GB1241213A - Sequential sputtering apparatus - Google Patents

Sequential sputtering apparatus

Info

Publication number
GB1241213A
GB1241213A GB4792568A GB4792568A GB1241213A GB 1241213 A GB1241213 A GB 1241213A GB 4792568 A GB4792568 A GB 4792568A GB 4792568 A GB4792568 A GB 4792568A GB 1241213 A GB1241213 A GB 1241213A
Authority
GB
United Kingdom
Prior art keywords
electrodes
sputtering apparatus
oct
supported
shield
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4792568A
Inventor
Lawrence Francis Herte
Frank Rudolph Kloss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of GB1241213A publication Critical patent/GB1241213A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1,241,213. Sputtering apparatus. VARIAN ASSOCIATES. Oct.9, 1969 Oct 11 1967], No.47925/68. Heading C7F. Sputtering apparatus comprises an H. F. coil 1 for maintaining a plasma between electrodes 2, 3 and a rotatable substrate holder 4. A shield 15 is supported on the holder 4 or in a modification Fig.2 (not shown) it may be supported on the earthed shield 10 mounted over the electrodes. Removable targets 5, 6 are clipped on to the electrodes. The electrode assembly and the substrate holder are adjustably mounted on a support 18. Coolant is supplied to the electrodes through tubes 22, 23. The atmosphere may be argon.
GB4792568A 1967-10-11 1968-10-09 Sequential sputtering apparatus Expired GB1241213A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US67453967A 1967-10-11 1967-10-11

Publications (1)

Publication Number Publication Date
GB1241213A true GB1241213A (en) 1971-08-04

Family

ID=24706998

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4792568A Expired GB1241213A (en) 1967-10-11 1968-10-09 Sequential sputtering apparatus

Country Status (3)

Country Link
DE (1) DE1790178A1 (en)
FR (1) FR1588300A (en)
GB (1) GB1241213A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1937175C3 (en) * 1969-07-22 1981-12-10 SCHÜCO Heinz Schürmann GmbH & Co, 4800 Bielefeld Device for connecting two components
DE2307649B2 (en) * 1973-02-16 1980-07-31 Robert Bosch Gmbh, 7000 Stuttgart Arrangement for sputtering different materials on a substrate
DE4010495C2 (en) * 1990-03-31 1997-07-31 Leybold Ag Device for coating a substrate with materials, for example with metals
DE4042417C2 (en) * 1990-07-17 1993-11-25 Balzers Hochvakuum Etching or coating system and method for igniting or intermittent operation
DE4022708A1 (en) * 1990-07-17 1992-04-02 Balzers Hochvakuum ETCHING OR COATING PLANTS

Also Published As

Publication number Publication date
FR1588300A (en) 1970-04-10
DE1790178A1 (en) 1972-01-20

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