5510664B2 (en)
DE (1) DE2322689A1 (en)
GB (1) GB1399571A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2606454C2 (en) * 1976-02-18 1978-01-12 lonit Anstalt Bernhard Berghaus, Vaduz Thermocouple insert
US4226897A (en) * 1977-12-05 1980-10-07 Plasma Physics Corporation Method of forming semiconducting materials and barriers
US4328258A (en) * 1977-12-05 1982-05-04 Plasma Physics Corp. Method of forming semiconducting materials and barriers
JP2571421B2 (en) * 1988-07-04 1997-01-16 大同特殊鋼株式会社 Plasma carburizing heat treatment furnace
JPH08209352A (en) * 1995-02-06 1996-08-13 Hitachi Ltd Plasma treatment and device therefor
CN105132858B (en) * 2015-08-06 2017-11-10 西华大学 Endoporus local glow plasma discharge device and its application method

Also Published As

Publication number Publication date
JPS5510664B2 (en) 1980-03-18
DE2322689A1 (en) 1973-11-22
JPS4961793A (en) 1974-06-14
US3739220A (en) 1973-06-12

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee