EA201491263A1 - Мультиосевой микроэлектронный инерциальный датчик - Google Patents

Мультиосевой микроэлектронный инерциальный датчик

Info

Publication number
EA201491263A1
EA201491263A1 EA201491263A EA201491263A EA201491263A1 EA 201491263 A1 EA201491263 A1 EA 201491263A1 EA 201491263 A EA201491263 A EA 201491263A EA 201491263 A EA201491263 A EA 201491263A EA 201491263 A1 EA201491263 A1 EA 201491263A1
Authority
EA
Eurasian Patent Office
Prior art keywords
test
microelectronic
test mass
axis
inertial sensor
Prior art date
Application number
EA201491263A
Other languages
English (en)
Inventor
Жак Леклерк
Original Assignee
Троникс Майкросистемз С.А.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Троникс Майкросистемз С.А. filed Critical Троникс Майкросистемз С.А.
Publication of EA201491263A1 publication Critical patent/EA201491263A1/ru

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/14—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of gyroscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system

Abstract

Резонаторный микроэлектронный инерциальный датчик, предпочтительно датчик микроэлектромеханической системы (МЭМС) (например, гироскоп), предназначенный для обнаружения линейных ускорений и скоростей вращения по более чем одной оси, содержит систему (21.1, ..., 21.4) пробных масс, гибко подвешенную над подложкой с возможностью совершения плоскостной поворотной вибрации относительно центральной оси (24); систему (D1, ..., D4) электродов возбуждения для возбуждения системы (21.1, ..., 21.4) пробных масс для совершения упомянутой плоскостной поворотной вибрации и систему (S1, S8) чувствительных электродов, соединенную с системой (21.1, ..., 21.4) пробных масс для обнаружения линейных ускорений или скоростей вращения по более чем одной оси. Упомянутая система (21.1, ..., 21.4) пробных масс имеет более чем два элемента пробной массы, гибко соединенных (25.1а, 25.1b) друг с другом. Каждый элемент (21.1, 21.2) пробной массы напрямую и гибко соединен (23.1, 25.1а, 25.1b) с анкерной конструкцией (22) на подложке (32). Элементы (21.1, ..., 21.4) пробной массы, предпочтительно, упорядочены в кольцеобразную конфигурацию между внутренним и внешним радиусами (R1, R2) по отношению к центральной оси (24).
EA201491263A 2011-12-22 2012-12-20 Мультиосевой микроэлектронный инерциальный датчик EA201491263A1 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP11290603.7A EP2607849A1 (en) 2011-12-22 2011-12-22 Multiaxial micro-electronic inertial sensor
PCT/EP2012/005288 WO2013091866A1 (en) 2011-12-22 2012-12-20 Multiaxial micro-electronic inertial sensor

Publications (1)

Publication Number Publication Date
EA201491263A1 true EA201491263A1 (ru) 2014-11-28

Family

ID=47666070

Family Applications (1)

Application Number Title Priority Date Filing Date
EA201491263A EA201491263A1 (ru) 2011-12-22 2012-12-20 Мультиосевой микроэлектронный инерциальный датчик

Country Status (5)

