FR2882996B1 - Composant micromecanique et son procede de fabrication - Google Patents

Composant micromecanique et son procede de fabrication

Info

Publication number
FR2882996B1
FR2882996B1 FR0650366A FR0650366A FR2882996B1 FR 2882996 B1 FR2882996 B1 FR 2882996B1 FR 0650366 A FR0650366 A FR 0650366A FR 0650366 A FR0650366 A FR 0650366A FR 2882996 B1 FR2882996 B1 FR 2882996B1
Authority
FR
France
Prior art keywords
manufacturing
same
micromechanical component
micromechanical
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0650366A
Other languages
English (en)
French (fr)
Other versions
FR2882996A1 (fr
Inventor
Franz Larmer
Silvia Kronmuller
Christina Leinenbach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2882996A1 publication Critical patent/FR2882996A1/fr
Application granted granted Critical
Publication of FR2882996B1 publication Critical patent/FR2882996B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0264—Pressure sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0109—Bridges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
FR0650366A 2005-02-03 2006-02-02 Composant micromecanique et son procede de fabrication Expired - Fee Related FR2882996B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005004878.1A DE102005004878B4 (de) 2005-02-03 2005-02-03 Mikromechanischer kapazitiver Drucksensor und entsprechendes Herstellungsverfahren

Publications (2)

Publication Number Publication Date
FR2882996A1 FR2882996A1 (fr) 2006-09-15
FR2882996B1 true FR2882996B1 (fr) 2015-12-25

Family

ID=36709616

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0650366A Expired - Fee Related FR2882996B1 (fr) 2005-02-03 2006-02-02 Composant micromecanique et son procede de fabrication

Country Status (4)

Country Link
US (1) US7262071B2 (enExample)
JP (1) JP5032030B2 (enExample)
DE (1) DE102005004878B4 (enExample)
FR (1) FR2882996B1 (enExample)

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US7880247B2 (en) * 2003-12-29 2011-02-01 Vladimir Vaganov Semiconductor input control device
US9034666B2 (en) 2003-12-29 2015-05-19 Vladimir Vaganov Method of testing of MEMS devices on a wafer level
US7772657B2 (en) * 2004-12-28 2010-08-10 Vladimir Vaganov Three-dimensional force input control device and fabrication
US7554167B2 (en) * 2003-12-29 2009-06-30 Vladimir Vaganov Three-dimensional analog input control device
US8350345B2 (en) 2003-12-29 2013-01-08 Vladimir Vaganov Three-dimensional input control device
DE102005047081B4 (de) * 2005-09-30 2019-01-31 Robert Bosch Gmbh Verfahren zum plasmalosen Ätzen von Silizium mit dem Ätzgas ClF3 oder XeF2
KR20090033184A (ko) * 2006-05-22 2009-04-01 블라디미르 바가노프 반도체 입력 제어 장치
WO2007139695A2 (en) * 2006-05-24 2007-12-06 Vladimir Vaganov Force input control device and method of fabrication
DE102006024668A1 (de) * 2006-05-26 2007-11-29 Robert Bosch Gmbh Mikromechanisches Bauelement und Verfahren zu dessen Herstellung
KR20090125087A (ko) * 2007-02-20 2009-12-03 퀄컴 엠이엠스 테크놀로지스, 인크. 마이크로전자기계 시스템〔ｍｅｍｓ〕의 에칭장치 및 에칭 방법
CN101652317B (zh) * 2007-04-04 2012-12-12 高通Mems科技公司 通过牺牲层中的界面修改来消除释放蚀刻侵蚀
DE102007029414A1 (de) 2007-06-26 2009-01-08 Robert Bosch Gmbh Kapazitiver Drucksensor
WO2009036215A2 (en) * 2007-09-14 2009-03-19 Qualcomm Mems Technologies, Inc. Etching processes used in mems production
DE102007046017B4 (de) * 2007-09-26 2021-07-01 Robert Bosch Gmbh Sensorelement
US8258591B2 (en) * 2008-01-16 2012-09-04 Solid State System Co., Ltd. Micro-electro-mechanical systems (MEMS) device
JP5473253B2 (ja) * 2008-06-02 2014-04-16 キヤノン株式会社 複数の導電性領域を有する構造体、及びその製造方法
DE102009000071A1 (de) 2009-01-08 2010-07-15 Robert Bosch Gmbh Kapazitiver Drucksensor
WO2010122953A1 (ja) 2009-04-24 2010-10-28 株式会社村田製作所 Ｍｅｍｓ素子およびその製造方法
DE102010003488A1 (de) * 2010-03-30 2011-10-06 Ihp Gmbh - Innovations For High Performance Microelectronics / Leibniz-Institut Für Innovative Mikroelektronik Verkapselung eines BiCMOS kompatiblen RFMEMS Schalters
KR101215919B1 (ko) * 2010-08-13 2012-12-27 전자부품연구원 정전용량형 압력센서 및 그의 제조방법
JP5778914B2 (ja) * 2010-11-04 2015-09-16 キヤノン株式会社 電気機械変換装置の製造方法
CN102539055B (zh) * 2012-02-13 2014-04-09 苏州文智芯微系统技术有限公司 基于智能剥离硅隔离芯片的耐高温抗腐蚀压力传感器
US8748999B2 (en) * 2012-04-20 2014-06-10 Taiwan Semiconductor Manufacturing Company, Ltd. Capacitive sensors and methods for forming the same
FR2999948B1 (fr) 2012-12-20 2016-04-29 Aerogroupe Plateforme mobile dans une structure cylindrique
US8900975B2 (en) * 2013-01-03 2014-12-02 International Business Machines Corporation Nanopore sensor device
US9216897B2 (en) * 2013-06-05 2015-12-22 Invensense, Inc. Capacitive sensing structure with embedded acoustic channels
CN105993064B (zh) * 2013-12-27 2019-12-03 英特尔公司 用于环绕栅极架构的选择性蚀刻
US9630837B1 (en) * 2016-01-15 2017-04-25 Taiwan Semiconductor Manufacturing Company Ltd. MEMS structure and manufacturing method thereof
US10554153B2 (en) * 2016-06-17 2020-02-04 Globalfoundries Singapore Pte. Ltd. MEMS device for harvesting sound energy and methods for fabricating same
JP6812880B2 (ja) * 2017-03-29 2021-01-13 東京エレクトロン株式会社 基板処理方法及び記憶媒体。
JP2020151796A (ja) * 2019-03-19 2020-09-24 株式会社リコー 振動素子基板の製造方法及び振動素子基板
US11791155B2 (en) * 2020-08-27 2023-10-17 Applied Materials, Inc. Diffusion barriers for germanium

