FR2218402A1 - - Google Patents

Info

Publication number
FR2218402A1
FR2218402A1 FR7344510A FR7344510A FR2218402A1 FR 2218402 A1 FR2218402 A1 FR 2218402A1 FR 7344510 A FR7344510 A FR 7344510A FR 7344510 A FR7344510 A FR 7344510A FR 2218402 A1 FR2218402 A1 FR 2218402A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7344510A
Other versions
FR2218402B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2218402A1 publication Critical patent/FR2218402A1/fr
Application granted granted Critical
Publication of FR2218402B1 publication Critical patent/FR2218402B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7344510A 1973-02-16 1973-12-13 Expired FR2218402B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2307649A DE2307649B2 (de) 1973-02-16 1973-02-16 Anordnung zum Aufstäuben verschiedener Materialien auf einem Substrat

Publications (2)

Publication Number Publication Date
FR2218402A1 true FR2218402A1 (fr) 1974-09-13
FR2218402B1 FR2218402B1 (fr) 1976-10-08

Family

ID=5872099

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7344510A Expired FR2218402B1 (fr) 1973-02-16 1973-12-13

Country Status (8)

Country Link
US (1) US3985635A (fr)
JP (1) JPS49114585A (fr)
CH (1) CH564096A5 (fr)
DD (1) DD109670A5 (fr)
DE (1) DE2307649B2 (fr)
FR (1) FR2218402B1 (fr)
GB (1) GB1465745A (fr)
IT (1) IT1007287B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0516436A2 (fr) * 1991-05-31 1992-12-02 Deposition Sciences, Inc. Dispositif de pulvérisation

Families Citing this family (45)