Country Link
US (1) US20140352431A1 (ru)
EP (2) EP2607849A1 (ru)
CN (1) CN104136886A (ru)
EA (1) EA201491263A1 (ru)
WO (1) WO2013091866A1 (ru)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9194704B2 (en) * 2013-03-13 2015-11-24 Freescale Semiconductor, Inc. Angular rate sensor having multiple axis sensing capability
JP5931111B2 (ja) * 2014-03-31 2016-06-08 ミネベア株式会社 検出装置
EP3034997B1 (en) * 2014-12-18 2020-12-16 RISE Research Institutes of Sweden AB Mems gyro
US11231441B2 (en) * 2015-05-15 2022-01-25 Invensense, Inc. MEMS structure for offset minimization of out-of-plane sensing accelerometers
CN104976996B (zh) * 2015-08-07 2017-11-21 中国人民解放军国防科学技术大学 带周期分布集中质量块的嵌套环式mems振动陀螺
US10345330B2 (en) 2015-09-25 2019-07-09 Apple Inc. Mechanical low pass filter for motion sensors
US10324105B2 (en) * 2015-09-25 2019-06-18 Apple Inc. Mechanical low pass filter for motion sensors
FR3041625B1 (fr) * 2015-09-29 2021-07-30 Tronics Microsystems Dispositif de fixation de deux elements tels qu'une puce, un interposeur et un support
CN105300369A (zh) * 2015-10-26 2016-02-03 马国才 一种电子系统多轴结构
AU2016344004A1 (en) 2015-10-30 2018-06-14 Ion Geophysical Corporation Multi-axis, single mass accelerometer
JP6514790B2 (ja) * 2016-01-27 2019-05-15 株式会社日立製作所 ジャイロスコープ
JP6501406B2 (ja) * 2016-02-15 2019-04-17 国立研究開発法人理化学研究所 測定装置、測定方法、プログラム、ならびに、情報記録媒体
ITUA20162160A1 (it) 2016-03-31 2017-10-01 St Microelectronics Srl Struttura micromeccanica di rilevamento di un giroscopio multiassiale mems, avente ridotte derive di relative caratteristiche elettriche
US10696541B2 (en) 2016-05-26 2020-06-30 Honeywell International Inc. Systems and methods for bias suppression in a non-degenerate MEMS sensor
US10371521B2 (en) 2016-05-26 2019-08-06 Honeywell International Inc. Systems and methods for a four-mass vibrating MEMS structure
CN107192384B (zh) * 2017-07-24 2022-04-05 深迪半导体(绍兴)有限公司 一种mems三轴陀螺仪
DE102017213637A1 (de) * 2017-08-07 2019-02-07 Robert Bosch Gmbh Ein- und zweiachsiger Drehratensensor
US11009350B2 (en) * 2018-01-11 2021-05-18 Invensense, Inc. Proof mass offset compensation
JP2019211218A (ja) * 2018-05-31 2019-12-12 セイコーエプソン株式会社 物理量センサー、複合センサー、慣性計測ユニット、移動体測位装置、携帯型電子機器、電子機器、移動体、走行支援システム、表示装置、および物理量センサーの製造方法
JP2019215269A (ja) * 2018-06-13 2019-12-19 セイコーエプソン株式会社 物理量センサー、複合センサー、慣性計測ユニット、移動体測位装置、携帯型電子機器、電子機器、移動体、走行支援システム、および表示装置
CN112955752A (zh) 2018-09-13 2021-06-11 离子地球物理学公司 多轴线、单质量加速度计
CN109556590B (zh) * 2018-11-02 2020-05-22 湖南天羿领航科技有限公司 谐振环/多谐振环六轴惯性传感器
EP3671118B1 (en) 2018-12-19 2021-08-25 Murata Manufacturing Co., Ltd. Vibration-robust multiaxis gyroscope
EP3671116B1 (en) * 2018-12-19 2021-11-17 Murata Manufacturing Co., Ltd. Synchronized multi-axis gyroscope
WO2020145203A1 (en) * 2019-01-08 2020-07-16 Panasonic Intellectual Property Management Co., Ltd. Sensing device
US10823569B1 (en) * 2019-08-22 2020-11-03 Nxp Usa, Inc. Multiple axis sensing device based on frequency modulation and method of operation
DE102020214019A1 (de) * 2020-11-09 2022-05-12 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Sensorelement
CN116601500A (zh) 2020-12-18 2023-08-15 美国亚德诺半导体公司 具有质量平移运动的加速度计
CN113091722A (zh) * 2021-04-02 2021-07-09 瑞声开泰科技(武汉)有限公司 三轴微机械陀螺仪及角速度的测量方法
CN113014138B (zh) * 2021-04-12 2022-05-31 维沃移动通信有限公司 振动组件及电子设备
EP4215922A1 (en) * 2022-01-19 2023-07-26 Murata Manufacturing Co., Ltd. Three-axis accelerometer with two masses