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JPH05231970A (ja) * 1992-02-25 1993-09-07 Matsushita Electric Works Ltd 薄膜体ブリッジ構造
DE4241045C1 (de) 1992-12-05 1994-05-26 Bosch Gmbh Robert Verfahren zum anisotropen Ätzen von Silicium
JPH06347353A (ja) * 1993-06-11 1994-12-22 Fujikura Ltd 半導体圧力センサ
US7460291B2 (en) * 1994-05-05 2008-12-02 Idc, Llc Separable modulator
EP1025711A1 (en) * 1997-10-31 2000-08-09 Daewoo Electronics Co., Ltd Method for manufacturing thin film actuated mirror array in an optical projection system
JP2000022172A (ja) * 1998-06-30 2000-01-21 Matsushita Electric Ind Co Ltd 変換装置及びその製造方法
JP3362714B2 (ja) * 1998-11-16 2003-01-07 株式会社豊田中央研究所 静電容量型圧力センサおよびその製造方法
US6229190B1 (en) * 1998-12-18 2001-05-08 Maxim Integrated Products, Inc. Compensated semiconductor pressure sensor
EP1173893A4 (en) * 1999-01-15 2007-08-01 Univ California POLYSILICIUM-GERMANIUM FILMS FOR PERFORMING MICRO-ELECTROMECHANICAL SYSTEMS
DE10024266B4 (de) * 2000-05-17 2010-06-17 Robert Bosch Gmbh Verfahren zur Herstellung eines mikromechanischen Bauelements
US6355498B1 (en) * 2000-08-11 2002-03-12 Agere Systems Guartian Corp. Thin film resonators fabricated on membranes created by front side releasing
DE10047500B4 (de) * 2000-09-26 2009-11-26 Robert Bosch Gmbh Mikromechanische Membran und Verfahren zu ihrer Herstellung
DE10122765A1 (de) * 2001-05-10 2002-12-05 Campus Micro Technologies Gmbh Elektroakustischer Wandler zur Erzeugung oder Erfassung von Ultraschall, Wandler-Array und Verfahren zur Herstellung der Wandler bzw. der Wandler-Arrays
US6635519B2 (en) * 2002-01-10 2003-10-21 Agere Systems, Inc. Structurally supported thin film resonator and method of fabrication
DE10230252B4 (de) * 2002-07-04 2013-10-17 Robert Bosch Gmbh Verfahren zur Herstellung integrierter Mikrosysteme
DE10239306B4 (de) * 2002-08-27 2006-08-31 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Verfahren zum selektiven Verbinden von Substraten

Also Published As

Publication number Publication date
DE102005004878A1 (de) 2006-08-10
US20060170012A1 (en) 2006-08-03
US7262071B2 (en) 2007-08-28
DE102005004878B4 (de) 2015-01-08
JP5032030B2 (ja) 2012-09-26
FR2882996A1 (fr) 2006-09-15
JP2006212773A (ja) 2006-08-17

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