JPS5230996A - Electron beam processing device - Google Patents

Electron beam processing device

Info

Publication number
JPS5230996A
JPS5230996A JP10774075A JP10774075A JPS5230996A JP S5230996 A JPS5230996 A JP S5230996A JP 10774075 A JP10774075 A JP 10774075A JP 10774075 A JP10774075 A JP 10774075A JP S5230996 A JPS5230996 A JP S5230996A
Authority
JP
Japan
Prior art keywords
processing device
electron beam
beam processing
electron
acicular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10774075A
Other languages
Japanese (ja)
Inventor
Nanao Kawai
Takao Tanaka
Hidenori Sakauchi
Ryuichi Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute for Research in Inorganic Material
Original Assignee
National Institute for Research in Inorganic Material
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute for Research in Inorganic Material filed Critical National Institute for Research in Inorganic Material
Priority to JP10774075A priority Critical patent/JPS5230996A/en
Publication of JPS5230996A publication Critical patent/JPS5230996A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To obtain a highly bright submicron electron beam processing device having small beam radius by fixing a cathode for emission of beat electron on a support metal or support carbon capable of directly heating electrically an acicular lanthanum boride single crystal of end radius less than 5mm.
COPYRIGHT: (C)1977,JPO&Japio
JP10774075A 1975-09-04 1975-09-04 Electron beam processing device Pending JPS5230996A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10774075A JPS5230996A (en) 1975-09-04 1975-09-04 Electron beam processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10774075A JPS5230996A (en) 1975-09-04 1975-09-04 Electron beam processing device

Publications (1)

Publication Number Publication Date
JPS5230996A true JPS5230996A (en) 1977-03-09

Family

ID=14466742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10774075A Pending JPS5230996A (en) 1975-09-04 1975-09-04 Electron beam processing device

Country Status (1)

Country Link
JP (1) JPS5230996A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4351921A (en) * 1980-01-11 1982-09-28 Mitsubishi Rayon Co., Ltd. Resin composition for use in uncoated exterior material
JPH0850873A (en) * 1994-08-08 1996-02-20 Nec Kansai Ltd Hot cathode structure and electron beam working device using this hot cathode structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4351921A (en) * 1980-01-11 1982-09-28 Mitsubishi Rayon Co., Ltd. Resin composition for use in uncoated exterior material
JPH0850873A (en) * 1994-08-08 1996-02-20 Nec Kansai Ltd Hot cathode structure and electron beam working device using this hot cathode structure

Similar Documents

Publication Publication Date Title
JPS5230996A (en) Electron beam processing device
JPS53102677A (en) Ion beam radiating unit
JPS5214347A (en) Field emission electron gun
JPS5231650A (en) Thermion radiation cathode
JPS5231651A (en) Scan-type electron microscope
JPS524772A (en) Field-emission electron gun
JPS5239357A (en) Electron gun
JPS524163A (en) Electric field radiation cathode
JPS53137660A (en) Electron gun
JPS5236487A (en) X-ray generator
JPS53105699A (en) Cold cathod discharging type ion source device
JPS5231652A (en) Electron microscope
JPS51124362A (en) Field emission type electron gun
JPS5230150A (en) Manufacturing system of electron radiation cathode rod
JPS5229169A (en) Image display device
JPS5335363A (en) Field radiation type cathode
JPS5414154A (en) Electron gun
JPS52127059A (en) Field emission type electron gun
JPS51142277A (en) Device for electron-beam exposure
JPS51120170A (en) Scanning type elestson microscope
JPS5362978A (en) Electron microscope
JPS51118362A (en) Heat electon radiating cathode
JPS51137366A (en) Electric field radiation type electron gun
JPS5279756A (en) Field emission device
JPS5339852A (en) Color cathode ray tube device