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3741036A1 (de) 1987-12-03 1989-06-15 Fraunhofer Ges Forschung Mikromechanischer beschleunigungsmesser
US5025346A (en) 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
DE69206770T2 (de) 1991-12-19 1996-07-11 Motorola Inc Dreiachsiger Beschleunigungsmesser
JP3999377B2 (ja) * 1997-11-04 2007-10-31 日本碍子株式会社 振動子、振動型ジャイロスコープ、直線加速度計および回転角速度の測定方法
US7089792B2 (en) * 2002-02-06 2006-08-15 Analod Devices, Inc. Micromachined apparatus utilizing box suspensions
DE10225714A1 (de) 2002-06-11 2004-01-08 Eads Deutschland Gmbh Mehrachsiger monolithischer Beschleunigungssensor
US6837107B2 (en) * 2003-04-28 2005-01-04 Analog Devices, Inc. Micro-machined multi-sensor providing 1-axis of acceleration sensing and 2-axes of angular rate sensing
US20070034007A1 (en) 2005-08-12 2007-02-15 Cenk Acar Multi-axis micromachined accelerometer
EP1832841B1 (en) * 2006-03-10 2015-12-30 STMicroelectronics Srl Microelectromechanical integrated sensor structure with rotary driving motion
JP4310325B2 (ja) * 2006-05-24 2009-08-05 日立金属株式会社 角速度センサ
EP2113744A4 (en) 2007-02-20 2013-04-17 Panasonic Corp DEGREE OF INERT AND SENSOR FOR DETECTING VENTILATION POWER
US20090183570A1 (en) 2008-01-18 2009-07-23 Custom Sensors & Technologies, Inc. Micromachined cross-differential dual-axis accelerometer
US8443665B2 (en) * 2008-10-21 2013-05-21 Ying W. Hsu Frequency modulated micro gyro
DE102009001922A1 (de) * 2009-03-26 2010-09-30 Sensordynamics Ag Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um drei senkrecht aufeinanderstehende Raumachsen x, y und z
US8739626B2 (en) 2009-08-04 2014-06-03 Fairchild Semiconductor Corporation Micromachined inertial sensor devices
US8448513B2 (en) * 2011-10-05 2013-05-28 Freescale Semiconductor, Inc. Rotary disk gyroscope

Also Published As

Publication number Publication date
US20140352431A1 (en) 2014-12-04
EP2795253B1 (en) 2018-10-03
EP2607849A1 (en) 2013-06-26
CN104136886A (zh) 2014-11-05
EP2795253A1 (en) 2014-10-29
WO2013091866A1 (en) 2013-06-27

Similar Documents

Publication Publication Date Title
EA201491263A1 (ru) Мультиосевой микроэлектронный инерциальный датчик
WO2012037538A3 (en) Micromachined monolithic 6-axis inertial sensor
EA201490658A1 (ru) Микроэлектромеханическое гироскопическое устройство
US8549917B2 (en) Microelectromechanical gyroscope with enhanced rejection of acceleration noises
CN104197909B (zh) 一种双半球结构微型谐振陀螺仪及其制备方法
WO2012037540A3 (en) Micromachined monolithic 3-axis gyroscope with single drive
BR112015004404A2 (pt) sensores inerciais de eixo duplo e triplo e métodos de detecção inercial
RU2006112318A (ru) Трехосевой акселерометр с переменной осевой чувствительностью
WO2015200850A3 (en) System and methods for determining rotation from nonlinear periodic signals
KR20130094203A (ko) 운동을 감지하기 위한 마이크로 자이로스코프
ITTO20080876A1 (it) Giroscopio microelettromeccanico con movimento di azionamento rotatorio e migliorate caratteristiche elettriche
JP6237917B2 (ja) 改良されたリングジャイロスコープ構造およびジャイロスコープ
ITTO20090489A1 (it) Circuito di lettura per un giroscopio mems multi-asse avente direzioni di rilevamento inclinate rispetto agli assi di riferimento, e corrispondente giroscopio mems multi-asse
DE602006007001D1 (de) Enzmessung der bewegung von vibrierenden massen
WO2012085456A3 (fr) Structure planaire pour gyromètre tri-axe
FR2952428B1 (fr) Capteur inertiel
EP2607850A3 (en) Micromechanical Coriolis Rate of Rotation Sensor
JP2012173055A5 (ru)
ITMI20130964A1 (it) Sensore di velocita' di rotazione
CN104197912B (zh) 一种双端固定式硅基微型半球谐振陀螺仪及其制备方法
US10393770B2 (en) Multi-axis accelerometer with reduced stress sensitivity
Weng et al. Structural design and analysis of micromachined ring-type vibrating sensor of both yaw rate and linear acceleration
Shah et al. Design and analysis of a single-structure three-axis MEMS gyroscope with improved coupling spring
RU2379630C1 (ru) Чувствительный элемент датчика угловой скорости
RU131875U1 (ru) Виброчастотный микромеханический акселерометр