FR2882438B1 - Dispositif capteur d'humidite et procede d'autodiagnostic pour celui-ci - Google Patents

Dispositif capteur d'humidite et procede d'autodiagnostic pour celui-ci

Info

Publication number
FR2882438B1
FR2882438B1 FR0601651A FR0601651A FR2882438B1 FR 2882438 B1 FR2882438 B1 FR 2882438B1 FR 0601651 A FR0601651 A FR 0601651A FR 0601651 A FR0601651 A FR 0601651A FR 2882438 B1 FR2882438 B1 FR 2882438B1
Authority
FR
France
Prior art keywords
self
heating
humidity
sensor device
humidity sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0601651A
Other languages
English (en)
Other versions
FR2882438A1 (fr
Inventor
Toshikazu Itakura
Toshiki Isogai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Soken Inc
Original Assignee
Denso Corp
Nippon Soken Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp, Nippon Soken Inc filed Critical Denso Corp
Publication of FR2882438A1 publication Critical patent/FR2882438A1/fr
Application granted granted Critical
Publication of FR2882438B1 publication Critical patent/FR2882438B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B17/00—Machines or apparatus for drying materials in loose, plastic, or fluidised form, e.g. granules, staple fibres, with progressive movement
    • F26B17/26—Machines or apparatus for drying materials in loose, plastic, or fluidised form, e.g. granules, staple fibres, with progressive movement with movement performed by reciprocating or oscillating conveyors propelling materials over stationary surfaces; with movement performed by reciprocating or oscillating shelves, sieves, or trays
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
    • F26B25/06—Chambers, containers, or receptacles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B2210/00—Drying processes and machines for solid objects characterised by the specific requirements of the drying good
    • F26B2210/10—Umbrellas

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Electrochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

Dispositif capteur d'humidité (500) comprenant une partie capteur (100) dont la capacité est amenée à varier en fonction de l'humidité ambiante, un processeur (300) de signal pour traiter un signal de détection de la partie capteur et délivrer le signal correspondant à l'humidité, une partie chauffante (200) pour chauffer la partie capteur et un dispositif de commande (400) pour commander le chauffage de la partie chauffante (200) de façon que la capacité de la partie capteur (100) soit sensiblement égale à une valeur sous une humidité prédéterminée au moins pendant une période d'autodiagnostic.
FR0601651A 2005-02-24 2006-02-24 Dispositif capteur d'humidite et procede d'autodiagnostic pour celui-ci Expired - Fee Related FR2882438B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005049598A JP4566784B2 (ja) 2005-02-24 2005-02-24 湿度センサ装置

Publications (2)

Publication Number Publication Date
FR2882438A1 FR2882438A1 (fr) 2006-08-25
FR2882438B1 true FR2882438B1 (fr) 2013-09-13

Family

ID=36809558

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0601651A Expired - Fee Related FR2882438B1 (fr) 2005-02-24 2006-02-24 Dispositif capteur d'humidite et procede d'autodiagnostic pour celui-ci

Country Status (5)

Country Link
US (1) US7176700B2 (fr)
JP (1) JP4566784B2 (fr)
KR (2) KR100852475B1 (fr)
CN (1) CN100549685C (fr)
FR (1) FR2882438B1 (fr)