* Cited by examiner, † Cited by third party
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US4060471A (en) * 1975-05-19 1977-11-29 Rca Corporation Composite sputtering method
ATE2909T1 (de) * 1978-07-08 1983-04-15 Wolfgang Kieferle Verfahren zum auflagern einer metall- oder legierungsschicht auf ein elektrisch leitendes werkstueck und vorrichtung zur durchfuehrung desselben.
US4239611A (en) * 1979-06-11 1980-12-16 Vac-Tec Systems, Inc. Magnetron sputtering devices
GB2106545B (en) * 1981-02-23 1985-06-26 Rimma Ivanovna Stupak Consumable cathode for electric-arc evaporator of metal
FR2504116A1 (fr) * 1981-04-15 1982-10-22 Commissariat Energie Atomique Procede d'obtention de couches de verres luminescents, application a la realisation de dispositifs munis de ces couches et a la realisation de photoscintillateurs.
US4362611A (en) * 1981-07-27 1982-12-07 International Business Machines Corporation Quadrupole R.F. sputtering system having an anode/cathode shield and a floating target shield
DE3248121A1 (de) * 1982-12-24 1984-06-28 Leybold-Heraeus GmbH, 5000 Köln Hochleistungs-katodenanordnung fuer die erzeugung von mehrfachschichten
US4420385A (en) * 1983-04-15 1983-12-13 Gryphon Products Apparatus and process for sputter deposition of reacted thin films
US4626336A (en) * 1985-05-02 1986-12-02 Hewlett Packard Company Target for sputter depositing thin films
DE3530074A1 (de) * 1985-08-22 1987-02-26 Siemens Ag Vorrichtung zum herstellen mehrerer aufeinanderfolgender schichten durch hochleistungs-kathodenzerstaeubung
JPS6260865A (ja) * 1985-09-11 1987-03-17 Sony Corp 積層構造薄膜の作製装置
JPS6383261A (ja) * 1986-09-26 1988-04-13 Tokyo Electron Ltd スパツタリング装置
DE3710497A1 (de) * 1987-03-30 1988-10-20 Tzn Forschung & Entwicklung Verfahren und vorrichtung zur herstellung von duennen, aus mehreren elementaren komponenten bestehenden filmen
US4814056A (en) * 1987-06-23 1989-03-21 Vac-Tec Systems, Inc. Apparatus for producing graded-composition coatings
JPH0194454U (fr) * 1987-12-10 1989-06-21
US4865710A (en) * 1988-03-31 1989-09-12 Wisconsin Alumni Research Foundation Magnetron with flux switching cathode and method of operation
GB9225270D0 (en) * 1992-12-03 1993-01-27 Gec Ferranti Defence Syst Depositing different materials on a substrate
GB2273110B (en) * 1992-12-03 1996-01-24 Gec Marconi Avionics Holdings Depositing different materials on a substrate
DE69403386T2 (de) * 1993-05-19 1997-09-18 Applied Materials Inc Vorrichtung und Verfahren zur Erhöhung der Zerstäubungsrate in einem Zerstäubungsgerät
US5772858A (en) * 1995-07-24 1998-06-30 Applied Materials, Inc. Method and apparatus for cleaning a target in a sputtering source
AU1978497A (en) * 1996-03-22 1997-10-10 Materials Research Corporation Method and apparatus for rf diode sputtering
JP3249408B2 (ja) * 1996-10-25 2002-01-21 昭和シェル石油株式会社 薄膜太陽電池の薄膜光吸収層の製造方法及び製造装置
DE59702419D1 (de) * 1997-07-15 2000-11-09 Unaxis Trading Ag Truebbach Verfahren und Vorrichtung zur Sputterbeschichtung
US6168690B1 (en) * 1997-09-29 2001-01-02 Lam Research Corporation Methods and apparatus for physical vapor deposition
US6086735A (en) * 1998-06-01 2000-07-11 Praxair S.T. Technology, Inc. Contoured sputtering target
US6309516B1 (en) 1999-05-07 2001-10-30 Seagate Technology Llc Method and apparatus for metal allot sputtering
US6503380B1 (en) 2000-10-13 2003-01-07 Honeywell International Inc. Physical vapor target constructions
JP2002363745A (ja) * 2001-06-08 2002-12-18 Canon Inc スパッタによる膜の形成方法、光学部材、およびスパッタ装置
US6994775B2 (en) * 2002-07-31 2006-02-07 The Regents Of The University Of California Multilayer composites and manufacture of same
US7172681B2 (en) * 2003-02-05 2007-02-06 Bridgestone Corporation Process for producing rubber-based composite material
EP1641723B1 (fr) * 2003-06-24 2008-01-02 Cardinal CG Company Revetements a concentration modulee
US8084400B2 (en) * 2005-10-11 2011-12-27 Intermolecular, Inc. Methods for discretized processing and process sequence integration of regions of a substrate
JP2008525645A (ja) * 2004-12-27 2008-07-17 日本板硝子株式会社 円筒形揺動シールドターゲットアセンブリおよびその使用方法
US7902063B2 (en) * 2005-10-11 2011-03-08 Intermolecular, Inc. Methods for discretized formation of masking and capping layers on a substrate
US8776717B2 (en) * 2005-10-11 2014-07-15 Intermolecular, Inc. Systems for discretized processing of regions of a substrate
US20070158181A1 (en) * 2006-01-12 2007-07-12 Seagate Technology Llc Method & apparatus for cathode sputtering with uniform process gas distribution
US8772772B2 (en) * 2006-05-18 2014-07-08 Intermolecular, Inc. System and method for increasing productivity of combinatorial screening
US20070202614A1 (en) * 2006-02-10 2007-08-30 Chiang Tony P Method and apparatus for combinatorially varying materials, unit process and process sequence
US7815782B2 (en) * 2006-06-23 2010-10-19 Applied Materials, Inc. PVD target
US7867904B2 (en) * 2006-07-19 2011-01-11 Intermolecular, Inc. Method and system for isolated and discretized process sequence integration
US8011317B2 (en) * 2006-12-29 2011-09-06 Intermolecular, Inc. Advanced mixing system for integrated tool having site-isolated reactors
US9567666B2 (en) * 2009-01-12 2017-02-14 Guardian Industries Corp Apparatus and method for making sputtered films with reduced stress asymmetry
CN103635604B (zh) 2011-06-30 2015-09-30 佳能安内华股份有限公司 镀膜装置
WO2013035225A1 (fr) 2011-09-09 2013-03-14 キヤノンアネルバ株式会社 Appareil de formation de film
KR20230005882A (ko) * 2020-04-30 2023-01-10 도쿄엘렉트론가부시키가이샤 Pvd 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1588300A (fr) * 1967-10-11 1970-04-10

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3324019A (en) * 1962-12-11 1967-06-06 Schjeldahl Co G T Method of sputtering sequentially from a plurality of cathodes
US3361659A (en) * 1967-08-14 1968-01-02 Ibm Process of depositing thin films by cathode sputtering using a controlled grid
US3652444A (en) * 1969-10-24 1972-03-28 Ibm Continuous vacuum process apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1588300A (fr) * 1967-10-11 1970-04-10

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0516436A2 (fr) * 1991-05-31 1992-12-02 Deposition Sciences, Inc. Dispositif de pulvérisation
EP0516436A3 (en) * 1991-05-31 1993-03-31 Deposition Sciences, Inc. Sputtering device

Also Published As

Publication number Publication date
DE2307649A1 (de) 1974-08-29
JPS49114585A (fr) 1974-11-01
IT1007287B (it) 1976-10-30
DE2307649B2 (de) 1980-07-31
FR2218402B1 (fr) 1976-10-08
CH564096A5 (fr) 1975-07-15
US3985635A (en) 1976-10-12
DD109670A5 (fr) 1974-11-12
GB1465745A (en) 1977-03-02

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Legal Events

Date Code Title Description
ST Notification of lapse