FR2952428B1 - Capteur inertiel - Google Patents

Capteur inertiel

Info

Publication number
FR2952428B1
FR2952428B1 FR0905428A FR0905428A FR2952428B1 FR 2952428 B1 FR2952428 B1 FR 2952428B1 FR 0905428 A FR0905428 A FR 0905428A FR 0905428 A FR0905428 A FR 0905428A FR 2952428 B1 FR2952428 B1 FR 2952428B1
Authority
FR
France
Prior art keywords
sensitive element
density
inertial sensor
electrode carrier
supporting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0905428A
Other languages
English (en)
French (fr)
Other versions
FR2952428A1 (fr
Inventor
Jean Baptiste Eudier
Christophe Maerky
Thierry Bonjour
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Electronics and Defense SAS
Original Assignee
Sagem Defense Securite SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0905428A priority Critical patent/FR2952428B1/fr
Application filed by Sagem Defense Securite SA filed Critical Sagem Defense Securite SA
Priority to EP19180116.6A priority patent/EP3569978B1/en
Priority to EP10773929.4A priority patent/EP2499455B1/en
Priority to JP2012538324A priority patent/JP5947722B2/ja
Priority to PCT/EP2010/067217 priority patent/WO2011058060A1/en
Priority to US13/509,523 priority patent/US9303995B2/en
Priority to CN201080056371.1A priority patent/CN102695941B/zh
Priority to RU2012123939/28A priority patent/RU2540249C2/ru
Priority to KR1020127014148A priority patent/KR101735579B1/ko
Publication of FR2952428A1 publication Critical patent/FR2952428A1/fr
Application granted granted Critical
Publication of FR2952428B1 publication Critical patent/FR2952428B1/fr
Priority to JP2015122378A priority patent/JP6254120B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional [3D] vibrators, e.g. wine glass-type vibrators

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
FR0905428A 2009-11-12 2009-11-12 Capteur inertiel Expired - Fee Related FR2952428B1 (fr)

Priority Applications (10)

Application Number Priority Date Filing Date Title
FR0905428A FR2952428B1 (fr) 2009-11-12 2009-11-12 Capteur inertiel
KR1020127014148A KR101735579B1 (ko) 2009-11-12 2010-11-10 자이로스코픽 센서
JP2012538324A JP5947722B2 (ja) 2009-11-12 2010-11-10 ジャイロセンサ
PCT/EP2010/067217 WO2011058060A1 (en) 2009-11-12 2010-11-10 Gyroscopic sensor
US13/509,523 US9303995B2 (en) 2009-11-12 2010-11-10 Gyroscopic sensor
CN201080056371.1A CN102695941B (zh) 2009-11-12 2010-11-10 陀螺仪传感器
EP19180116.6A EP3569978B1 (en) 2009-11-12 2010-11-10 Gyroscopic sensor
EP10773929.4A EP2499455B1 (en) 2009-11-12 2010-11-10 Gyroscopic sensor
RU2012123939/28A RU2540249C2 (ru) 2009-11-12 2010-11-10 Гироскопический датчик
JP2015122378A JP6254120B2 (ja) 2009-11-12 2015-06-17 ジャイロセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0905428A FR2952428B1 (fr) 2009-11-12 2009-11-12 Capteur inertiel

Publications (2)

Publication Number Publication Date
FR2952428A1 FR2952428A1 (fr) 2011-05-13
FR2952428B1 true FR2952428B1 (fr) 2011-12-16

Family

ID=42562604

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0905428A Expired - Fee Related FR2952428B1 (fr) 2009-11-12 2009-11-12 Capteur inertiel

Country Status (8)

Country Link
US (1) US9303995B2 (https=)
EP (2) EP3569978B1 (https=)
JP (2) JP5947722B2 (https=)
KR (1) KR101735579B1 (https=)
CN (1) CN102695941B (https=)
FR (1) FR2952428B1 (https=)
RU (1) RU2540249C2 (https=)
WO (1) WO2011058060A1 (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2936049B1 (fr) * 2008-09-16 2010-09-17 Sagem Defense Securite Resonateur a metallisation partielle pour detecteur de parametre angulaire.
CN104215235B (zh) * 2013-06-05 2017-08-22 北京信息科技大学 一种新型钟形振子式角速率陀螺
KR101414391B1 (ko) * 2013-06-11 2014-07-02 한국항공우주연구원 반구형 공진 자이로
US9551513B2 (en) * 2014-06-12 2017-01-24 Raytheon Company Frequency-matched cryocooler scaling for low-cost, minimal disturbance space cooling
US10119820B2 (en) * 2015-02-10 2018-11-06 Northrop Grumman Systems Corporation Wide rim vibratory resonant sensors
CN105509724B (zh) * 2015-11-30 2019-09-24 上海新跃仪表厂 集成化金属振动陀螺仪
CN106441258B (zh) * 2016-09-09 2019-07-26 东南大学 微壳体谐振器及其谐振子制备方法
CN105466405B (zh) * 2016-01-07 2018-02-02 东南大学 一种混合式半球谐振微陀螺仪及其加工工艺
CN105628013B (zh) * 2016-01-07 2018-06-19 东南大学 一种组装式半球谐振微陀螺仪及其加工工艺
JP2020071074A (ja) 2018-10-29 2020-05-07 セイコーエプソン株式会社 センサーユニット、電子機器および移動体
US11428531B1 (en) * 2021-03-22 2022-08-30 Northrop Grumman Systems Corporation Diffusion block for an evacuated instrument system
CN114396926B (zh) * 2021-12-01 2024-04-23 上海航天控制技术研究所 一种半球谐振陀螺
CN114396925B (zh) * 2021-12-01 2023-08-04 上海航天控制技术研究所 一种带有弹簧阻尼结构的半球谐振陀螺
EP4594706A1 (en) 2022-10-04 2025-08-06 Enertia Microsystems Inc. Vibratory gyroscopes with resonator attachments
CN117754284A (zh) * 2023-12-14 2024-03-26 北京自动化控制设备研究所 一种半球谐振陀螺整表装配机构和方法