Families Citing this family (68)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4804308B2 (ja) * 2005-12-08 2011-11-02 株式会社デンソー 湿度センサ
JP4770530B2 (ja) * 2006-03-13 2011-09-14 株式会社デンソー 容量式湿度センサ
JP4821560B2 (ja) * 2006-10-27 2011-11-24 株式会社デンソー 液体性状センサ
JP4882732B2 (ja) * 2006-12-22 2012-02-22 株式会社デンソー 半導体装置
TWI317812B (en) * 2006-12-22 2009-12-01 Delta Electronics Inc Capacitance acceleration sensing structure
JP5012036B2 (ja) * 2007-01-17 2012-08-29 トヨタ自動車株式会社 硫黄成分検出装置
JP4375579B2 (ja) * 2007-02-08 2009-12-02 株式会社デンソー 容量式物理量検出装置
JP5070901B2 (ja) * 2007-03-28 2012-11-14 株式会社デンソー 湿度センサ装置
US7683636B2 (en) * 2007-10-26 2010-03-23 Honeywell International Inc. Structure for capacitive balancing of integrated relative humidity sensor
JP2010127763A (ja) * 2008-11-27 2010-06-10 Hitachi Ltd 半導体力学量検出センサ及びそれを用いた制御装置
US7816681B2 (en) * 2008-12-03 2010-10-19 Electronics And Telecommunications Research Institute Capacitive gas sensor and method of fabricating the same
KR101201896B1 (ko) * 2008-12-03 2012-11-16 한국전자통신연구원 정전용량형 환경유해가스 센서 및 그 제조방법
JP4915421B2 (ja) * 2009-01-07 2012-04-11 株式会社デンソー 容量式湿度検出装置
EP2278309B1 (fr) * 2009-07-21 2019-05-15 ams international AG Capteur
JP5524234B2 (ja) * 2009-11-06 2014-06-18 株式会社日立製作所 ガスセンサ
CN101738422B (zh) * 2009-12-23 2012-09-05 北京宝力马传感技术有限公司 一种湿度测量装置及方法
JP2012047725A (ja) * 2010-07-30 2012-03-08 Canon Anelva Corp 静電容量圧力センサ
WO2012046501A1 (fr) * 2010-10-04 2012-04-12 アルプス電気株式会社 Capteur détecteur d'humidité et son procédé de production
US9063067B1 (en) 2010-11-17 2015-06-23 Alvin P. Schmitt Moisture sensing devices
MY154211A (en) * 2011-04-26 2015-05-15 Mimos Berhad A humidity sensor device
JP5507524B2 (ja) * 2011-11-07 2014-05-28 株式会社日立製作所 可燃性ガスセンサ
US20130160518A1 (en) * 2011-12-22 2013-06-27 Stmicroelectronics Asia Pacific Pte Ltd. Relative humidity sensor and method for calibration thereof
AU2013208273B2 (en) 2012-01-10 2015-11-26 Hzo, Inc. Methods, apparatuses and systems for monitoring for exposure of electronic devices to moisture and reacting to exposure of electronic devices to moisture
WO2013106442A1 (fr) 2012-01-10 2013-07-18 Hzo, Inc. Masques servant à l'application de revêtements de protection sur des ensembles électroniques, ensembles électroniques masqués, et procédés associés
US9146207B2 (en) * 2012-01-10 2015-09-29 Hzo, Inc. Methods, apparatuses and systems for sensing exposure of electronic devices to moisture
KR101497586B1 (ko) * 2012-07-05 2015-03-02 호쿠토 덴시 고교 가부시키가이샤 정전용량형의 수분 검출 장치
JP2014038056A (ja) * 2012-08-20 2014-02-27 Hitachi Automotive Systems Ltd 湿度検出装置
CN103018288B (zh) * 2012-12-18 2014-11-12 哈尔滨理工大学 一种可控加热除霜电容式高空湿度传感器的制备方法
JP2015513664A (ja) 2013-01-08 2015-05-14 エイチズィーオー・インコーポレーテッド 電子デバイスの湿分への曝露を検知し反応するための装置、システム、及び方法
US9482172B2 (en) 2013-02-22 2016-11-01 Ford Global Technologies, Llc Humidity sensor diagnostics
US9234859B2 (en) * 2013-03-28 2016-01-12 Stmicroelectronics S.R.L. Integrated device of a capacitive type for detecting humidity, in particular manufactured using a CMOS technology
US9329160B2 (en) * 2013-04-05 2016-05-03 Ford Global Technologies, Llc Humidity sensor diagnostic method using condensation clearing heater
DE102014200060A1 (de) * 2013-08-28 2015-03-19 Micro-Epsilon Messtechnik Gmbh & Co. Kg Sensorelement und Sensor mit einem entsprechenden Sensorelement
