FR1588300A - - Google Patents
Info
- Publication number
- FR1588300A FR1588300A FR1588300DA FR1588300A FR 1588300 A FR1588300 A FR 1588300A FR 1588300D A FR1588300D A FR 1588300DA FR 1588300 A FR1588300 A FR 1588300A
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US67453967A | 1967-10-11 | 1967-10-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1588300A true FR1588300A (fr) | 1970-04-10 |
Family
ID=24706998
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1588300D Expired FR1588300A (fr) | 1967-10-11 | 1968-10-08 |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE1790178A1 (fr) |
FR (1) | FR1588300A (fr) |
GB (1) | GB1241213A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2218402A1 (fr) * | 1973-02-16 | 1974-09-13 | Bosch Gmbh Robert |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1937175C3 (de) * | 1969-07-22 | 1981-12-10 | SCHÜCO Heinz Schürmann GmbH & Co, 4800 Bielefeld | Vorrichtung zum Verbinden von zwei Bauteilen |
DE4010495C2 (de) * | 1990-03-31 | 1997-07-31 | Leybold Ag | Vorrichtung zum Beschichten eines Substrats mit Werkstoffen, beispielweise mit Metallen |
DE4042417C2 (de) * | 1990-07-17 | 1993-11-25 | Balzers Hochvakuum | Ätz- oder Beschichtungsanlage sowie Verfahren zu ihrem Zünden oder intermittierenden Betreiben |
DE4022708A1 (de) * | 1990-07-17 | 1992-04-02 | Balzers Hochvakuum | Aetz- oder beschichtungsanlagen |
-
1968
- 1968-09-24 DE DE19681790178 patent/DE1790178A1/de active Pending
- 1968-10-08 FR FR1588300D patent/FR1588300A/fr not_active Expired
- 1968-10-09 GB GB4792568A patent/GB1241213A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2218402A1 (fr) * | 1973-02-16 | 1974-09-13 | Bosch Gmbh Robert |
Also Published As
Publication number | Publication date |
---|---|
GB1241213A (en) | 1971-08-04 |
DE1790178A1 (de) | 1972-01-20 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |