ES380347A1 - Article coating method - Google Patents

Article coating method

Info

Publication number
ES380347A1
ES380347A1 ES380347A ES380347A ES380347A1 ES 380347 A1 ES380347 A1 ES 380347A1 ES 380347 A ES380347 A ES 380347A ES 380347 A ES380347 A ES 380347A ES 380347 A1 ES380347 A1 ES 380347A1
Authority
ES
Spain
Prior art keywords
article
cathode
cleaning
region
steps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES380347A
Other languages
Spanish (es)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eversharp Inc
Original Assignee
Eversharp Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eversharp Inc filed Critical Eversharp Inc
Publication of ES380347A1 publication Critical patent/ES380347A1/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/36—Gas-filled discharge tubes for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

Method for cleaning at least a part of an article and depositing a continuous thin coating on said part thereof, while keeping said article essentially free of atmospheric contamination, said method comprising the steps of arranging said article within a region shell that contains an anti-cathode with coating material on it, establish a high electrical potential in said anti-cathode and on said article, and introduce minute amounts of an inert gas in said region to clean the surface of said part of said article removing atoms from it and covering said part of such an article by electronically depositing surface atoms of said coating material of said anti-cathode and in said part of said article, such cleaning and deposition taking place without loss of vacuum in said emptied region, at any time during said steps of cleaning and re coverage. (Machine-translation by Google Translate, not legally binding)
ES380347A 1969-06-03 1970-06-03 Article coating method Expired ES380347A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US82990669A 1969-06-03 1969-06-03

Publications (1)

Publication Number Publication Date
ES380347A1 true ES380347A1 (en) 1973-04-16

Family

ID=25255867

Family Applications (1)

Application Number Title Priority Date Filing Date
ES380347A Expired ES380347A1 (en) 1969-06-03 1970-06-03 Article coating method

Country Status (8)

Country Link
US (1) US3723276A (en)
JP (2) JPS5136236B1 (en)
CA (1) CA949021A (en)
DE (1) DE2027301C3 (en)
ES (1) ES380347A1 (en)
FR (1) FR2049889A5 (en)
GB (1) GB1318771A (en)
NL (1) NL169349C (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4151059A (en) * 1977-12-27 1979-04-24 Coulter Stork U.S.A., Inc. Method and apparatus for sputtering multiple cylinders simultaneously
DE3404880A1 (en) * 1984-02-11 1985-08-14 Glyco-Metall-Werke Daelen & Loos Gmbh, 6200 Wiesbaden METHOD FOR PRODUCING LAYERING MATERIAL OR LAYERING PIECES
US4896813A (en) * 1989-04-03 1990-01-30 Toyo Kohan Co., Ltd. Method and apparatus for cold rolling clad sheet
US5961798A (en) * 1996-02-13 1999-10-05 Diamond Black Technologies, Inc. System and method for vacuum coating of articles having precise and reproducible positioning of articles

Also Published As

Publication number Publication date
DE2027301A1 (en) 1970-12-10
US3723276A (en) 1973-03-27
FR2049889A5 (en) 1971-03-26
NL169349C (en) 1982-07-01
JPS5136236B1 (en) 1976-10-07
DE2027301B2 (en) 1980-09-11
CA949021A (en) 1974-06-11
DE2027301C3 (en) 1981-05-27
GB1318771A (en) 1973-05-31
NL7008076A (en) 1970-12-07
NL169349B (en) 1982-02-01
JPS5313591B1 (en) 1978-05-11

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Legal Events

Date Code Title Description
FD1A Patent lapsed

Effective date: 20100528