GB915568A - Improvements in or relating to the formation of thin films - Google Patents

Improvements in or relating to the formation of thin films

Info

Publication number
GB915568A
GB915568A GB3276060A GB3276060A GB915568A GB 915568 A GB915568 A GB 915568A GB 3276060 A GB3276060 A GB 3276060A GB 3276060 A GB3276060 A GB 3276060A GB 915568 A GB915568 A GB 915568A
Authority
GB
United Kingdom
Prior art keywords
bio
coating
cathode
vessel
sept
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3276060A
Inventor
Sydney Alfred Richard Rigden
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co PLC
Original Assignee
General Electric Co PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co PLC filed Critical General Electric Co PLC
Priority to GB3276060A priority Critical patent/GB915568A/en
Publication of GB915568A publication Critical patent/GB915568A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

915,568. Vapour deposition. GENERAL ELECTRIC CO. Ltd. Sept. 22, 1961 [Sept. 23, 1960; April 6, 1961], Nos. 32760/60 and 12379/61. Class 82 (2). An apparatus for forming thin films on the interior of glass vessels by cathode sputtering comprises the vessel rotatably mounted with at least two electrodes which can act as cathode in turn to give composite coatings. As illustrated (Figs. 1 and 2) there are two electrodes 22 and 23, made of or coated with BiO and Au, respectively, which can be used alternately as anode or cathode, and which are mounted inside the vessel to be coated 37. There is a screen 40 to prevent contamination of the anode. The oxide layer may be provided by sputtering the metal in an oxygen atmosphere but at other times the residual atmosphere is argon, at a pressure of 0.01-0.4 mm. of mercury. The motor for rotating the glass vessel may be connected by gearing 16, 17 and 21, or may be in the form of an induction motor with the stator outside. The apparatus may be used for the internal coating of a sodium vapour lamp with a composite coating comprising BiO-Au-BiO. This coating helps to conserve heat. A final coating of MgF 2 may be applied by evaporation.
GB3276060A 1960-09-23 1960-09-23 Improvements in or relating to the formation of thin films Expired GB915568A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB3276060A GB915568A (en) 1960-09-23 1960-09-23 Improvements in or relating to the formation of thin films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3276060A GB915568A (en) 1960-09-23 1960-09-23 Improvements in or relating to the formation of thin films

Publications (1)

Publication Number Publication Date
GB915568A true GB915568A (en) 1963-01-16

Family

ID=10343600

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3276060A Expired GB915568A (en) 1960-09-23 1960-09-23 Improvements in or relating to the formation of thin films

Country Status (1)

Country Link
GB (1) GB915568A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2546023A1 (en) * 1983-05-10 1984-11-16 Balzers Hochvakuum DEVICE AND METHOD FOR TREATING THE INTERIOR WALL OF A TUBE BY MEANS OF AN ELECTRIC BLOWER
US8182662B2 (en) 2009-03-27 2012-05-22 Sputtering Components, Inc. Rotary cathode for magnetron sputtering apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2546023A1 (en) * 1983-05-10 1984-11-16 Balzers Hochvakuum DEVICE AND METHOD FOR TREATING THE INTERIOR WALL OF A TUBE BY MEANS OF AN ELECTRIC BLOWER
GB2145434A (en) * 1983-05-10 1985-03-27 Balzers Hochvakuum Apparatus for treating the internal surface of a tube by electrical glow discharge
US8182662B2 (en) 2009-03-27 2012-05-22 Sputtering Components, Inc. Rotary cathode for magnetron sputtering apparatus

Similar Documents

Publication Publication Date Title
GB1517374A (en) Coated architectural glass system and method
ES2186915T3 (en) PROCEDURE TO SERVE TITANIUM OXIDE AND TITANIUM OXIDE ON A GLASS AND GLASS PLATE COVERED BY MEANS OF THIS PROCEDURE.
CA1269060C (en) Sputtered films of metal alloy oxides
GB1464051A (en) Photographic recording elements
GB915568A (en) Improvements in or relating to the formation of thin films
GB1390880A (en) Method of coating chromium -nickel alloy components with a chromium oxide-containing layer
GB2013724A (en) Method for sputtering cadmium stannate films
JPS5541959A (en) Production of indium oxide transparent conductive film through sputtering
GB1349833A (en) Production of thin films of tantalum
GB1188015A (en) Improvements in or relating to Electric Discharge Lamps.
GB1328298A (en) Production of a highly refractive oxide layer permeable to lihgt
GB1309881A (en) Transparent heat ray reflecting glass and process for manufacturing the same
JPS5713172A (en) Formation of selective absorption menbrane for solar energy by vacuum plating method
JPS55105222A (en) Panel for display
GB1500414A (en) Low radiation crucible
GB1405729A (en) Method of making a gas discharge display panel
GB1285395A (en) Improvements in or relating to vapour coating
GB1330013A (en) Deposition of titanium oxides
GB1299976A (en) Improvements relating to the deposition of gold layers
GB998584A (en) Improvements in or relating to electric discharge lamps
JPS5525044A (en) Production of light attenuator
JPS5565436A (en) Plasma treatment device
GB1185814A (en) Fabrication of Thin Film Capacitors
JPS5696071A (en) Display plate for watch
JPS6457684A (en) Formation of superconducting thin film