JPS5525044A - Production of light attenuator - Google Patents

Production of light attenuator

Info

Publication number
JPS5525044A
JPS5525044A JP9730478A JP9730478A JPS5525044A JP S5525044 A JPS5525044 A JP S5525044A JP 9730478 A JP9730478 A JP 9730478A JP 9730478 A JP9730478 A JP 9730478A JP S5525044 A JPS5525044 A JP S5525044A
Authority
JP
Japan
Prior art keywords
light
thin film
transmittance
improved
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9730478A
Other languages
Japanese (ja)
Inventor
Hiroyasu Sugiki
Shigeru Omori
Fumio Mita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9730478A priority Critical patent/JPS5525044A/en
Publication of JPS5525044A publication Critical patent/JPS5525044A/en
Pending legal-status Critical Current

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  • Optical Filters (AREA)
  • Surface Treatment Of Optical Elements (AREA)

Abstract

PURPOSE: To produce the light attenuator which attenuates the quantity of transmission light accurately by the specified quantity as the product of stable quality by making use of the change in the transmittance of light when materials such as metals, semiconductors, etc., are oxidized.
CONSTITUTION: A thin film 2 of oxidizable material such as Ta is provided by plasma high freqency sputtering in low pressure Ar on a smooth transparent glass substrate 1. Next, the thin film 2 is anodized, whereby an oxide film layer 3 is formed. At this time, the thickness of the layer 3 increases with an increase in the anodization voltage, resulting in the improved transmittance of light. Next, thermal oxidation is applied, whereby aging stability is improved.
COPYRIGHT: (C)1980,JPO&Japio
JP9730478A 1978-08-11 1978-08-11 Production of light attenuator Pending JPS5525044A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9730478A JPS5525044A (en) 1978-08-11 1978-08-11 Production of light attenuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9730478A JPS5525044A (en) 1978-08-11 1978-08-11 Production of light attenuator

Publications (1)

Publication Number Publication Date
JPS5525044A true JPS5525044A (en) 1980-02-22

Family

ID=14188738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9730478A Pending JPS5525044A (en) 1978-08-11 1978-08-11 Production of light attenuator

Country Status (1)

Country Link
JP (1) JPS5525044A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62177502A (en) * 1986-01-31 1987-08-04 Nippon Soda Co Ltd Composite oxide thin film having high refractive index and optical interference film
JPS62257102A (en) * 1986-04-30 1987-11-09 Kyocera Corp Ceramic mirror
JPS63296001A (en) * 1987-05-28 1988-12-02 Toshinori Takagi Optical crystalline film
US6671109B2 (en) * 2001-07-27 2003-12-30 Nidec Copal Corporation ND filter having composite PVD film of metal and its oxide

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5282017A (en) * 1975-12-27 1977-07-08 Matsushita Electric Ind Co Ltd Production of color analysis filter
JPS5422155A (en) * 1977-07-20 1979-02-19 Matsushita Electronics Corp Manufacture of correction filter for exposure device
JPS5470058A (en) * 1977-11-15 1979-06-05 Mitsubishi Electric Corp Production of filter for light attenuator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5282017A (en) * 1975-12-27 1977-07-08 Matsushita Electric Ind Co Ltd Production of color analysis filter
JPS5422155A (en) * 1977-07-20 1979-02-19 Matsushita Electronics Corp Manufacture of correction filter for exposure device
JPS5470058A (en) * 1977-11-15 1979-06-05 Mitsubishi Electric Corp Production of filter for light attenuator

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62177502A (en) * 1986-01-31 1987-08-04 Nippon Soda Co Ltd Composite oxide thin film having high refractive index and optical interference film
JPS62257102A (en) * 1986-04-30 1987-11-09 Kyocera Corp Ceramic mirror
JPS63296001A (en) * 1987-05-28 1988-12-02 Toshinori Takagi Optical crystalline film
US6671109B2 (en) * 2001-07-27 2003-12-30 Nidec Copal Corporation ND filter having composite PVD film of metal and its oxide

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