CN103630582B (zh) * 2013-12-11 2016-02-10 江苏物联网研究发展中心 一种mems湿度传感器及制备方法
JP2017507325A (ja) * 2014-01-08 2017-03-16 ホゾ インコーポレイテッドＨｚｏ， Ｉｎｃ． 水分への電子デバイスの曝露を検知する方法、装置およびシステム
JP6228865B2 (ja) * 2014-03-06 2017-11-08 アルプス電気株式会社 センサ装置の検査方法及びそのセンサ装置
KR102237710B1 (ko) * 2014-06-18 2021-04-09 주식회사 해치텍 커패시터형 습도센서
US9882065B2 (en) * 2014-06-27 2018-01-30 Texas Instruments Incorporated Analog floating-gate atmometer
KR102187614B1 (ko) * 2014-07-02 2020-12-08 주식회사 키 파운드리 커패시터형 습도센서
US10267756B2 (en) * 2014-07-23 2019-04-23 National Institute For Materials Science Dryness/wetness responsive sensor having first and second wires spaced 5 nm to less than 20 μm apart
EP3259581B1 (fr) 2015-02-17 2020-01-29 Honeywell International Inc. Capteur d'humidité et procédé de fabrication du capteur
JP6535185B2 (ja) * 2015-03-04 2019-06-26 エイブリック株式会社 湿度センサ
AT516980B1 (de) * 2015-03-20 2017-10-15 Ait Austrian Inst Technology Anordnung zur Bestimmung der Feuchtigkeit eines Gegenstands
CN104914138A (zh) * 2015-07-03 2015-09-16 深圳市共进电子股份有限公司 湿度传感器、湿度传感器阵列及其制备方法
DE102015216997A1 (de) * 2015-09-04 2017-03-09 Robert Bosch Gmbh Kapazitive Struktur und Verfahren zum Bestimmen einer Ladungsmenge unter Verwendung der kapazitiven Struktur
JP6546665B2 (ja) * 2015-09-30 2019-07-17 日立オートモティブシステムズ株式会社 物理量検出装置
EP3244201B1 (fr) 2016-05-13 2021-10-27 Honeywell International Inc. Capteur d'humidité à base de tec avec couche barrière protégeant le diélectrique de grille
CN106053393A (zh) * 2016-05-18 2016-10-26 南京信息工程大学 一种基于纳米共轴腔结构和表面等离激元效应的相对湿度传感器件及其制作方法
JP6790327B2 (ja) * 2016-09-30 2020-11-25 ミネベアミツミ株式会社 湿度センサ
JP6802703B2 (ja) 2016-12-14 2020-12-16 日立オートモティブシステムズ株式会社 気体センサ装置
KR102658311B1 (ko) * 2017-02-08 2024-04-18 삼성전자주식회사 스피커를 포함하는 전자 장치
EP3379218B1 (fr) * 2017-03-21 2020-07-15 MEAS France Procédé permettant de fournir un diagnostic sur un capteur d'humidité et de température combiné
US20200158677A1 (en) * 2018-11-16 2020-05-21 Minebea Mitsumi Inc. Detecting device
US11460428B2 (en) 2018-11-16 2022-10-04 Minebea Mitsumi Inc. Humidity detecting device and method of determining malfunction
JP7176676B2 (ja) * 2018-11-16 2022-11-22 ミネベアミツミ株式会社 検出装置
JP7193203B2 (ja) * 2018-11-16 2022-12-20 ミネベアミツミ株式会社 検出装置
JP7173662B2 (ja) * 2018-11-16 2022-11-16 ミネベアミツミ株式会社 検出装置
JP7200615B2 (ja) * 2018-11-16 2023-01-10 ミネベアミツミ株式会社 検出装置
US11313824B2 (en) * 2018-11-16 2022-04-26 Minebea Mitsumi Inc. Detecting device
KR102274575B1 (ko) * 2018-12-21 2021-07-06 서울대학교산학협력단 수분 포텐셜 측정 장치 및 방법
JP7096635B2 (ja) * 2019-03-22 2022-07-06 株式会社日立製作所 水分検出素子、呼気ガス検出装置、呼気検査システム及び水分検出素子の製造方法
US11397047B2 (en) * 2019-04-10 2022-07-26 Minebea Mitsumi Inc. Moisture detector, moisture detection method, electronic device, and log output system
KR20210018723A (ko) * 2019-08-09 2021-02-18 삼성디스플레이 주식회사 터치 구동 회로 및 이를 포함하는 표시 장치
US20220390406A1 (en) * 2019-11-08 2022-12-08 Hitachi Astemo, Ltd. Humidity sensor diagnosis device
JP2021092453A (ja) * 2019-12-11 2021-06-17 ミネベアミツミ株式会社 湿度センサ
WO2022031265A1 (fr) * 2020-08-03 2022-02-10 Hewlett-Packard Development Company, L.P. Capteurs imprimés tridimensionnels
EP4012393A1 (fr) 2020-12-09 2022-06-15 Vaisala Oyj Capteur d'humidité rapide et procédé d'étalonnage du capteur d'humidité rapide
CN112881481A (zh) * 2021-01-15 2021-06-01 江苏创芯海微科技有限公司 高性能湿度传感器及其制备方法