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3680391A (en) * 1969-10-06 1972-08-01 Gen Motors Corp Bell gyro and method of making same
US4019391A (en) * 1975-07-25 1977-04-26 The Singer Company Vibratory gyroscope
US4068533A (en) * 1976-11-30 1978-01-17 The Singer Company ESG Reflected impedance pickoff
CA1250458A (en) * 1983-10-31 1989-02-28 Edward J. Loper, Jr. Hemispherical resonator gyro
US4951508A (en) * 1983-10-31 1990-08-28 General Motors Corporation Vibratory rotation sensor
JPH0290551A (ja) * 1988-09-27 1990-03-30 Matsushita Electric Works Ltd セラミックパッケージの製法
US5218867A (en) * 1989-07-29 1993-06-15 British Aerospace Public Limited Company Single axis attitude sensor
JPH06260566A (ja) * 1993-03-04 1994-09-16 Sony Corp ランドグリッドアレイパッケージ及びその作製方法、並びに半導体パッケージ
US5712427A (en) * 1995-08-29 1998-01-27 Litton Systems Inc. Vibratory rotation sensor with scanning-tunneling-transducer readout
JP2000074770A (ja) * 1998-09-03 2000-03-14 Murata Mfg Co Ltd 減圧パッケージ装置及びその真空度の測定方法
FR2805039B1 (fr) * 2000-02-15 2002-04-19 Sagem Capteur gyroscopique
WO2003046479A1 (en) * 2001-11-29 2003-06-05 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
FR2851041B1 (fr) * 2003-02-06 2005-03-18 Sagem Procede de mise en oeuvre d'un resonateur sous l'effet de forces electrostatiques
CN2636198Y (zh) * 2003-07-14 2004-08-25 财团法人工业技术研究院 膜式微型陀螺仪及具有该陀螺仪的测量装置
FR2859017B1 (fr) * 2003-08-19 2005-09-30 Sagem Capteur de rotation inertiel a element sensible monte directement sur le corps
JP2005083779A (ja) * 2003-09-05 2005-03-31 Tdk Corp 角速度センサ
JP2005106584A (ja) 2003-09-30 2005-04-21 Mitsubishi Electric Corp 加速度センサユニット
US20050238803A1 (en) * 2003-11-12 2005-10-27 Tremel James D Method for adhering getter material to a surface for use in electronic devices
FI20031796L (fi) * 2003-12-09 2005-06-10 Asperation Oy Menetelmä EMI-suojan rakentamiseksi piirilevylle upotettavan komponentin ympärille
JP4386073B2 (ja) * 2004-04-07 2009-12-16 株式会社村田製作所 角速度計測装置
UA79166C2 (en) * 2005-05-31 2007-05-25 Yurii Oleksiiovych Yatsenko Detecting element of a vibratory gyroscope sensitive to coriolis acceleration
US7607350B2 (en) 2005-10-06 2009-10-27 Northrop Grumman Guidance And Electronics Company, Inc. Circuit board mounting for temperature stress reduction
US7281426B1 (en) * 2006-06-15 2007-10-16 Innalabs Technologies, Inc. Stemless hemispherical resonator gyroscope
JP2008185369A (ja) * 2007-01-26 2008-08-14 Sony Corp 角速度センサ、角速度センサの製造方法、電子機器、及び回路基板
JP2008185385A (ja) * 2007-01-29 2008-08-14 Sony Corp 角速度センサ及び電子機器
RU2362121C2 (ru) * 2007-07-09 2009-07-20 Закрытое акционерное общество "Научно-производственное предприятие "Медикон" Малогабаритный твердотелый волновой гироскоп
US8109145B2 (en) * 2007-07-31 2012-02-07 Northrop Grumman Guidance And Electronics Company, Inc. Micro hemispheric resonator gyro
US7839059B2 (en) * 2007-08-03 2010-11-23 Northrop Grumman Guidance And Electronics Company, Inc. Inner-forcer milli-hemispherical resonator gyro
RU2362975C1 (ru) * 2008-01-09 2009-07-27 Сергей Михайлович Бражнев Твердотельный волновой гироскоп

Also Published As

Publication number Publication date
EP2499455A1 (en) 2012-09-19
RU2012123939A (ru) 2013-12-20
CN102695941B (zh) 2015-11-25
EP3569978A1 (en) 2019-11-20
JP2013511029A (ja) 2013-03-28
JP6254120B2 (ja) 2017-12-27
RU2540249C2 (ru) 2015-02-10
KR101735579B1 (ko) 2017-05-24
JP5947722B2 (ja) 2016-07-06
JP2015180893A (ja) 2015-10-15
EP2499455B1 (en) 2019-09-25
US20120227497A1 (en) 2012-09-13
EP3569978B1 (en) 2021-06-16
CN102695941A (zh) 2012-09-26
FR2952428A1 (fr) 2011-05-13
WO2011058060A1 (en) 2011-05-19
KR20120094937A (ko) 2012-08-27
US9303995B2 (en) 2016-04-05

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