JPS5230996A - Electron beam processing device - Google Patents
Electron beam processing deviceInfo
- Publication number
- JPS5230996A JPS5230996A JP10774075A JP10774075A JPS5230996A JP S5230996 A JPS5230996 A JP S5230996A JP 10774075 A JP10774075 A JP 10774075A JP 10774075 A JP10774075 A JP 10774075A JP S5230996 A JPS5230996 A JP S5230996A
- Authority
- JP
- Japan
- Prior art keywords
- processing device
- electron beam
- beam processing
- electron
- acicular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To obtain a highly bright submicron electron beam processing device having small beam radius by fixing a cathode for emission of beat electron on a support metal or support carbon capable of directly heating electrically an acicular lanthanum boride single crystal of end radius less than 5mm.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10774075A JPS5230996A (en) | 1975-09-04 | 1975-09-04 | Electron beam processing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10774075A JPS5230996A (en) | 1975-09-04 | 1975-09-04 | Electron beam processing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5230996A true JPS5230996A (en) | 1977-03-09 |
Family
ID=14466742
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10774075A Pending JPS5230996A (en) | 1975-09-04 | 1975-09-04 | Electron beam processing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5230996A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4351921A (en) * | 1980-01-11 | 1982-09-28 | Mitsubishi Rayon Co., Ltd. | Resin composition for use in uncoated exterior material |
JPH0850873A (en) * | 1994-08-08 | 1996-02-20 | Nec Kansai Ltd | Hot cathode structure and electron beam working device using this hot cathode structure |
-
1975
- 1975-09-04 JP JP10774075A patent/JPS5230996A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4351921A (en) * | 1980-01-11 | 1982-09-28 | Mitsubishi Rayon Co., Ltd. | Resin composition for use in uncoated exterior material |
JPH0850873A (en) * | 1994-08-08 | 1996-02-20 | Nec Kansai Ltd | Hot cathode structure and electron beam working device using this hot cathode structure |
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