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6076655A (ja) 1983-10-03 1985-05-01 Matsushita Electric Ind Co Ltd 故障診断型湿度検出器
JPH0814556B2 (ja) * 1987-03-31 1996-02-14 エヌオーケー株式会社 温度センサ内蔵型感湿素子
JPH01301158A (ja) * 1988-05-30 1989-12-05 Toshiba Corp ガスセンサ
JPH0599877A (ja) * 1991-06-25 1993-04-23 Yamatake Honeywell Co Ltd 感湿装置
JP3112180B2 (ja) * 1991-09-04 2000-11-27 グローリー工業株式会社 湿度センサ
US5362975A (en) * 1992-09-02 1994-11-08 Kobe Steel Usa Diamond-based chemical sensors
FI98567C (fi) * 1993-09-29 1997-07-10 Vaisala Oy Impedanssianturi, etenkin radiosondikäyttöön, sekä menetelmä anturin valmistamiseksi
JP3369677B2 (ja) 1993-11-25 2003-01-20 グローリー工業株式会社 温湿度センサ
US5723864A (en) * 1995-09-01 1998-03-03 Innovative Lasers Corporation Linear cavity laser system for ultra-sensitive gas detection via intracavity laser spectroscopy (ILS)
AT1469U1 (de) * 1996-04-10 1997-05-26 E & E Elektronik Gmbh Verfahren zum ermitteln der absoluten luftfeuchtigkeit
JPH10160698A (ja) * 1996-11-29 1998-06-19 Tokin Corp マイクロセンサ
US5767687A (en) * 1996-11-29 1998-06-16 Geist; Jon Surface-capacitor type condensable-vapor sensor
DE19729697C1 (de) 1997-07-11 1999-02-11 Mannesmann Vdo Ag Anordnung zum Bestimmen der relativen Luftfeuchte
JP4178658B2 (ja) 1998-06-30 2008-11-12 株式会社デンソー 容量式物理量検出装置
KR20000013253U (ko) * 1998-12-24 2000-07-15 권태웅 저항형 습도센서
JP2002039983A (ja) 2000-07-21 2002-02-06 Denso Corp 湿度センサ
JP2002116172A (ja) * 2000-10-10 2002-04-19 Ngk Spark Plug Co Ltd 湿度センサ
JP3617032B2 (ja) * 2000-11-17 2005-02-02 エスペック株式会社 湿度センサの校正方法およびそれを用いた湿度センサ
JP2003065819A (ja) * 2001-08-27 2003-03-05 Denso Corp 薄膜式センサ
KR100504783B1 (ko) * 2003-01-04 2005-07-29 엘지전자 주식회사 히터 내장형 습도센서 및 이를 이용한 습도 측정 방법
JP3855950B2 (ja) 2003-03-19 2006-12-13 株式会社デンソー 容量式湿度センサ
DE10335553A1 (de) * 2003-08-02 2005-02-17 E + E Elektronik Ges.M.B.H. Verfahren und Anordnung zur Feuchtemessung
JP3994975B2 (ja) * 2004-02-27 2007-10-24 株式会社デンソー 容量式湿度センサ
JP2006317155A (ja) * 2005-05-10 2006-11-24 Ngk Spark Plug Co Ltd ガスセンサおよびその製造方法

Also Published As

Publication number Publication date
JP2006234576A (ja) 2006-09-07
US20060186901A1 (en) 2006-08-24
US7176700B2 (en) 2007-02-13
JP4566784B2 (ja) 2010-10-20
KR20060094484A (ko) 2006-08-29
FR2882438A1 (fr) 2006-08-25
KR20070118564A (ko) 2007-12-17
CN100549685C (zh) 2009-10-14
KR100852475B1 (ko) 2008-08-14
CN1825103A (zh) 2006-08-30

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