FR2847036B1 - Dispositif pour la mesure non destructive de l'epaisseur de couches minces - Google Patents

Dispositif pour la mesure non destructive de l'epaisseur de couches minces

Info

Publication number
FR2847036B1
FR2847036B1 FR0313040A FR0313040A FR2847036B1 FR 2847036 B1 FR2847036 B1 FR 2847036B1 FR 0313040 A FR0313040 A FR 0313040A FR 0313040 A FR0313040 A FR 0313040A FR 2847036 B1 FR2847036 B1 FR 2847036B1
Authority
FR
France
Prior art keywords
layer thickness
thin layer
destructive measurement
destructive
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0313040A
Other languages
English (en)
French (fr)
Other versions
FR2847036A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Immobiliengesellschaft Helmut Fischer GmbH and Co KG
Original Assignee
Immobiliengesellschaft Helmut Fischer GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Immobiliengesellschaft Helmut Fischer GmbH and Co KG filed Critical Immobiliengesellschaft Helmut Fischer GmbH and Co KG
Publication of FR2847036A1 publication Critical patent/FR2847036A1/fr
Application granted granted Critical
Publication of FR2847036B1 publication Critical patent/FR2847036B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Indicating Measured Values (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
FR0313040A 2002-11-08 2003-11-06 Dispositif pour la mesure non destructive de l'epaisseur de couches minces Expired - Fee Related FR2847036B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10252541.2A DE10252541B4 (de) 2002-11-08 2002-11-08 Vorrichtung zur zerstörungsfreien Messung der Dicke dünner Schichten

Publications (2)

Publication Number Publication Date
FR2847036A1 FR2847036A1 (fr) 2004-05-14
FR2847036B1 true FR2847036B1 (fr) 2005-11-11

Family

ID=29723942

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0313040A Expired - Fee Related FR2847036B1 (fr) 2002-11-08 2003-11-06 Dispositif pour la mesure non destructive de l'epaisseur de couches minces

Country Status (6)

Country Link
US (1) US7180286B2 (enExample)
JP (1) JP2004163430A (enExample)
CN (1) CN100429473C (enExample)
DE (1) DE10252541B4 (enExample)
FR (1) FR2847036B1 (enExample)
GB (1) GB2396700B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2383810B1 (es) * 2009-12-22 2013-05-08 Asociación De Investigación Metalúrgica Del Noroeste Aimen Equipo móvil de inspección del espesor de recubrimientos de película seca, sistema de inspección del espesor de recubrimientos de película seca y procedimiento de inspección del espesor de recubrimientos de película seca.
DE202010006061U1 (de) * 2010-04-23 2010-07-22 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Messsonde zur zerstörungsfreien Messung der Dicke dünner Schichten
CN103988243B (zh) 2011-12-14 2017-09-12 英特尔公司 微型数字看板硬件集成

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2311623A1 (de) * 1973-03-09 1974-09-12 Fischer Gmbh & Co Helmut Vorrichtung zum messen der dicke von schichten mit einem die schicht bestrahlenden radionuklid
JPS49146970U (enExample) * 1973-04-16 1974-12-18
JPS5181684U (enExample) * 1974-12-23 1976-06-30
US4730247A (en) * 1983-09-05 1988-03-08 Mitutoyo Mfg. Co., Ltd. Digital indication type measuring apparatus and measured data storage apparatus therefor
JPS6138503A (ja) * 1984-07-31 1986-02-24 Ketsuto Kagaku Kenkyusho:Kk 膜厚計
US4745809A (en) * 1986-08-12 1988-05-24 Grumman Aerospace Corporation Composite analyzer tester
US5241280A (en) * 1990-06-05 1993-08-31 Defelsko Corporation Coating thickness measurement gauge
DE59201672D1 (de) * 1992-07-03 1995-04-20 Nix Norbert Magnetinduktive und Wirbelstrommesssonde zur Messung einer Schichtdicke.
US5583830A (en) * 1993-06-30 1996-12-10 Casio Computer Co., Ltd. Electronic appliance equipped with sensor capable of visually displaying sensed data
FI115160B (fi) * 1994-06-22 2005-03-15 Suunto Oy Optisesti luettava suuntimakompassi
DE19511397C1 (de) * 1995-03-28 1996-09-12 Norbert Nix Gerät zur Feststellung eines Lackschadens
GB9520414D0 (en) * 1995-10-06 1995-12-06 Car Light & Sound Sys Ltd Thickness measurement
US5959451A (en) * 1997-08-18 1999-09-28 Torfino Enterprises, Inc. Metal detector with vibrating tactile indicator mounted within a compact housing
GB2347220B (en) * 1999-02-23 2003-12-31 Rynhart Res Ltd A moisture meter
DE19918064C2 (de) * 1999-04-21 2003-09-18 Norbert Nix Schichtdickenmeßgerät mit automatisierter Nulleinstellung und/oder Kalibrierung
GB2356050B (en) * 1999-11-05 2001-10-24 Elcometer Instr Ltd Apparatus and method for measuring thickness
DE20206657U1 (de) * 2002-04-26 2002-09-19 Gimex Dr. Gao Import u. Export GmbH, 67655 Kaiserslautern Multianzeige für Digital-Meßmittel

Also Published As

Publication number Publication date
CN100429473C (zh) 2008-10-29
GB2396700A (en) 2004-06-30
GB2396700B (en) 2005-11-16
JP2004163430A (ja) 2004-06-10
US7180286B2 (en) 2007-02-20
FR2847036A1 (fr) 2004-05-14
US20040165198A1 (en) 2004-08-26
GB0325704D0 (en) 2003-12-10
CN1501048A (zh) 2004-06-02
DE10252541A1 (de) 2004-05-27
DE10252541B4 (de) 2016-08-11

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